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P Series DLC Vacuum Coating Machine

P Series DLC Vacuum Coating Machine

product & project

The Naxau P-Series PVD Vacuum Deposition Systems are designed on the Naxau SPARK platform, which features the key technologies of CVC (Continuously Variable Cathode) and UFC (Ultra Fine Cathode) arc cathodes.
Highly flexible and one of the most reliable production outputs in the industry. Multiple plasma technologies can be compounded on one machine.

  • Based on APC arc technology
  • SET etching technology
  • Higher plating rate for multilayer nanocomposite structure coatings

P Standard SeriesDLC Vacuum Coating Equipment

PeCVD – DLC | GLC | ta-C | DLC-x
P850P1200P1600
Effective size of plasma [mm]D680x850D680x1200D800x1600
Load capacity [kg]5008001200
PVD technology CFS ® , PECVD CFS ® , PECVD CFS ® , PECVD
Etching technologySET®SET®SET®
Number of cathodes446
Coating time [h] 10-12h 10-12h 10-12h
Coating hardness [hv]1200-25001200-25001200-2500
Roughness Ra[um]<0.05<0.05<0.05
Binding force - scratch[N]>30, >20>30, >20>30, >20
Coating typeCr+W-C:H+a-C:H, Cr+WC-C:H, GLC, Al-Sn-Cu, MoS2, etc.Cr+W-C:H+a-C:H, Cr+WC-C:H, GLC, Al-Sn-Cu, MoS2Cr+W-C:H+a-C:H, Cr+WC-C:H, GLC, Al-Sn-Cu, MoS2
Footprint D*W*H (mm) 4600x2300x20004600x2300x2300 4600x2300x2500

The configuration of SET plasma enhancement technology facilitates the dissociation of carbon source gases such as C2H2, CH4, etc., and the preparation of low friction coefficient, higher hardness, low a-C:H, a-C:Si DLC coatings and WCC coatings.

Specificities

  • 4 magnetron sputtering cathodes for the preparation of nitride and carbide films
  • Non-equilibrium closed magnetic field can be configured. High-density, low-energy bombardment ions are used for deposition coating, with good coating density, low columnar crystal structure and low internal stress.
  • Ion Beam Enhanced PECVD Technology for Carbon Films with Faster Deposition Rates
  • Vertical loading, more convenient product loading
  • High Performance UBM Sputtering Sources
  • Filament argon ion etching source
  • Turbomolecular pump*2

hardware

  • PC Intelligent Systems Germany
  • Touch screen control
  • Data logging and real-time display of process parameters and flows
  • Automatic process control
  • Remote diagnostics and maintenance
  • Access to digital management systems
DLC Black Gear

Highly customizable DLC membrane system - adjustable parameters

The hardest substance in nature is diamond (sp3 bond), while graphite (sp2 bond) is one of the softest substances.DLC is a diamond-like amorphous carbon substrate mixed with sp3 and sp2 bonds.The more SP3 bonds, the harder the DLC, and the opposite, the softer it is.DLC coatings are usually used for high hardness and self-lubrication, corrosion resistance, insulation, light absorption and other working conditions. In order to realize more diversified functional requirements, doping with other elements such as Si, F, B, W, Ta, etc. can realize various purposes such as super lubrication, high temperature resistance, anti-adhesion and stress reduction.

Nano Lion Ion Enhanced PECVD Technology

P Series Sputter Coaterapplication program

  • Injection Screw - Injection Mold Coating" /&gt;<figcaption><span>               Surface Hardness: 2000HV Coating Thickness: 0.01-0.02mm Wear Resistance: ★★★★ Corrosion Resistance: ★★★★★ Anti-Stickiness: ★★★★ Applicable Working Condition: High Speed, High Pressure, Sticky Material; Applicable to Transparent Optical Products, All kinds of Lenses, Light Guide Plates, etc.; Commonly Used Optical Products Plastic: PMMA, PC, COC, COP, CR-39, etc.; Table ...</span></figcaption></figure></a></div><div class= Injection Screw - Injection Mold Coating
    • Coating ProgramsChromium Nitride | Titanium Mirror Nitride | DLC | Aluminum Titanium

    Surface hardness: 2000HV Coating thickness: 0.01-0.02mm Abrasion resistance: ★★★★ Corrosion resistance: ★★★★★ Anti-sticking ability: ★★★★ Applicable working conditions: high speed, high pressure, sticky material; for transparent optical products, all kinds of lenses, light guide plate, etc.; commonly used plastics for optical products: PMMA, PC, COC, COP, CR-39 and so on;reflect sth.

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  • Non-precious metal coating for fuel cell bipolar plates" /&gt;<figcaption><span>    NanoShield's bipolar plate protective coating, which has entered the pilot stage, is already better than the industry average in terms of corrosion potential and ICR: Interface Resistance. The second generation of NNCL's hydrogen fuel cell coatings are still doped non-precious metal PVD coatings. We have deep cooperation with universities to maintain the industry's top level.           Customized ion source and sink for fuel cell...</span></figcaption></figure></a></div><div class= Non-precious metal coating for fuel cell bipolar plates
    • Industry ApplicationsHydrogen Energy | Hydrogen Storage | Bipolar Plates | Precious Metal Substitution

    NanoShield's bipolar plate protective coating, which has entered the pilot stage, is already better than the industry average in terms of corrosion potential and ICR: Interface Resistance. The second generation of NanoShield's hydrogen fuel cell coatings are still doped non-precious metal PVD coatings. We have deep cooperation with universities to maintain the industry's top level. Customized ion source and sink for fuel cell...

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  • DLC diamond-like coatings" /&gt;<figcaption><span>                       DLC nanocoatings are usually categorized by the ratio of sp3 to sp2 bonds and hydrogen content. Diamond is sp3 bonded and graphite is sp2. the hardness of the coating usually increases when the sp3 percentage increases. dlc coatings are sub-stabilized materials, and heating induces amorphous recrystallization and phase change towards sp2 graphite. dlc self-lubricating hard coatings dlc wear-resistant decorative coating...</span></figcaption></figure></a></div><div class= DLC diamond-like coatings
    • Coating ProgramsDLC | ta-C Ultra Hard | WcC | Super Lubrication | Wear Resistant Decorative Plating

    DLC nanocoatings are usually categorized by the ratio of sp3 to sp2 bonds and hydrogen content. Diamond is sp3 bonded and graphite is sp2. the hardness of the coating usually increases as the sp3 ratio increases. dLC coatings are sub-stable materials, and heating induces amorphous recrystallization and phase change towards sp2 graphite. DLC self-lubricating hard coatingsDLC Wear Resistant Decorative Plating ...

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  • Plastic molds" /&gt;<figcaption><span>    ● Most of the plastic injection molded products are appearance parts, which have the most stringent requirements on the surface quality of the products, and any problems and defects on the surface of the molds will be completely reflected on the injection molded products. ● Plastic molds not only have the problem of insufficient surface hardness such as surface scratches and abrasion, but also have the problem of corrosion at the same time. Most of the wear-resistant coatings on the market are not corrosion-resistant. ● Plastic molds often have a variety of surface...</span></figcaption></figure></a></div><div class= Plastic molds
    • Industry Applications Stamping Mold | Plastic Molds | Die Casting Molds | Stretch Molds

    ● Most of the plastic injection molded products are appearance parts, which have the most stringent requirements on the surface quality of the products, and any problems and defects on the surface of the molds will be completely reflected on the injection molded products. ● Plastic molds not only have the problem of insufficient surface hardness such as surface scratches and abrasion, but also have the problem of corrosion at the same time. Most of the wear-resistant coatings on the market are not corrosion-resistant. ● Plastic molds often have a variety of surface...

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Dual-etching technology for dramatically improved bonding::

Based on more than 20 years of continuous operation and improvement, Naxau has developed a plasma etching technology SET and CET. Proper etching of the tool surface to achieve a clean and revitalized interface prior to coating is critical to a successful coating result. Etching requires the removal of surface contaminants such as metal oxides, water vapor, micro-oils and sweat debris. Etching also reactivates the surface and opens up molecular chains to induce ionic bonding during the coating process.

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