{"id":2280,"date":"2023-09-08T15:49:15","date_gmt":"2023-09-08T07:49:15","guid":{"rendered":"https:\/\/www.naxau.cn\/?p=2280"},"modified":"2023-11-23T16:11:55","modified_gmt":"2023-11-23T08:11:55","slug":"\u0443\u0441\u043b\u0443\u0433\u0438-\u043f\u043e-\u043d\u0430\u043d\u0435\u0441\u0435\u043d\u0438\u044e-\u043f\u043e\u043a\u0440\u044b\u0442\u0438\u0439-\u043d\u0430-\u043f\u043e\u0432\u0435\u0440","status":"publish","type":"post","link":"https:\/\/www.naxauam.com\/ru\/\u0443\u0441\u043b\u0443\u0433\u0438-\u043f\u043e-\u043d\u0430\u043d\u0435\u0441\u0435\u043d\u0438\u044e-\u043f\u043e\u043a\u0440\u044b\u0442\u0438\u0439-\u043d\u0430-\u043f\u043e\u0432\u0435\u0440\/","title":{"rendered":"\u0423\u0441\u043b\u0443\u0433\u0438 \u043f\u043e \u043d\u0430\u043d\u0435\u0441\u0435\u043d\u0438\u044e CVD-\u043f\u043e\u043a\u0440\u044b\u0442\u0438\u0439"},"content":{"rendered":"<div class=\"wp-block-themepark-block-themepark-product-head content_pro bing undefined\" style=\"background-color:#ffffff;margin-bottom:20px;\"><div class=\"tab_pic\" style=\"width:47%\"><div class=\"left_post_pic\"><a class=\"swipebox\" href=\"https:\/\/www.naxauam.com\/wp-content\/uploads\/2023\/09\/CVD\u9676\u74f7\u5200\u7247-360x280-1.png\"><img decoding=\"async\" class=\"lazy lazyload\" data-src=\"https:\/\/www.naxauam.com\/wp-content\/uploads\/2023\/09\/CVD\u9676\u74f7\u5200\u7247-360x280-1.png\" src=\"https:\/\/www.naxauam.com\/wp-content\/themes\/smartenterprise\/images\/loading.png\" alt=\"\u0423\u0441\u043b\u0443\u0433\u0438 \u043f\u043e \u043d\u0430\u043d\u0435\u0441\u0435\u043d\u0438\u044e CVD-\u043f\u043e\u043a\u0440\u044b\u0442\u0438\u044f \u043d\u0430 \u043a\u0435\u0440\u0430\u043c\u0438\u0447\u0435\u0441\u043a\u0438\u0435 \u043b\u0435\u0437\u0432\u0438\u044f\"\/><\/a><\/div><\/div><div class=\"ds\" style=\"width:48%\">\n<div class=\"wp-block-column is-layout-flow wp-block-column-is-layout-flow\"><header class=\"post_title_head\" ><div class=\"title\"><h1 class=\"h1title\" >\u0423\u0441\u043b\u0443\u0433\u0438 \u043f\u043e \u043d\u0430\u043d\u0435\u0441\u0435\u043d\u0438\u044e CVD-\u043f\u043e\u043a\u0440\u044b\u0442\u0438\u0439<\/h1><span class=\"stitle\" style=\"color:#000000;font-size:18px;\"><p>\u0423\u0441\u043b\u0443\u0433\u0438 \u043a\u043e\u043c\u043f\u0430\u043d\u0438\u0438 Naxau \u043f\u043e \u043d\u0430\u043d\u0435\u0441\u0435\u043d\u0438\u044e \u043f\u043e\u043a\u0440\u044b\u0442\u0438\u0439 \u043c\u0435\u0442\u043e\u0434\u043e\u043c \u0445\u0438\u043c\u0438\u0447\u0435\u0441\u043a\u043e\u0433\u043e \u0432\u0430\u043a\u0443\u0443\u043c\u043d\u043e\u0433\u043e \u043e\u0441\u0430\u0436\u0434\u0435\u043d\u0438\u044f \u0438\u0437 \u043f\u0430\u0440\u043e\u0432\u043e\u0439 \u0444\u0430\u0437\u044b \u0432 \u043e\u0441\u043d\u043e\u0432\u043d\u043e\u043c \u043e\u0440\u0438\u0435\u043d\u0442\u0438\u0440\u043e\u0432\u0430\u043d\u044b \u043d\u0430 \u0432\u044b\u0441\u043e\u043a\u043e\u0442\u0432\u0435\u0440\u0434\u044b\u0435 \u0440\u0435\u0436\u0443\u0449\u0438\u0435 \u0438\u043d\u0441\u0442\u0440\u0443\u043c\u0435\u043d\u0442\u044b, \u0430\u043d\u0442\u0438\u0430\u0434\u0433\u0435\u0437\u0438\u043e\u043d\u043d\u044b\u0435\/\u0448\u0442\u0430\u043c\u043f\u043e\u0432\u043e\u0447\u043d\u044b\u0435 \u0444\u043e\u0440\u043c\u044b \u0438 \u0434\u0440\u0443\u0433\u0438\u0435 \u043a\u0430\u0442\u0435\u0433\u043e\u0440\u0438\u0438 \u043e\u0441\u043d\u0430\u0441\u0442\u043a\u0438. Naxau CVD \u043c\u043e\u0436\u0435\u0442 \u043d\u0430\u043d\u043e\u0441\u0438\u0442\u044c \u043f\u043e\u043a\u0440\u044b\u0442\u0438\u044f \u0442\u043e\u043b\u0449\u0438\u043d\u043e\u0439 \u043e\u0442 5 \u043c\u043a\u043c \u0434\u043e 20 \u043c\u043a\u043c, \u0438\u0441\u043f\u043e\u043b\u044c\u0437\u0443\u044f TiN, TiCN \u0438 \u0430\u043b\u044c\u0444\u0430-\u043e\u043a\u0441\u0438\u0434 \u0430\u043b\u044e\u043c\u0438\u043d\u0438\u044f (Al2O3) \u0434\u043b\u044f \u0444\u043e\u0440\u043c\u0438\u0440\u043e\u0432\u0430\u043d\u0438\u044f \u043c\u043e\u043d\u043e\u0441\u043b\u043e\u0435\u0432 \u0438\u043b\u0438 \u043c\u043d\u043e\u0433\u043e\u0441\u043b\u043e\u0439\u043d\u044b\u0445 \u043f\u043e\u043a\u0440\u044b\u0442\u0438\u0439. \u041f\u0440\u043e\u0446\u0435\u0441\u0441 CVD-\u043e\u0441\u0430\u0436\u0434\u0435\u043d\u0438\u044f \u043e\u0431\u044b\u0447\u043d\u043e \u043f\u0440\u043e\u0438\u0441\u0445\u043e\u0434\u0438\u0442 \u043f\u0440\u0438 \u0442\u0435\u043c\u043f\u0435\u0440\u0430\u0442\u0443\u0440\u0435 \u0432\u044b\u0448\u0435 900\u00b0C, \u0432\u0440\u0435\u043c\u044f \u043d\u0430\u043d\u0435\u0441\u0435\u043d\u0438\u044f \u043f\u043e\u043a\u0440\u044b\u0442\u0438\u044f \u0441\u043e\u0441\u0442\u0430\u0432\u043b\u044f\u0435\u0442 10 \u0447\u0430\u0441\u043e\u0432, \u0438 \u043f\u0440\u0435\u0434\u043d\u0430\u0437\u043d\u0430\u0447\u0435\u043d \u0442\u043e\u043b\u044c\u043a\u043e \u0434\u043b\u044f \u0432\u044b\u0441\u043e\u043a\u043e\u0442\u0435\u043c\u043f\u0435\u0440\u0430\u0442\u0443\u0440\u043d\u044b\u0445 \u043f\u043e\u0434\u043b\u043e\u0436\u0435\u043a.<\/p>\n<\/p><span><\/div><\/header><ul class=\"csbox_pt\"  ><li style=\"border-bottom:1px solid #666666;\"><span style=\"font-size:14px;color:#666666;width:125px;\">\u043a\u0430\u0442\u0430\u043b\u043e\u0433 (\u043d\u0430 \u0436\u0435\u0441\u0442\u043a\u043e\u043c \u0434\u0438\u0441\u043a\u0435 \u043a\u043e\u043c\u043f\u044c\u044e\u0442\u0435\u0440\u0430)<\/span><span style=\"color:#666666;\">\u0423\u0441\u043b\u0443\u0433\u0438 \u043f\u043e \u043e\u0431\u0440\u0430\u0431\u043e\u0442\u043a\u0435 CVD-\u043f\u043e\u043a\u0440\u044b\u0442\u0438\u0439<\/span><\/li><\/ul><div class=\"tagbox\"><a target=\"_blank\" id=\"tagss\" href=\"https:\/\/www.naxauam.com\/ru\/tag\/cvd%e6%b6%82%e5%b1%82\">CVD-\u043f\u043e\u043a\u0440\u044b\u0442\u0438\u0435<\/a><a target=\"_blank\" id=\"tagss\" href=\"https:\/\/www.naxauam.com\/ru\/tag\/%e6%b0%a7%e5%8c%96%e9%93%9d%e6%b6%82%e5%b1%82\">\u041f\u043e\u043a\u0440\u044b\u0442\u0438\u0435 \u0438\u0437 \u043e\u043a\u0441\u0438\u0434\u0430 \u0430\u043b\u044e\u043c\u0438\u043d\u0438\u044f<\/a><a target=\"_blank\" id=\"tagss\" href=\"https:\/\/www.naxauam.com\/ru\/tag\/%e8%bd%a6%e5%88%80%e7%89%87%e6%b6%82%e5%b1%82\">\u041f\u043e\u043a\u0440\u044b\u0442\u0438\u0435 \u0442\u043e\u043a\u0430\u0440\u043d\u044b\u0445 \u043f\u043b\u0430\u0441\u0442\u0438\u043d<\/a><\/div><\/div>\n<\/div><\/div>\n\n\n\n<p class=\"wp-block-paragraph\"><\/p>\n\n\n\n<figure class=\"wp-block-table\"><table><tbody><tr><td colspan=\"8\"><span style=\"color: #333333;\"><span style=\"font-size: 16px;\"><b>\u0420\u0443\u043a\u043e\u0432\u043e\u0434\u0441\u0442\u0432\u043e \u043f\u043e \u043d\u0430\u043d\u0435\u0441\u0435\u043d\u0438\u044e CVD-\u043f\u043e\u043a\u0440\u044b\u0442\u0438\u044f \u043d\u0430 \u0438\u043d\u0441\u0442\u0440\u0443\u043c\u0435\u043d\u0442\u044b \u0441 \u0427\u041f\u0423 \u0438\u0437 \u0446\u0435\u043c\u0435\u043d\u0442\u0438\u0440\u043e\u0432\u0430\u043d\u043d\u043e\u0433\u043e \u043a\u0430\u0440\u0431\u0438\u0434\u0430<\/b><\/span><\/span><\/td><\/tr><tr><td>\u0437\u0430\u0449\u0438\u0442\u043d\u044b\u0439 \u0441\u043b\u043e\u0439<\/td><td>\u041e\u043f\u0438\u0441\u0430\u043d\u0438\u0435 \u043f\u043e\u043a\u0440\u044b\u0442\u0438\u044f<\/td><td>&nbsp;<\/td><td>\u0442\u043e\u043b\u0449\u0438\u043d\u0430 \u043f\u043b\u0451\u043d\u043a\u0438<br>(\u043c\u043a\u043c)<\/td><td>\u0421\u043e\u0441\u0442\u0430\u0432 \u043f\u043e\u043a\u0440\u044b\u0442\u0438\u044f<\/td><td>\u043a\u043e\u044d\u0444\u0444\u0438\u0446\u0438\u0435\u043d\u0442 \u0442\u0440\u0435\u043d\u0438\u044f<\/td><td>\u0412\u043d\u0435\u0448\u043d\u0438\u0439 \u0432\u0438\u0434 \u0426\u0432\u0435\u0442<\/td><td>\u041e\u0431\u043b\u0430\u0441\u0442\u0438 \u043f\u0440\u0438\u043c\u0435\u043d\u0435\u043d\u0438\u044f<\/td><\/tr><tr><td>KA<\/td><td>TiN<\/td><td>&nbsp;<\/td><td>13~17<\/td><td>TiCN+Al2O3+TiN<\/td><td>0.3<\/td><td>\u0437\u043e\u043b\u043e\u0442\u043e\u0439 \u0446\u0432\u0435\u0442<\/td><td>\u0414\u043b\u044f \u0441\u0442\u0430\u043b\u044c\u043d\u044b\u0445 \u0434\u0435\u0442\u0430\u043b\u0435\u0439 \u043e\u0431\u0449\u0435\u0433\u043e \u043d\u0430\u0437\u043d\u0430\u0447\u0435\u043d\u0438\u044f<\/td><\/tr><tr><td>KB<\/td><td>TiCN<\/td><td>&nbsp;<\/td><td>13~17<\/td><td>TiCN+Al2O3<\/td><td>0.4<\/td><td>Black Diamond<\/td><td>\u0421\u0435\u0440\u044b\u0439 \u0447\u0443\u0433\u0443\u043d, \u043a\u043e\u0432\u043a\u0438\u0439 \u0447\u0443\u0433\u0443\u043d<\/td><\/tr><tr><td>KC<\/td><td>TiAlN<\/td><td>&nbsp;<\/td><td>13~17<\/td><td>TiCN+Al2O3+TiN<\/td><td>0.4<\/td><td>\u0434\u0432\u0443\u0445\u0446\u0432\u0435\u0442\u043d\u044b\u0439<\/td><td>\u041c\u044f\u0433\u043a\u0430\u044f \u0441\u0442\u0430\u043b\u044c, \u043b\u0435\u0433\u0438\u0440\u043e\u0432\u0430\u043d\u043d\u0430\u044f \u0441\u0442\u0430\u043b\u044c<\/td><\/tr><tr><td>KD<\/td><td>\u041d\u0430 \u043e\u0441\u043d\u043e\u0432\u0435 AlTi-\u0442\u0435\u0445\u043d\u043e\u043b\u043e\u0433\u0438\u0438<\/td><td>&nbsp;<\/td><td>13~17<\/td><td>TiCN+Al2O3<\/td><td>0.4<\/td><td>\u043f\u043e\u0440\u043d\u043e\u0433\u0440\u0430\u0444\u0438\u044f<\/td><td>\u0412\u044b\u0441\u043e\u043a\u0430\u044f \u043e\u0431\u0449\u0430\u044f \u043f\u0440\u043e\u0438\u0437\u0432\u043e\u0434\u0438\u0442\u0435\u043b\u044c\u043d\u043e\u0441\u0442\u044c<\/td><\/tr><tr><td>KE<\/td><td>\u041d\u0430 \u043e\u0441\u043d\u043e\u0432\u0435 AlTiSi-\u0442\u0435\u0445\u043d\u043e\u043b\u043e\u0433\u0438\u0438<\/td><td>&nbsp;<\/td><td>9~9<\/td><td>TiCN+Al2O3+TiN<\/td><td>0.3<\/td><td>\u0437\u043e\u043b\u043e\u0442\u043e\u0439 \u0446\u0432\u0435\u0442<\/td><td>\u041d\u0435\u0440\u0436\u0430\u0432\u0435\u044e\u0449\u0430\u044f \u0441\u0442\u0430\u043b\u044c \u0438 \u0434\u0440\u0443\u0433\u0438\u0435 \u0430\u043d\u0442\u0438\u0430\u0434\u0433\u0435\u0437\u0438\u043e\u043d\u043d\u044b\u0435 \u0441\u0442\u0430\u043b\u0438<\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n<figure class=\"wp-block-table\"><table><tbody><tr><th>\u0425\u0430\u0440\u0430\u043a\u0442\u0435\u0440\u0438\u0441\u0442\u0438\u043a\u0438 \u043f\u0440\u043e\u0446\u0435\u0441\u0441\u0430<\/th><th>PVD \u0424\u0438\u0437\u0438\u0447\u0435\u0441\u043a\u043e\u0435 \u043e\u0441\u0430\u0436\u0434\u0435\u043d\u0438\u0435 \u0438\u0437 \u043f\u0430\u0440\u043e\u0432\u043e\u0439 \u0444\u0430\u0437\u044b<\/th><th>CVD \u0425\u0438\u043c\u0438\u0447\u0435\u0441\u043a\u043e\u0435 \u043e\u0441\u0430\u0436\u0434\u0435\u043d\u0438\u0435 \u0438\u0437 \u043f\u0430\u0440\u043e\u0432\u043e\u0439 \u0444\u0430\u0437\u044b<\/th><\/tr><tr><td>\u0432\u0430\u043a\u0443\u0443\u043c<\/td><td>10-2 - 10-4 \u043c\u0431\u0430\u0440<\/td><td>\u0410\u0442\u043c\u043e\u0441\u0444\u0435\u0440\u043d\u043e\u0435 \u0434\u0430\u0432\u043b\u0435\u043d\u0438\u0435 \u0438\u043b\u0438 \u043d\u0438\u0437\u043a\u0438\u0439 \u0432\u0430\u043a\u0443\u0443\u043c<\/td><\/tr><tr><td>\u0442\u0435\u043c\u043f\u0435\u0440\u0430\u0442\u0443\u0440\u0430<\/td><td>200-450\u00b0C<\/td><td>900-1050\u00b0C<\/td><\/tr><tr><td>\u043e\u0433\u0440\u0430\u043d\u0438\u0447\u0435\u043d\u0438\u0435 \u043e\u0441\u0430\u0434\u043a\u043e\u043e\u0431\u0440\u0430\u0437\u043e\u0432\u0430\u043d\u0438\u044f<\/td><td>\u0437\u0430\u043a\u043e\u043d \u0437\u0440\u0435\u043d\u0438\u044f<\/td><td>\u041b\u044e\u0431\u0430\u044f \u043f\u043e\u0432\u0435\u0440\u0445\u043d\u043e\u0441\u0442\u044c, \u0441 \u043a\u043e\u0442\u043e\u0440\u043e\u0439 \u043c\u043e\u0436\u0435\u0442 \u0441\u043e\u043f\u0440\u0438\u043a\u0430\u0441\u0430\u0442\u044c\u0441\u044f \u0433\u0430\u0437<\/td><\/tr><tr><td>\u041f\u0440\u043e\u0446\u0435\u0441\u0441 \u043d\u0430\u043d\u0435\u0441\u0435\u043d\u0438\u044f \u043f\u043e\u043a\u0440\u044b\u0442\u0438\u044f<\/td><td>\u0424\u0438\u0437\u0438\u0447\u0435\u0441\u043a\u043e\u0435 \u043e\u0441\u0430\u0436\u0434\u0435\u043d\u0438\u0435 \u0438\u0437 \u043f\u0430\u0440\u043e\u0432\u043e\u0439 \u0444\u0430\u0437\u044b<\/td><td>\u0445\u0438\u043c\u0438\u0447\u0435\u0441\u043a\u043e\u0435 \u043e\u0441\u0430\u0436\u0434\u0435\u043d\u0438\u0435 \u0438\u0437 \u043f\u0430\u0440\u043e\u0432\u043e\u0439 \u0444\u0430\u0437\u044b<\/td><\/tr><tr><td>\u0442\u043e\u043b\u0449\u0438\u043d\u0430 \u043f\u043b\u0451\u043d\u043a\u0438<\/td><td>1-7 \u043c\u043a\u043c, \u0438\u043b\u0438 \u043f\u043e \u0438\u043d\u0434\u0438\u0432\u0438\u0434\u0443\u0430\u043b\u044c\u043d\u043e\u043c\u0443 \u0437\u0430\u043a\u0430\u0437\u0443 NanoLion<\/td><td>5-12 \u043c\u043a\u043c, \u043c\u0430\u043a\u0441. 20 \u043c\u043a\u043c.<\/td><\/tr><tr><td>\u041e\u0433\u0440\u0430\u043d\u0438\u0447\u0435\u043d\u0438\u044f \u043f\u043e \u0441\u0443\u0431\u0441\u0442\u0440\u0430\u0442\u0443<\/td><td>\u041d\u0435\u0432\u0430\u043a\u0443\u0443\u043c\u043d\u044b\u0435 \u043b\u0435\u0442\u0443\u0447\u0438\u0435<\/td><td>\u0414\u043b\u0438\u0442\u0435\u043b\u044c\u043d\u0430\u044f \u0443\u0441\u0442\u043e\u0439\u0447\u0438\u0432\u043e\u0441\u0442\u044c \u043a \u0432\u044b\u0441\u043e\u043a\u0438\u043c \u0442\u0435\u043c\u043f\u0435\u0440\u0430\u0442\u0443\u0440\u0430\u043c<\/td><\/tr><tr><td>\u043e\u0431\u0440\u0430\u0431\u043e\u0442\u043a\u0430 \u043f\u043e\u0432\u0435\u0440\u0445\u043d\u043e\u0441\u0442\u0438<\/td><td>0,03-0,05 \u043c\u043a\u043c<\/td><td>\u0422\u0440\u0435\u0431\u0443\u0435\u0442\u0441\u044f \u043f\u043e\u043b\u0438\u0440\u043e\u0432\u043a\u0430<\/td><\/tr><tr><td>\u043f\u0435\u0440\u0435\u0440\u0430\u0431\u043e\u0442\u043a\u0430<\/td><td>\u041d\u0435 \u0442\u0440\u0435\u0431\u0443\u0435\u0442\u0441\u044f \u0442\u0435\u0440\u043c\u043e\u043e\u0431\u0440\u0430\u0431\u043e\u0442\u043a\u0430<\/td><td>\u0418\u043d\u0441\u0442\u0440\u0443\u043c\u0435\u043d\u0442\u0430\u043b\u044c\u043d\u044b\u0435 \u0441\u0442\u0430\u043b\u0438 \u043d\u0443\u0436\u0434\u0430\u044e\u0442\u0441\u044f \u0432 \u043f\u043e\u0441\u043b\u0435\u0434\u0443\u044e\u0449\u0435\u0439 \u043e\u0431\u0440\u0430\u0431\u043e\u0442\u043a\u0435 \u0434\u043b\u044f \u0438\u0437\u043c\u0435\u043d\u0435\u043d\u0438\u044f \u0442\u0432\u0435\u0440\u0434\u043e\u0441\u0442\u0438<\/td><\/tr><tr><td>\u043a\u043e\u043d\u0441\u0442\u0440\u0443\u043a\u0446\u0438\u044f \u043a\u0440\u043e\u043c\u043e\u043a<\/td><td>\u0411\u0435\u0437 \u0443\u043a\u043b\u0430\u0434\u043a\u0438 \u043a\u0440\u0430\u0435\u0432<\/td><td>\u0422\u043e\u043b\u0441\u0442\u0430\u044f \u043f\u043b\u0435\u043d\u043a\u0430 \u0441 \u043e\u0442\u0448\u043b\u0438\u0444\u043e\u0432\u0430\u043d\u043d\u044b\u043c\u0438 \u043a\u0440\u0430\u044f\u043c\u0438<\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n<figure class=\"wp-block-image is-style-default\"><img loading=\"lazy\" decoding=\"async\" width=\"810\" height=\"311\" src=\"https:\/\/www.naxau.cn\/wp-content\/uploads\/2021\/10\/\u53e4\u94dc\u8272\u8f66\u5200\u7247-e1639546887653-810x311.jpg\" alt=\"\u0422\u043e\u043a\u0430\u0440\u043d\u044b\u0435 \u0432\u0441\u0442\u0430\u0432\u043a\u0438 \u0431\u0440\u043e\u043d\u0437\u043e\u0432\u043e\u0433\u043e \u0446\u0432\u0435\u0442\u0430 \u0441 CVD-\u043f\u043e\u043a\u0440\u044b\u0442\u0438\u0435\u043c\" class=\"wp-image-1935\" srcset=\"\" sizes=\"auto, (max-width: 810px) 100vw, 810px\" data-srcset=\"\" \/><\/figure>\n\n\n\n<h2 class=\"wp-block-heading\">\u0420\u0430\u0437\u043b\u0438\u0447\u0438\u044f \u043c\u0435\u0436\u0434\u0443 \u043f\u043e\u043a\u0440\u044b\u0442\u0438\u044f\u043c\u0438 CVD \u0438 PVD<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\">CVD \u043f\u0440\u0438\u043c\u0435\u043d\u044f\u0435\u0442\u0441\u044f \u0442\u043e\u043b\u044c\u043a\u043e \u0434\u043b\u044f \u043c\u0430\u0442\u0435\u0440\u0438\u0430\u043b\u043e\u0432, \u0443\u0441\u0442\u043e\u0439\u0447\u0438\u0432\u044b\u0445 \u043a \u0432\u044b\u0441\u043e\u043a\u0438\u043c \u0442\u0435\u043c\u043f\u0435\u0440\u0430\u0442\u0443\u0440\u0430\u043c, \u0438, \u043a\u0430\u043a \u0438 \u0434\u043b\u044f PVD-\u043f\u043e\u043a\u0440\u044b\u0442\u0438\u044f, \u043f\u043e\u0432\u0435\u0440\u0445\u043d\u043e\u0441\u0442\u044c \u043e\u0441\u043d\u043e\u0432\u044b \u0434\u043e\u043b\u0436\u043d\u0430 \u0431\u044b\u0442\u044c \u0433\u043b\u0430\u0434\u043a\u043e\u0439, \u043e\u0447\u0438\u0449\u0435\u043d\u043d\u043e\u0439 \u043e\u0442 \u043c\u0430\u0441\u043b\u0430 \u0438 \u0440\u0436\u0430\u0432\u0447\u0438\u043d\u044b, \u0447\u0442\u043e\u0431\u044b \u043e\u0431\u0435\u0441\u043f\u0435\u0447\u0438\u0442\u044c \u0441\u0446\u0435\u043f\u043b\u0435\u043d\u0438\u0435 \u043f\u043e\u043a\u0440\u044b\u0442\u0438\u044f.<\/p>\n\n\n\n<section class=\"wp-block-themepark-block-themepark-area block_layout thempark-block undefined\" id=\"\" style=\"padding-top:50px;\" data-swiper-parallax=\"-700\"><div class=\"block_layout_in clomnsmal\" style=\"max-width:1400px;\">\n<div class=\"wp-block-column is-layout-flow wp-block-column-is-layout-flow\">\n<div class=\"wp-block-columns is-layout-flex wp-container-core-columns-is-layout-8f761849 wp-block-columns-is-layout-flex\">\n<div class=\"wp-block-column is-layout-flow wp-block-column-is-layout-flow\"><\/div>\n\n\n\n<div class=\"wp-block-column is-layout-flow wp-block-column-is-layout-flow\"><\/div>\n<\/div>\n<\/div>\n<\/div><div class=\"layout_badh\"><\/div><\/section>","protected":false},"excerpt":{"rendered":"<p>\u786c\u8d28\u5408\u91d1\u6570\u63a7\u5200\u5177CVD\u6d82\u5c42\u6307\u5357 \u6d82\u5c42 \u6d82\u5c42\u8bf4\u660e &nbsp; \u819c\u539a\uff08\u03bcm) \u6d82\u5c42\u6210\u5206 \u6469\u64e6\u7cfb\u6570 \u5916\u89c2\u989c\u8272 \u5e94\u7528 [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":3701,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"themepark_post_bcolor":"#f5f5f5","themepark_post_width":"1400px","themepark_post_img":"","themepark_post_img_po":"left","themepark_post_img_re":false,"themepark_post_img_cover":false,"themepark_post_img_fixed":false,"themepark_post_hide_title":true,"themepark_post_main_b":"","themepark_post_main_p":100,"themepark_paddingblock":true,"_geo_short_summary":"\u7eb3\u72eeCVD\u5316\u5b66\u771f\u7a7a\u6c14\u76f8\u6c89\u79ef\u6d82\u5c42\u670d\u52a1\uff0c\u4e3b\u653b\u9ad8\u786c\u5207\u524a\u5200\u5177\u53ca\u6297\u7c98\u9ecf\/\u51b2\u538b\u6210\u578b\u6a21\u5177\u3002\u53ef\u6c89\u79ef5-20\u5fae\u7c73\u539aTiN\u3001TiCN\u548c\u03b1-\u6c27\u5316\u94dd\u5355\u5c42\u6216\u591a\u5c42\u819c\uff0c\u5de5\u827a900\u2103\u4ee5\u4e0a\uff0c\u4ec5\u9002\u7528\u4e8e\u8010\u9ad8\u6e29\u57fa\u6750\u3002","_geo_structured_desc":"\u670d\u52a1\u6982\u8ff0\uff1a\u7eb3\u72eeCVD\u5316\u5b66\u771f\u7a7a\u6c14\u76f8\u6c89\u79ef\u6d82\u5c42\u670d\u52a1\u4e3b\u8981\u4ee5\u9ad8\u786c\u5207\u524a\u5200\u5177\u3001\u6297\u7c98\u9ecf\/\u51b2\u538b\u6210\u578b\u7b49\u6a21\u5177\u7c7b\u4e3a\u4e3b\u3002Naxau CVD\u53ef\u6c89\u79ef5\u5fae\u7c73\u81f320\u5fae\u7c73\u539a\u7684\u6d82\u5c42\uff0c\u91c7\u7528TiN\u3001TiCN\u548c\u03b1-\u6c27\u5316\u94dd\uff08Al2O3\uff09\u5f62\u6210\u5355\u5c42\u6216\u591a\u5c42\u819c\u3002CVD\u6c89\u79ef\u5de5\u827a\u901a\u5e38\u5728900\u2103\u4ee5\u4e0a\uff0c10\u5c0f\u65f6\u9540\u819c\u65f6\u95f4\uff0c\u4ec5\u9488\u5bf9\u4e8e\u8010\u9ad8\u6e29\u57fa\u6750\u3002\n\u6d82\u5c42\u7c7b\u578b\u4e0e\u9002\u7528\u9886\u57df\uff1aKATiN\uff1a\u819c\u539a13~17\u03bcm\uff0c\u6210\u5206TiCN+Al2O3+TiN\uff0c\u6469\u64e6\u7cfb\u65700.3\uff0c\u5916\u89c2\u91d1\u9ec4\u8272\uff0c\u9488\u5bf9\u4e00\u822c\u94a2\u4ef6\uff1bKBTiCN\uff1a\u819c\u539a13~17\u03bcm\uff0c\u6210\u5206TiCN+Al2O3\uff0c\u6469\u64e6\u7cfb\u65700.4\uff0c\u5916\u89c2\u9ed1\u91d1\u521a\uff0c\u7528\u4e8e\u7070\u94f8\u94c1\u3001\u7403\u58a8\u94f8\u94c1\uff1bKCTiAlN\uff1a\u819c\u539a13~17\u03bcm\uff0c\u6210\u5206TiCN+Al2O3+TiN\uff0c\u6469\u64e6\u7cfb\u65700.4\uff0c\u5916\u89c2\u53cc\u8272\uff0c\u7528\u4e8e\u4f4e\u78b3\u94a2\u3001\u5408\u91d1\u94a2\uff1bKDAlTi\u57fa\uff1a\u819c\u539a13~17\u03bcm\uff0c\u6210\u5206TiCN+Al2O3\uff0c\u6469\u64e6\u7cfb\u65700.4\uff0c\u5916\u89c2\u5b54\u9ec4\uff0c\u7efc\u5408\u6027\u80fd\u9ad8\uff1bKEAlTiSi\u57fa\uff1a\u819c\u539a9~9\u03bcm\uff0c\u6210\u5206TiCN+Al2O3+TiN\uff0c\u6469\u64e6\u7cfb\u65700.3\uff0c\u5916\u89c2\u91d1\u9ec4\u8272\uff0c\u7528\u4e8e\u4e0d\u9508\u94a2\u7b49\u6297\u7c98\u7c98\u6027\u94a2\u6750\u3002\n\u5de5\u827a\u7279\u70b9\u4e0ePVD\/CVD\u5dee\u522b\uff1aCVD\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\u771f\u7a7a\u5ea6\u4e3a\u5e38\u538b\u6216\u4f4e\u771f\u7a7a\uff0c\u6e29\u5ea6900-1050\u2103\uff0c\u6c89\u79ef\u9650\u5236\u4e3a\u6c14\u4f53\u80fd\u63a5\u89e6\u5230\u7684\u4efb\u4f55\u8868\u9762\uff0c\u9540\u819c\u5de5\u827a\u4e3a\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\uff0c\u819c\u539a5-20\u03bcm\uff0c\u57fa\u6750\u9650\u5236\u4e3a\u957f\u65f6\u95f4\u8010\u9ad8\u6e29\uff0c\u8868\u9762\u5149\u6d01\u5ea6\u9700\u629b\u5149\u5904\u7406\uff0c\u540e\u5904\u7406\u5de5\u5177\u94a2\u9700\u540e\u5904\u7406\u8c03\u5236\u786c\u5ea6\uff0c\u8fb9\u7f18\u6784\u9020\u4e3a\u539a\u819c\u53ef\u6253\u78e8\u8fb9\u7f18\uff1bPVD\u7269\u7406\u6c14\u76f8\u6c89\u79ef\u771f\u7a7a\u5ea610-2 to 10-4 mbar\uff0c\u6e29\u5ea6200-450\u2103\uff0c\u6c89\u79ef\u9650\u5236\u89c6\u7ebf\u6cd5\u5219\uff0c\u9540\u819c\u5de5\u827a\u4e3a\u7269\u7406\u6c14\u76f8\u6c89\u79ef\uff0c\u819c\u539a1-7\u03bcm\u6216\u7eb3\u72ee\u5b9a\u52365-12\u03bcm\u6700\u592720\u03bcm\uff0c\u57fa\u6750\u9650\u5236\u975e\u771f\u7a7a\u6325\u53d1\u6027\uff0c\u8868\u9762\u5149\u6d01\u5ea60.03-0.05\u03bcm\uff0c\u540e\u5904\u7406\u65e0\u9700\u70ed\u5904\u7406\uff0c\u8fb9\u7f18\u6784\u9020\u65e0\u5806\u8fb9\u73b0\u8c61\u3002CVD\u4ec5\u9650\u4e8e\u8010\u9ad8\u6e29\u6750\u6599\uff0c\u548cPVD\u9540\u819c\u4e00\u6837\uff0c\u4e3a\u4fdd\u8bc1\u6d82\u5c42\u7684\u7ed3\u5408\u529b\uff0c\u57fa\u6750\u8868\u9762\u5149\u6d01\u65e0\u6cb9\u3001\u65e0\u9508\u3002","_geo_faqs":"[{\"question\":\"\u7eb3\u72eeCVD\u6d82\u5c42\u53ef\u4ee5\u6c89\u79ef\u591a\u539a\uff1f\",\"answer\":\"Naxau CVD\u53ef\u6c89\u79ef5\u5fae\u7c73\u81f320\u5fae\u7c73\u539a\u7684\u6d82\u5c42\u3002\"},{\"question\":\"CVD\u6d82\u5c42\u5e38\u7528\u54ea\u4e9b\u6210\u5206\uff1f\",\"answer\":\"\u91c7\u7528TiN\u3001TiCN\u548c\u03b1-\u6c27\u5316\u94dd\uff08Al2O3\uff09\u5f62\u6210\u5355\u5c42\u6216\u591a\u5c42\u819c\u3002\"},{\"question\":\"CVD\u6c89\u79ef\u5de5\u827a\u7684\u6e29\u5ea6\u548c\u65f6\u95f4\u662f\u591a\u5c11\uff1f\",\"answer\":\"CVD\u6c89\u79ef\u5de5\u827a\u901a\u5e38\u5728900\u2103\u4ee5\u4e0a\uff08\u5bf9\u6bd4\u8868\u4e2d\u4e3a900-1050\u2103\uff09\uff0c10\u5c0f\u65f6\u9540\u819c\u65f6\u95f4\uff0c\u4ec5\u9488\u5bf9\u4e8e\u8010\u9ad8\u6e29\u57fa\u6750\u3002\"},{\"question\":\"CVD\u6d82\u5c42\u548cPVD\u6d82\u5c42\u6709\u4ec0\u4e48\u533a\u522b\uff1f\",\"answer\":\"CVD\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\u771f\u7a7a\u5ea6\u4e3a\u5e38\u538b\u6216\u4f4e\u771f\u7a7a\uff0c\u6e29\u5ea6900-1050\u2103\uff0c\u6c89\u79ef\u9650\u5236\u4e3a\u6c14\u4f53\u80fd\u63a5\u89e6\u5230\u7684\u4efb\u4f55\u8868\u9762\uff0c\u8fb9\u7f18\u6784\u9020\u4e3a\u539a\u819c\u53ef\u6253\u78e8\u8fb9\u7f18\uff1bPVD\u7269\u7406\u6c14\u76f8\u6c89\u79ef\u771f\u7a7a\u5ea610-2 to 10-4 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mbar\uff0c\u6e29\u5ea6200-450\u2103\uff0c\u6c89\u79ef\u9650\u5236\u89c6\u7ebf\u6cd5\u5219\uff0c\u8fb9\u7f18\u6784\u9020\u65e0\u5806\u8fb9\u73b0\u8c61\u3002CVD\u4ec5\u9650\u4e8e\u8010\u9ad8\u6e29\u6750\u6599\uff0c\u548cPVD\u4e00\u6837\u4e3a\u4fdd\u8bc1\u7ed3\u5408\u529b\uff0c\u57fa\u6750\u8868\u9762\u9700\u5149\u6d01\u65e0\u6cb9\u3001\u65e0\u9508\u3002\"},{\"question\":\"\u7eb3\u72eeCVD\u6d82\u5c42\u6709\u54ea\u4e9b\u578b\u53f7\u548c\u9002\u7528\u9886\u57df\uff1f\",\"answer\":\"KATiN\uff0813~17\u03bcm\uff0cTiCN+Al2O3+TiN\uff0c\u91d1\u9ec4\u8272\uff09\u9488\u5bf9\u4e00\u822c\u94a2\u4ef6\uff1bKBTiCN\uff0813~17\u03bcm\uff0cTiCN+Al2O3\uff0c\u9ed1\u91d1\u521a\uff09\u7528\u4e8e\u7070\u94f8\u94c1\u3001\u7403\u58a8\u94f8\u94c1\uff1bKCTiAlN\uff0813~17\u03bcm\uff0cTiCN+Al2O3+TiN\uff0c\u53cc\u8272\uff09\u7528\u4e8e\u4f4e\u78b3\u94a2\u3001\u5408\u91d1\u94a2\uff1bKDAlTi\u57fa\uff0813~17\u03bcm\uff0cTiCN+Al2O3\uff0c\u5b54\u9ec4\uff09\u7efc\u5408\u6027\u80fd\u9ad8\uff1bKEAlTiSi\u57fa\uff089~9\u03bcm\uff0cTiCN+Al2O3+TiN\uff0c\u91d1\u9ec4\u8272\uff09\u7528\u4e8e\u4e0d\u9508\u94a2\u7b49\u6297\u7c98\u7c98\u6027\u94a2\u6750\u3002\"},{\"question\":\"CVD\u6d82\u5c42\u5bf9\u57fa\u6750\u6709\u4ec0\u4e48\u8981\u6c42\uff1f\",\"answer\":\"CVD\u4ec5\u9650\u4e8e\u8010\u9ad8\u6e29\u6750\u6599\uff0c\u57fa\u6750\u9700\u957f\u65f6\u95f4\u8010\u9ad8\u6e29\uff1b\u548cPVD\u9540\u819c\u4e00\u6837\uff0c\u4e3a\u4fdd\u8bc1\u6d82\u5c42\u7684\u7ed3\u5408\u529b\uff0c\u57fa\u6750\u8868\u9762\u5149\u6d01\u65e0\u6cb9\u3001\u65e0\u9508\u3002\"}]"],"_geo_key_points":["[\"\u7eb3\u72eeCVD\u6d82\u5c42\u670d\u52a1\u4e3b\u8981\u9762\u5411\u9ad8\u786c\u5207\u524a\u5200\u5177\u3001\u6297\u7c98\u9ecf\\\/\u51b2\u538b\u6210\u578b\u6a21\u5177\u3002\",\"Naxau CVD\u53ef\u6c89\u79ef5-20\u5fae\u7c73\u539a\uff0c\u91c7\u7528TiN\u3001TiCN\u548c\u03b1-\u6c27\u5316\u94dd\u5f62\u6210\u5355\u5c42\u6216\u591a\u5c42\u819c\u3002\",\"CVD\u6c89\u79ef\u5de5\u827a\u901a\u5e38\u5728900\u2103\u4ee5\u4e0a\uff0c10\u5c0f\u65f6\u9540\u819c\u65f6\u95f4\uff0c\u4ec5\u9002\u7528\u4e8e\u8010\u9ad8\u6e29\u57fa\u6750\u3002\",\"\u63d0\u4f9bKATiN\u3001KBTiCN\u3001KCTiAlN\u3001KDAlTi\u57fa\u3001KEAlTiSi\u57fa\u7b49CVD\u6d82\u5c42\uff0c\u9002\u7528\u4e0d\u540c\u94a2\u6750\u4e0e\u94f8\u94c1\u3002\",\"CVD\u4e0ePVD\u4e0d\u540c\uff1aCVD\u5e38\u538b\u6216\u4f4e\u771f\u7a7a\u3001900-1050\u2103\u3001\u6c14\u4f53\u53ef\u63a5\u89e6\u8868\u9762\u3001\u539a\u819c\u53ef\u6253\u78e8\u8fb9\u7f18\uff1bPVD\u4e3a10-2 to 10-4 mbar\u3001200-450\u2103\u3001\u89c6\u7ebf\u6cd5\u5219\u3002\",\"CVD\u4ec5\u9650\u4e8e\u8010\u9ad8\u6e29\u6750\u6599\uff0c\u57fa\u6750\u9700\u5149\u6d01\u65e0\u6cb9\u65e0\u9508\u4ee5\u4fdd\u8bc1\u7ed3\u5408\u529b\u3002\"]"],"_geo_target_audience":["\u4e3b\u8981\u9762\u5411\u9700\u8981CVD\u6d82\u5c42\u670d\u52a1\u7684\u786c\u8d28\u5408\u91d1\u6570\u63a7\u5200\u5177\u3001\u9ad8\u786c\u5207\u524a\u5200\u5177\u3001\u6297\u7c98\u9ecf\/\u51b2\u538b\u6210\u578b\u6a21\u5177\u5236\u9020\u4f01\u4e1a\uff1b\u5173\u6ce8\u6c27\u5316\u94dd\u6d82\u5c42\u3001\u8f66\u5200\u7247\u6d82\u5c42\u7b49\u8010\u78e8\u3001\u6297\u7c98\u9ecf\u89e3\u51b3\u65b9\u6848\uff0c\u9002\u7528\u4e8e\u8010\u9ad8\u6e29\u57fa\u6750\u7684\u52a0\u5de5\u573a\u666f\u3002"],"_geo_manual_overrides":["[\"_geo_short_summary\",\"_geo_structured_desc\",\"_geo_faqs\",\"_geo_key_points\",\"_geo_target_audience\"]"],"_geo_last_modified":["2026-10-12T16:22:03+08:00"],"_geo_version":["1"],"_geo_has_data":["1"],"_geo_ai_search_text":["CVD\u6d82\u5c42\u670d\u52a1\n\u7eb3\u72eeCVD\u5316\u5b66\u771f\u7a7a\u6c14\u76f8\u6c89\u79ef\u6d82\u5c42\u670d\u52a1\uff0c\u4e3b\u653b\u9ad8\u786c\u5207\u524a\u5200\u5177\u53ca\u6297\u7c98\u9ecf\/\u51b2\u538b\u6210\u578b\u6a21\u5177\u3002\u53ef\u6c89\u79ef5-20\u5fae\u7c73\u539aTiN\u3001TiCN\u548c\u03b1-\u6c27\u5316\u94dd\u5355\u5c42\u6216\u591a\u5c42\u819c\uff0c\u5de5\u827a900\u2103\u4ee5\u4e0a\uff0c\u4ec5\u9002\u7528\u4e8e\u8010\u9ad8\u6e29\u57fa\u6750\u3002\n\u670d\u52a1\u6982\u8ff0\uff1a\u7eb3\u72eeCVD\u5316\u5b66\u771f\u7a7a\u6c14\u76f8\u6c89\u79ef\u6d82\u5c42\u670d\u52a1\u4e3b\u8981\u4ee5\u9ad8\u786c\u5207\u524a\u5200\u5177\u3001\u6297\u7c98\u9ecf\/\u51b2\u538b\u6210\u578b\u7b49\u6a21\u5177\u7c7b\u4e3a\u4e3b\u3002Naxau CVD\u53ef\u6c89\u79ef5\u5fae\u7c73\u81f320\u5fae\u7c73\u539a\u7684\u6d82\u5c42\uff0c\u91c7\u7528TiN\u3001TiCN\u548c\u03b1-\u6c27\u5316\u94dd\uff08Al2O3\uff09\u5f62\u6210\u5355\u5c42\u6216\u591a\u5c42\u819c\u3002CVD\u6c89\u79ef\u5de5\u827a\u901a\u5e38\u5728900\u2103\u4ee5\u4e0a\uff0c10\u5c0f\u65f6\u9540\u819c\u65f6\u95f4\uff0c\u4ec5\u9488\u5bf9\u4e8e\u8010\u9ad8\u6e29\u57fa\u6750\u3002\n\u6d82\u5c42\u7c7b\u578b\u4e0e\u9002\u7528\u9886\u57df\uff1aKATiN\uff1a\u819c\u539a13~17\u03bcm\uff0c\u6210\u5206TiCN+Al2O3+TiN\uff0c\u6469\u64e6\u7cfb\u65700.3\uff0c\u5916\u89c2\u91d1\u9ec4\u8272\uff0c\u9488\u5bf9\u4e00\u822c\u94a2\u4ef6\uff1bKBTiCN\uff1a\u819c\u539a13~17\u03bcm\uff0c\u6210\u5206TiCN+Al2O3\uff0c\u6469\u64e6\u7cfb\u65700.4\uff0c\u5916\u89c2\u9ed1\u91d1\u521a\uff0c\u7528\u4e8e\u7070\u94f8\u94c1\u3001\u7403\u58a8\u94f8\u94c1\uff1bKCTiAlN\uff1a\u819c\u539a13~17\u03bcm\uff0c\u6210\u5206TiCN+Al2O3+TiN\uff0c\u6469\u64e6\u7cfb\u65700.4\uff0c\u5916\u89c2\u53cc\u8272\uff0c\u7528\u4e8e\u4f4e\u78b3\u94a2\u3001\u5408\u91d1\u94a2\uff1bKDAlTi\u57fa\uff1a\u819c\u539a13~17\u03bcm\uff0c\u6210\u5206TiCN+Al2O3\uff0c\u6469\u64e6\u7cfb\u65700.4\uff0c\u5916\u89c2\u5b54\u9ec4\uff0c\u7efc\u5408\u6027\u80fd\u9ad8\uff1bKEAlTiSi\u57fa\uff1a\u819c\u539a9~9\u03bcm\uff0c\u6210\u5206TiCN+Al2O3+TiN\uff0c\u6469\u64e6\u7cfb\u65700.3\uff0c\u5916\u89c2\u91d1\u9ec4\u8272\uff0c\u7528\u4e8e\u4e0d\u9508\u94a2\u7b49\u6297\u7c98\u7c98\u6027\u94a2\u6750\u3002\n\u5de5\u827a\u7279\u70b9\u4e0ePVD\/CVD\u5dee\u522b\uff1aCVD\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\u771f\u7a7a\u5ea6\u4e3a\u5e38\u538b\u6216\u4f4e\u771f\u7a7a\uff0c\u6e29\u5ea6900-1050\u2103\uff0c\u6c89\u79ef\u9650\u5236\u4e3a\u6c14\u4f53\u80fd\u63a5\u89e6\u5230\u7684\u4efb\u4f55\u8868\u9762\uff0c\u9540\u819c\u5de5\u827a\u4e3a\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\uff0c\u819c\u539a5-20\u03bcm\uff0c\u57fa\u6750\u9650\u5236\u4e3a\u957f\u65f6\u95f4\u8010\u9ad8\u6e29\uff0c\u8868\u9762\u5149\u6d01\u5ea6\u9700\u629b\u5149\u5904\u7406\uff0c\u540e\u5904\u7406\u5de5\u5177\u94a2\u9700\u540e\u5904\u7406\u8c03\u5236\u786c\u5ea6\uff0c\u8fb9\u7f18\u6784\u9020\u4e3a\u539a\u819c\u53ef\u6253\u78e8\u8fb9\u7f18\uff1bPVD\u7269\u7406\u6c14\u76f8\u6c89\u79ef\u771f\u7a7a\u5ea610-2 to 10-4 mbar\uff0c\u6e29\u5ea6200-450\u2103\uff0c\u6c89\u79ef\u9650\u5236\u89c6\u7ebf\u6cd5\u5219\uff0c\u9540\u819c\u5de5\u827a\u4e3a\u7269\u7406\u6c14\u76f8\u6c89\u79ef\uff0c\u819c\u539a1-7\u03bcm\u6216\u7eb3\u72ee\u5b9a\u52365-12\u03bcm\u6700\u592720\u03bcm\uff0c\u57fa\u6750\u9650\u5236\u975e\u771f\u7a7a\u6325\u53d1\u6027\uff0c\u8868\u9762\u5149\u6d01\u5ea60.03-0.05\u03bcm\uff0c\u540e\u5904\u7406\u65e0\u9700\u70ed\u5904\u7406\uff0c\u8fb9\u7f18\u6784\u9020\u65e0\u5806\u8fb9\u73b0\u8c61\u3002CVD\u4ec5\u9650\u4e8e\u8010\u9ad8\u6e29\u6750\u6599\uff0c\u548cPVD\u9540\u819c\u4e00\u6837\uff0c\u4e3a\u4fdd\u8bc1\u6d82\u5c42\u7684\u7ed3\u5408\u529b\uff0c\u57fa\u6750\u8868\u9762\u5149\u6d01\u65e0\u6cb9\u3001\u65e0\u9508\u3002\n\u7eb3\u72eeCVD\u6d82\u5c42\u670d\u52a1\u4e3b\u8981\u9762\u5411\u9ad8\u786c\u5207\u524a\u5200\u5177\u3001\u6297\u7c98\u9ecf\/\u51b2\u538b\u6210\u578b\u6a21\u5177\u3002 Naxau CVD\u53ef\u6c89\u79ef5-20\u5fae\u7c73\u539a\uff0c\u91c7\u7528TiN\u3001TiCN\u548c\u03b1-\u6c27\u5316\u94dd\u5f62\u6210\u5355\u5c42\u6216\u591a\u5c42\u819c\u3002 CVD\u6c89\u79ef\u5de5\u827a\u901a\u5e38\u5728900\u2103\u4ee5\u4e0a\uff0c10\u5c0f\u65f6\u9540\u819c\u65f6\u95f4\uff0c\u4ec5\u9002\u7528\u4e8e\u8010\u9ad8\u6e29\u57fa\u6750\u3002 \u63d0\u4f9bKATiN\u3001KBTiCN\u3001KCTiAlN\u3001KDAlTi\u57fa\u3001KEAlTiSi\u57fa\u7b49CVD\u6d82\u5c42\uff0c\u9002\u7528\u4e0d\u540c\u94a2\u6750\u4e0e\u94f8\u94c1\u3002 CVD\u4e0ePVD\u4e0d\u540c\uff1aCVD\u5e38\u538b\u6216\u4f4e\u771f\u7a7a\u3001900-1050\u2103\u3001\u6c14\u4f53\u53ef\u63a5\u89e6\u8868\u9762\u3001\u539a\u819c\u53ef\u6253\u78e8\u8fb9\u7f18\uff1bPVD\u4e3a10-2 to 10-4 mbar\u3001200-450\u2103\u3001\u89c6\u7ebf\u6cd5\u5219\u3002 CVD\u4ec5\u9650\u4e8e\u8010\u9ad8\u6e29\u6750\u6599\uff0c\u57fa\u6750\u9700\u5149\u6d01\u65e0\u6cb9\u65e0\u9508\u4ee5\u4fdd\u8bc1\u7ed3\u5408\u529b\u3002\n\u7eb3\u72eeCVD\u6d82\u5c42\u53ef\u4ee5\u6c89\u79ef\u591a\u539a\uff1f\nNaxau CVD\u53ef\u6c89\u79ef5\u5fae\u7c73\u81f320\u5fae\u7c73\u539a\u7684\u6d82\u5c42\u3002\nCVD\u6d82\u5c42\u5e38\u7528\u54ea\u4e9b\u6210\u5206\uff1f\n\u91c7\u7528TiN\u3001TiCN\u548c\u03b1-\u6c27\u5316\u94dd\uff08Al2O3\uff09\u5f62\u6210\u5355\u5c42\u6216\u591a\u5c42\u819c\u3002\nCVD\u6c89\u79ef\u5de5\u827a\u7684\u6e29\u5ea6\u548c\u65f6\u95f4\u662f\u591a\u5c11\uff1f\nCVD\u6c89\u79ef\u5de5\u827a\u901a\u5e38\u5728900\u2103\u4ee5\u4e0a\uff08\u5bf9\u6bd4\u8868\u4e2d\u4e3a900-1050\u2103\uff09\uff0c10\u5c0f\u65f6\u9540\u819c\u65f6\u95f4\uff0c\u4ec5\u9488\u5bf9\u4e8e\u8010\u9ad8\u6e29\u57fa\u6750\u3002\nCVD\u6d82\u5c42\u548cPVD\u6d82\u5c42\u6709\u4ec0\u4e48\u533a\u522b\uff1f\nCVD\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\u771f\u7a7a\u5ea6\u4e3a\u5e38\u538b\u6216\u4f4e\u771f\u7a7a\uff0c\u6e29\u5ea6900-1050\u2103\uff0c\u6c89\u79ef\u9650\u5236\u4e3a\u6c14\u4f53\u80fd\u63a5\u89e6\u5230\u7684\u4efb\u4f55\u8868\u9762\uff0c\u8fb9\u7f18\u6784\u9020\u4e3a\u539a\u819c\u53ef\u6253\u78e8\u8fb9\u7f18\uff1bPVD\u7269\u7406\u6c14\u76f8\u6c89\u79ef\u771f\u7a7a\u5ea610-2 to 10-4 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