{"id":657,"date":"2018-11-28T16:43:34","date_gmt":"2018-11-28T08:43:34","guid":{"rendered":"http:\/\/localhost\/theme20\/?p=657"},"modified":"2023-12-12T09:31:52","modified_gmt":"2023-12-12T01:31:52","slug":"hppms-\uace0\ucd9c\ub825-\ud384\uc2a4-\ub9c8\uadf8\ub124\ud2b8\ub860-\uc2a4\ud37c\ud130\ub9c1","status":"publish","type":"post","link":"https:\/\/www.naxauam.com\/ko\/hppms-\uace0\ucd9c\ub825-\ud384\uc2a4-\ub9c8\uadf8\ub124\ud2b8\ub860-\uc2a4\ud37c\ud130\ub9c1\/","title":{"rendered":"HPPMS \uace0\ucd9c\ub825 \ud384\uc2a4 \ub9c8\uadf8\ub124\ud2b8\ub860 \uc2a4\ud37c\ud130\ub9c1 PVD \ucf54\ud305 \uae30\uc220"},"content":{"rendered":"<p>\uace0\ucd9c\ub825 \ud384\uc2a4 \ub9c8\uadf8\ub124\ud2b8\ub860 \uc2a4\ud37c\ud130\ub9c1(HPPMS)\uc740 \uace0\ucd9c\ub825 \ud384\uc2a4 \ub9c8\uadf8\ub124\ud2b8\ub860 \uc2a4\ud37c\ud130\ub9c1(HIPIMS)\uc774\ub77c\uace0\ub3c4 \ud558\uba70 \ub9c8\uadf8\ub124\ud2b8\ub860 \uc2a4\ud37c\ud130\ub9c1 \uc99d\ucc29\uc744 \uae30\ubc18\uc73c\ub85c \ud558\ub294 PVD \ucf54\ud305 \uae30\uc220\ub85c, HPPMS\ub294 kW\/cm\ub97c \ud65c\uc6a9\ud569\ub2c8\ub2e4. <sup>2<\/sup>\ub9e4\uc6b0 \ub192\uc740 \uc804\ub825 \ubc00\ub3c4\ub294 10% \ubbf8\ub9cc\uc758 \ub0ae\uc740 \ub4c0\ud2f0 \uc0ac\uc774\ud074(\uc628\/\uc624\ud504 \uc2dc\uac04 \ube44\uc728)\uc5d0\uc11c \uc218\uc2ed \ub9c8\uc774\ud06c\ub85c\ucd08\uc758 \uc9e7\uc740 \ud384\uc2a4(\ud384\uc2a4)\ub85c \uce21\uc815\ub418\uba70, HPPMS\uc758 \ud2b9\uc9d5\uc740 \uc2a4\ud37c\ud130\ub9c1\ub41c \uae08\uc18d\uc758 \ub192\uc740 \uc774\uc628\ud654 \uc815\ub3c4\uc640 \ubd84\uc790 \uac00\uc2a4\uc758 \ub192\uc740 \ud574\ub9ac\uc728\ub85c \uc778\ud574 \uc99d\ucc29\ub41c \ud544\ub984\uc758 \ubc00\ub3c4\uac00 \ub192\ub2e4\ub294 \uc810\uc785\ub2c8\ub2e4. \uc774\uc628\ud654 \ubc0f \ud574\ub9ac \uc815\ub3c4\ub294 \ud53c\ud06c \uc74c\uadf9 \uc804\ub825\uc5d0 \ub530\ub77c \uc99d\uac00\ud569\ub2c8\ub2e4. \uc774 \ud55c\uacc4\ub294 \uae00\ub85c\uc6b0\uc5d0\uc11c \uc544\ud06c \ub2e8\uacc4\ub85c\uc758 \ubc29\uc804 \uc804\uc774\uc5d0 \uc758\ud574 \uacb0\uc815\ub429\ub2c8\ub2e4. \ud53c\ud06c \uc804\ub825 \ubc0f \ub4c0\ud2f0 \uc0ac\uc774\ud074\uc740 \uae30\uc874 \uc2a4\ud37c\ud130\ub9c1\uacfc \uc720\uc0ac\ud55c \ud3c9\uade0 \uc74c\uadf9 \uc804\ub825(1-10W\/cm)\uc744 \uc720\uc9c0\ud558\uae30 \uc704\ud574 \uc120\ud0dd\ub418\uc5c8\uc2b5\ub2c8\ub2e4.<\/p>\n<p>HPPMS\ub294 \ub2e4\uc74c\uacfc \uac19\uc740 \uc6a9\ub3c4\ub85c \uc0ac\uc6a9\ub429\ub2c8\ub2e4:<\/p>\n<ul>\n<li>\ucf54\ud305 \uc99d\ucc29 \uc804 \uc811\ucc29\ub825 \ud5a5\uc0c1\uc744 \uc704\ud55c \uae30\ud310 \uc804\ucc98\ub9ac(\uae30\ud310 \uc5d0\uce6d)<\/li>\n<li>\ubbf8\uc138 \uad6c\uc870 \ubc00\ub3c4\uac00 \ub192\uc740 \ucf54\ud305 \uc99d\ucc29<\/li>\n<\/ul>\n<p>HPPMS\ub294 \ub9e4\uc6b0 \uc9e7\uc740 \uc2dc\uac04(\uc77c\ubc18\uc801\uc73c\ub85c ~100\u03bcs)\uc5d0 \uac78\uccd0 \uc74c\uadf9\uc5d0 \uc804\ub2ec\ub418\ub294 \ud070 \uc5d0\ub108\uc9c0 \ud384\uc2a4\ub97c \uc0ac\uc6a9\ud569\ub2c8\ub2e4. \uc774\ub97c \uc704\ud574\uc11c\ub294 \ub9e4\uc6b0 \ub2e4\ub978 \uc720\ud615\uc758 \uc804\uc6d0 \uacf5\uae09 \uc7a5\uce58\uac00 \ud544\uc694\ud569\ub2c8\ub2e4[1]. HPPMS \uacf5\uc815\uc740 \uae30\ud310\uc5d0 \ud070 \uc800\uc5d0\ub108\uc9c0 \uc774\uc628 \ud50c\ub7ed\uc2a4\ub97c \uc804\ub2ec\ud569\ub2c8\ub2e4. \uc804\uc6d0 \uacf5\uae09 \uc7a5\uce58\ub294 \ud384\uc2a4 \ud3ed\uc774 100~150\u03bcs\uc778 \ucd5c\ub300 3\u33bf\/\ud384\uc2a4\uc758 \ud53c\ud06c \uc804\ub825\uc744 \uc0dd\uc0b0\ud574\uc57c \ud569\ub2c8\ub2e4. \ud3c9\uade0 \uc804\ub825\uc740 \ucd5c\ub300 500Hz \uc8fc\ud30c\uc218\uc5d0\uc11c \uc57d 20kW\uc774\uba70 \ud384\uc2a4 \uc804\ub825\uc744 \uc81c\uacf5\ud558\ub294 \uac83 \uc678\uc5d0\ub3c4 \uc544\ud06c \uc5b5\uc81c\ub97c \uc218\ud589\ud574\uc57c \ud569\ub2c8\ub2e4. \uc774 \uacf5\uc815\uc740 \uace0\uc5d0\ub108\uc9c0 \ud384\uc2a4\uc5d0 \uc758\ud574 \uc0dd\uc131\ub418\ub294 \ud5a5\uc0c1\ub41c \uc774\uc628\ud654\ub97c \ud65c\uc6a9\ud569\ub2c8\ub2e4. \ub300\uc0c1\uc5d0 \uc801\uc6a9\ub418\ub294 \uc804\ub825 \ubc00\ub3c4\ub294 \uc57d 1 - 3kW \/ cm\uc785\ub2c8\ub2e4.\u00a0<sup>2<\/sup>(\uc57d 1~10W\/cm\uc758 \uc804\ub825 \ubc00\ub3c4)\u00a0<sup>2's<\/sup>(\uae30\uc874 \ub9c8\uadf8\ub124\ud2b8\ub860 \uc2a4\ud37c\ud130\ub9c1\uacfc \ube44\uad50)[2].<\/p>\n<p>\uac15\ud654\ub41c \uc774\uc628\ud654\ub85c \uc778\ud574 HPPMS\ub294 \uacb0\uc815\ub9c9\uc758 \uc131\uc7a5\uc744 \ub2ec\uc131\ud558\uace0 \uc0c1 \uad6c\uc131\uc744 \uc81c\uc5b4\ud558\ub294 \ub370 \uc0ac\uc6a9\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4 [3]. \uc99d\ucc29 \uc870\uac74\ub3c4 \uc911\uc694\ud558\uc9c0\ub9cc \uc804\uc6d0 \uacf5\uae09 \uc7a5\uce58\uc758 \ub4c0\ud2f0 \uc0ac\uc774\ud074\uacfc \ud50c\ub77c\uc988\ub9c8 \ud30c\ub77c\ubbf8\ud130\uac00 \uacb0\uc815 \uad6c\uc870 \ud615\uc131\uc5d0 \uae30\uc5ec\ud558\ub294 \uac83\uc73c\ub85c \ubcf4\uc785\ub2c8\ub2e4. TiO\u00a0<sub>2<\/sub>\uc758 \ub8e8\ud2f8 \uc0c1\uc740 \ud384\uc2a4 \uc8fc\uae30\uc5d0 \ub530\ub77c \uc99d\uac00\ud558\uace0 \ud384\uc2a4 \uc9c4\ud3ed\uc5d0 \ub530\ub77c \ubc00\ub3c4\uac00 \uac10\uc18c\ud569\ub2c8\ub2e4 [3]. \uadf8\ub7ec\ub098 \ub2e4\ub978 \uc5f0\uad6c\uc790\ub4e4\uc740 \uc774 \ud604\uc0c1\uc744 \ubcf4\uc9c0 \ubabb\ud558\uace0 \uace0\uacb0\uc815\uc131 \ud2f0\ud0c0\ub284\uc744 \uc99d\ucc29\ud558\uba74\uc11c \ube44\uc815\uc9c8 \ud544\ub984\ub9cc \uc5bb\uc5c8\uc2b5\ub2c8\ub2e4[4].HPPMS\ub294 \uace0\uacb0\uc815\uc131 ITO \ud544\ub984\uc744 \uc99d\ucc29\ud588\uc2b5\ub2c8\ub2e4.<\/p>\n<p>\uacb0\uacfc\uc801\uc73c\ub85c HPPMS \ucf54\ud305\uc740 \ub9c8\ucc30, \uad11\ud559, \uc804\uae30 \ubc0f \ud658\uacbd \ud2b9\uc131\uc774 \uac1c\uc120\ub418\uc5b4\uc57c \ud569\ub2c8\ub2e4. \uac1c\uc120\ub41c \ubbf8\uc138 \uad6c\uc870\ub294 \uad11\ud559\uc801 \ud2b9\uc131\ub3c4 \uac1c\uc120\ud569\ub2c8\ub2e4[3,4,5-9]. \uad74\uc808\ub960\uc740 \uad11\ud559 \ucf54\ud305\uc758 \ubc00\ub3c4\uc5d0 \ub530\ub77c \ub2ec\ub77c\uc9c4\ub2e4\ub294 \uac83\uc740 \uc798 \uc54c\ub824\uc838 \uc788\uc2b5\ub2c8\ub2e4. \ubc00\ub3c4\uac00 \ub0ae\uc740 \ucf54\ud305\uc758 \uad74\uc808\ub960\uc740 \uc77c\ubc18\uc801\uc73c\ub85c \ubc00\ub3c4\uac00 \ub192\uc740 \ucf54\ud305\uc758 \uad74\uc808\ub960\ubcf4\ub2e4 \ub0ae\uc2b5\ub2c8\ub2e4.TiO <sub>2<\/sub>\ucf54\ud305\uc740 \ubc00\ub3c4 \uc758\uc874\uc801\uc778 \uc7ac\ub8cc\uc758 \uc644\ubcbd\ud55c \uc608\uc785\ub2c8\ub2e4. \uc774 \ubb3c\uc9c8\uc758 \uad74\uc808\ub960\uc740 \ubc00\ub3c4\uc5d0 \ub530\ub77c 2.2 - 2.5 \uc0ac\uc774\uc5d0\uc11c \ub2ec\ub77c\uc9c8 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \uadf8\ub9bc 1 [5]\uc5d0\uc11c \ubcfc \uc218 \uc788\ub4ef\uc774 HPPMS\ub85c \uc99d\ucc29\ub41c \ud544\ub984\uc740 DC \ub9c8\uadf8\ub124\ud2b8\ub860 \uc2a4\ud37c\ud130\ub9c1 \ud544\ub984\uc5d0 \ube44\ud574 \uad74\uc808\ub960\uc774 \ub354 \ub192\uc740 \uac83\uc73c\ub85c \ubcf4\uace0\ub418\uc5c8\uc2b5\ub2c8\ub2e4. \uad74\uc808\ub960\uc740 \uc804\uccb4 \uc2a4\ud399\ud2b8\ub7fc\uc5d0 \uac78\uccd0 \ub354 \ub192\uc2b5\ub2c8\ub2e4. \uc774 \ucf54\ud305\uc758 \ubc00\ub3c4 \ub610\ud55c 3.83g\/cm\uc785\ub2c8\ub2e4. <sup>3<\/sup>DC \ud544\ub984\uc758 \ubc00\ub3c4\ub294 3.71g\/cm\uc600\uc2b5\ub2c8\ub2e4.\u00a0<sup>3<\/sup>\uc758 \ud45c\uba74 \uac70\uce60\uae30\ub294 1.3nm, \ud45c\uba74 \uc870\ub3c4\ub294 0.5nm\uc5d0 \ubd88\uacfc\ud569\ub2c8\ub2e4. \uc804\uc6d0 \uacf5\uae09 \uc7a5\uce58\uc758 \ucd5c\uc801 \ub4c0\ud2f0 \uc0ac\uc774\ud074\uc744 \uc0ac\uc6a9\ud558\ub294 \uacbd\uc6b0, TiO\u00a0<sub>2 \ucf54\ud305<\/sub>\ub294 \uc57d 2.72\uc758 \ub192\uc740 \uad74\uc808\ub960\uc744 \uac00\uc9c0\uace0 \uc788\uc2b5\ub2c8\ub2e4[3]. SiO\uc758 \uad74\uc808\ub960 \uac1c\uc120\u00a0<sub>2<\/sub>ZnO, Al\u00a0<sub>2<\/sub>\u00a0O\u00a0<sub>3<\/sub>Ta\u00a0<sub>2<\/sub>\u00a0O\u00a0<sub>5<\/sub>\ubc0f ZrO\u00a0<sub>2's<\/sub>\uad11\ud559 \uc131\ub2a5 \ud544\ub984\ub3c4 \ubcf4\uace0\ub418\uc5c8\uc2b5\ub2c8\ub2e4[6,7,8]. \uc774\ub7ec\ud55c \uacb0\uacfc\ub294 \uc778\uc0c1\uc801\uc774\uc9c0\ub9cc \uba87 \uac00\uc9c0 \uc8fc\uc758\ud574\uc57c \ud560 \uc810\uc774 \uc788\uc2b5\ub2c8\ub2e4. HPPMS \ucf54\ud305\uc740 \ub2e4\ub978 \uc804\uc6d0\uc73c\ub85c \uc99d\ucc29\ud55c \ucf54\ud305\uc5d0 \ube44\ud574 \ud56d\uc0c1 \ud5a5\uc0c1\ub41c \ud2b9\uc131\uc744 \uac16\ub294 \uac83\uc740 \uc544\ub2d9\ub2c8\ub2e4[10]. \uad11\ud559 \uc0c1\uc218\ub294 \ud56d\uc0c1 \uc99d\ucc29 \uc870\uac74\uc5d0 \ub530\ub77c \ud06c\uac8c \ub2ec\ub77c\uc9c0\uba70 \uac01 \uc7ac\ub8cc\uc640 \uc99d\ucc29 \uc2dc\uc2a4\ud15c\uc5d0 \ub9de\ub294 \ucd5c\uc801\uc758 \uc870\uac74 \uc138\ud2b8\ub97c \uacb0\uc815\ud574\uc57c \ud569\ub2c8\ub2e4. \ud3c9\uba74 \ub9c8\uadf8\ub124\ud2b8\ub860 \uc2a4\ud37c\ud130\ub9c1 \ud544\ub984\uc5d0 \ub300\ud574\uc11c\ub3c4 \ub9e4\uc6b0 \ub192\uc740 \uad74\uc808\ub960\uc774 \ubcf4\uace0\ub41c \ubc14 \uc788\uc2b5\ub2c8\ub2e4. \uc2e4\uc81c\ub85c \uc5b4\ub5a4 \uacbd\uc6b0\uc5d0\ub294 IF \ub9c8\uadf8\ub124\ud2b8\ub860 \uc2a4\ud37c\ud130\ub9c1\uc774 HPPMS\ubcf4\ub2e4 \ub354 \ub098\uc740 \uc131\ub2a5\uc744 \uc81c\uacf5\ud558\uae30\ub3c4 \ud569\ub2c8\ub2e4[8].<\/p>\n<figure id=\"attachment_290\" class=\"wp-caption alignnone\" aria-describedby=\"caption-attachment-290\"><img loading=\"lazy\" decoding=\"async\" class=\"size-full wp-image-290\" src=\"https:\/\/vtcmagblog.com\/wp-content\/uploads\/2018\/11\/blogimg_1.10.1.png\" sizes=\"auto, (max-width: 524px) 100vw, 524px\" srcset=\"https:\/\/vtcmagblog.com\/wp-content\/uploads\/2018\/11\/blogimg_1.10.1.png 524w, https:\/\/vtcmagblog.com\/wp-content\/uploads\/2018\/11\/blogimg_1.10.1-300x220.png 300w\" alt=\"\" width=\"524\" height=\"384\" \/><figcaption id=\"caption-attachment-290\" class=\"wp-caption-text\">\uadf8\ub9bc 1. HPPMS\uc640 DC \ub9c8\uadf8\ub124\ud2b8\ub860 \uc2a4\ud37c\ud130\ub9c1 \ud544\ub984\uc758 \uad74\uc808\ub960 \ube44\uad50 [5] 11.<\/figcaption><\/figure>\n<p>HPPMS \uacf5\uc815\uc758 \ub610 \ub2e4\ub978 \uc7a5\uc810\uc740 \ud654\ud559\uc801 \ubc0f \ud658\uacbd\uc801 \uc548\uc815\uc131\uc774 \ud5a5\uc0c1\ub41c\ub2e4\ub294 \uc810\uc785\ub2c8\ub2e4. \uc740 \ucf54\ud305\uc740 \ud2b9\ud788 \ub9e4\uc6b0 \uc587\uc740 \ucf54\ud305\uc758 \uacbd\uc6b0 \ud654\ud559\uc801 \ubc0f \ud658\uacbd\uc801 \uc548\uc815\uc131\uc774 \ubd80\uc871\ud55c \uac83\uc73c\ub85c \uc545\uba85\uc774 \ub192\uc2b5\ub2c8\ub2e4. \uc544\uc9c1 \ub9ce\uc740 \ud14c\uc2a4\ud2b8\uac00 \ud544\uc694\ud558\uc9c0\ub9cc, HPPMS\ub85c \uc99d\ucc29\ub41c \uc740\ub9c9\uc740 \ub2e4\uce35 \uad6c\uc870\uc5d0\uc11c \uc548\uc815\uc131\uacfc \uad11\ud559\uc801 \ud2b9\uc131\uc774 \ub354 \ub192\uc740 \uac83\uc73c\ub85c \ubcf4\uc785\ub2c8\ub2e4[9].<\/p>\n<p>\uc774 \uacf5\uc815\uc740 \ubc00\ub3c4\uc640 \ubd80\ub4dc\ub7ec\uc6c0\uc774 \uc99d\uac00\ud568\uc5d0 \ub530\ub77c \ub9c8\ucc30 \ucf54\ud305\uc758 \uc131\ub2a5\uc744 \ud5a5\uc0c1\uc2dc\ud0ac \uc218 \uc788\ub294 \uc7a0\uc7ac\ub825\uc744 \uac00\uc9c0\uace0 \uc788\uc2b5\ub2c8\ub2e4[11-15]. \uc870\ubc00\ud55c \ubbf8\uc138 \uad6c\uc870\uc640 \ub9e4\ub044\ub7ec\uc6b4 \ud45c\uba74\uc744 \uac00\uc9c4 \ucf54\ud305\uc740 \ub0b4\uc2dd\uc131\uacfc \ub0b4\ub9c8\ubaa8\uc131\uc744 \ub192\uc774\uace0 \ub9c8\ucc30\uc744 \uac10\uc18c\uc2dc\ud0a4\uae30 \ub54c\ubb38\uc5d0 \ub9ce\uc740 \uc751\uc6a9 \ubd84\uc57c\uc5d0\uc11c \uc120\ud638\ub429\ub2c8\ub2e4. TiN, CrN\uacfc \uac19\uc740 \ucf54\ud305 <sub>x<\/sub>Cr\u00a0<sub>x<\/sub>\u00a0N\u00a0<sub>y<\/sub>\ubc0f Ti\u00a0<sub>3<\/sub>\u00a0SiC\u00a0<sub>2's<\/sub>\uacbd\uc9c8 \uc7ac\ub8cc\ub294 HPPMS\ub85c \uc99d\ucc29\ub418\uc5c8\uc2b5\ub2c8\ub2e4. TiN \ucf54\ud305\uc740 DC \ub9c8\uadf8\ub124\ud2b8\ub860 \uc2a4\ud37c\ud130\ub9c1 \uc99d\ucc29\uc5d0 \ube44\ud574 \ub9e4\uc6b0 \ubbf8\uc138\ud55c \uc785\uc790 \uad6c\uc870\ub97c \uac00\uc9c0\uace0 \uc788\uc73c\uba70[19], CrN \ucf54\ud305\uc740 UBM \uc2a4\ud37c\ud130\ub9c1 \ucf54\ud305\ubcf4\ub2e4 \ubbf8\uc138 \uad6c\uc870\uac00 \ud6e8\uc52c \ub354 \uc6b0\uc218\ud569\ub2c8\ub2e4. 25 GPa\uc5d0 \uac00\uae4c\uc6b4 \uacbd\ub3c4 \uac12\uacfc \uc2ac\ub77c\uc774\ub529 \ub9c8\ubaa8 \uacc4\uc218\uac00 7\uc5d0\uc11c 0.2\ub85c \uac10\uc18c\ud55c \uac83\uc73c\ub85c \ubcf4\uace0\ub418\uc5c8\uc2b5\ub2c8\ub2e4 [15].<\/p>\n<p>HPePMS\ub294 \ub610\ud55c VMeCN \ubc0f CrN\/NbN \ub9c8\ucc30 \ucd08\uaca9\uc790 \ucf54\ud305\uc744 \uc99d\ucc29\ud588\uc2b5\ub2c8\ub2e4[16,17]. \uc774\ub7ec\ud55c \uad6c\uc870\ub294 \uc0c8\ub85c\uc6b4 \ub192\uc740 \uacbd\ub3c4 \uac12\uacfc \ub0ae\uc740 COF\ub97c \ubcf4\uc5ec\uc90d\ub2c8\ub2e4. TiAlCN \/ VCN \ucd08\uaca9\uc790\ub294 \ub192\uc740 \uacbd\ub3c4 \uac12 (Hv = 2900 kg \/ mm\u00a0<sup>2<\/sup>) \ubc0f 0.42\uc758 \uc801\ub2f9\ud788 \ub0ae\uc740 COF\ub97c \uc81c\uacf5\ud569\ub2c8\ub2e4. CrN\/NbN \ucf54\ud305\uc740 \ud5a5\uc0c1\ub41c \ub9c8\ubaa8 \ubc0f \ubd80\uc2dd \ubc29\uc9c0 \uae30\ub2a5\uacfc \ub0ae\uc740 \ud45c\uba74 \uac70\uce60\uae30\ub97c \ubcf4\uc5ec\uc90d\ub2c8\ub2e4 [16]. \uc774 \uacf5\uc815\uc5d0\uc11c \uc911\uc694\ud55c \ub2e8\uacc4\ub294 HPPMS\ub85c \uc99d\ucc29\ub41c V\uc640 Nb\ub85c \uae30\ud310\uc744 \uc804\ucc98\ub9ac\ud558\ub294 \uac83\uc785\ub2c8\ub2e4.<\/p>\n<p>\uc5ec\ub7ec \uc790\ub8cc\uc5d0 \ub530\ub974\uba74 HPPMS \ud544\ub984\uc740 \uae30\uacc4\uc801 \uc751\ub825\uc774 \ub0ae\uc544\uc57c \ud55c\ub2e4\uace0 \uba85\uc2dc\ub418\uc5b4 \uc788\uc2b5\ub2c8\ub2e4[17]. \uc751\ub825 \uce21\uc815\uc774 \ubd88\ucda9\ubd84\ud558\uc9c0\ub9cc, CrN \ucf54\ud305\uc758 \uacbd\uc6b0 3 GPa \ubd80\uadfc\uc758 \uc751\ub825\uc774 \ubcf4\uace0\ub418\uc5c8\uc2b5\ub2c8\ub2e4[15].23 \ud0c4\uc18c \ud544\ub984\uc5d0\uc11c\ub294 1.6 GPa\uc5d0\uc11c 6.5 GPa \ubc94\uc704\uc758 \uc751\ub825\uc774 \uce21\uc815\ub418\uc5c8\uc2b5\ub2c8\ub2e4[18]. TiN \ucf54\ud305\uc5d0\uc11c\ub3c4 \ub0ae\uc740 \uc751\ub825\uc774 \uce21\uc815\ub418\uc5c8\uc2b5\ub2c8\ub2e4[19,20].<\/p>\n<p>HPPMS\ub294 \uc800\uc800\ud56d ITO \ud544\ub984 \uc99d\ucc29\uc5d0 \uc0ac\uc6a9\ub418\uc5b4 \uc654\uc73c\uba70[21] TCO \uc131\ub2a5\uc758 \uc804\ubc18\uc801\uc778 \uac1c\uc120 \uac00\ub2a5\uc131\uc744 \ubcf4\uc5ec\uc8fc\uc5c8\uace0, \uc774 \uacf5\uc815\uc744 \ud1b5\ud574 ZnO:Al \ud544\ub984\ub3c4 \uc99d\ucc29\ub418\uc5c8\uc2b5\ub2c8\ub2e4. \uac70\uc758 \ubaa8\ub4e0 \uad00\ub828 \ubcf4\uace0\uc11c\uc5d0\uc11c HPPMS \ucf54\ud305\uacfc DC \ub9c8\uadf8\ub124\ud2b8\ub860 \uc2a4\ud37c\ud130\ub9c1 \ucf54\ud305\uc744 \ube44\uad50\ud588\uc2b5\ub2c8\ub2e4. \uadf8\ub9bc 2\ub294 300\u00b0C\uc5d0\uc11c \uc99d\ucc29\ub41c HPPMS\uc640 DC \uc2a4\ud37c\ud130\ub9c1 \ud544\ub984\uc758 \ud45c\uba74 \ud615\ud0dc\ub97c \ube44\uad50\ud55c \uac83\uc785\ub2c8\ub2e4[22]. HPPMS \ud544\ub984\uc758 \ub9e4\uc6b0 \ub9e4\ub044\ub7ec\uc6b4 \ud45c\uba74\uc5d0 \ub2e4\uc2dc \ud55c \ubc88 \uc8fc\ubaa9\ud558\uc138\uc694. \uadf8\ub9bc 3\uc740 \ub450 \uac00\uc9c0 \ubc29\ubc95\uc73c\ub85c \uc99d\ucc29\ub41c \uc800\ud56d\ub960 \ud544\ub984\uc744 \ube44\uad50\ud55c \uac83\uc785\ub2c8\ub2e4(9a - DC \ubc0f 9b - HPPMS). DC \ubc29\ubc95\uc73c\ub85c \ub2ec\uc131\ud55c \uc800\ud56d\ub960\uc740 o<sub>2<\/sub>1sccm\uc758 \uc720\ub7c9\uc740 ~3.2\u00d710\uc785\ub2c8\ub2e4.\u00a0<sup>-3<\/sup>\u00a0\u03a9.cm(\uc774 \ubd84\uc57c\uc5d0\uc11c ITO\uc758 \uc808\ub300 \uc0c1\ud0dc)\uc778 \ubc18\uba74, HPPMS \ubc29\uc2dd\uc758 \uc800\ud56d\ub960\uc740 3.1 ~ \u00d7 10\uc785\ub2c8\ub2e4.\u00a0<sup>-3<\/sup>\u00a0\ub3d9\uc77c\ud55c O\uc758 \uacbd\uc6b0 \u03a9.cm\u00a0<sub>2<\/sub>\ud750\ub984. \uc800\uc790\ub294 \uc800\ud56d\ub960\uc5d0 \ub300\ud574 \ubcf4\uace0\ub41c \uac00\uc7a5 \ub0ae\uc740 \uac12\uc774 1.35 x 10\uc778 \uc810\uc744 \uace0\ub824\ud560 \ub54c \uc774\ub294 \uc0c1\ub2f9\ud55c \ucc28\uc774\ub77c\uace0 \uc0dd\uac01\ud569\ub2c8\ub2e4. <sup>-3<\/sup>\u00a0\u03a9.cm DC \ud544\ub984 \ubc0f ~1.25 X10\u00a0<sup>-3<\/sup> HPPMS \ud544\ub984\uc758 \uacbd\uc6b0 \u03a9.cm.HPPMS\uc758 \uc9c4\uc815\ud55c \uc7a5\uc810\uc740 \ucf54\ud305\uc758 \ubd80\ub4dc\ub7ec\uc6c0\uc5d0 \uc788\ub294 \uac83 \uac19\uc73c\uba70 HPPMS\uac00 \uc720\ub9ac\ud569\ub2c8\ub2e4.<\/p>\n<figure id=\"attachment_291\" class=\"wp-caption alignnone\" aria-describedby=\"caption-attachment-291\"><img loading=\"lazy\" decoding=\"async\" class=\"alignnone wp-image-866 size-full\" src=\"https:\/\/www.naxau.cn\/wp-content\/uploads\/2020\/03\/HPPMS-HPPMS\u5927\u529f\u7387\u8109\u51b2\u78c1\u63a7\u6e85\u5c04.png\" alt=\"DC \ub9c8\uadf8\ub124\ud2b8\ub860\uc73c\ub85c \uc99d\ucc29\ud55c ITO \ud544\ub984\uc758 \ud45c\uba74 \ud615\ud0dc \ube44\uad50(a)\uc640 HPPMS\ub85c \uc99d\ucc29\ud55c \ud544\ub984\uc758 \ud45c\uba74 \ud615\ud0dc \ube44\uad50(b)\" width=\"654\" height=\"484\" srcset=\"https:\/\/www.naxauam.com\/wp-content\/uploads\/2020\/03\/HPPMS-HPPMS\u5927\u529f\u7387\u8109\u51b2\u78c1\u63a7\u6e85\u5c04.png 654w, https:\/\/www.naxauam.com\/wp-content\/uploads\/2020\/03\/HPPMS-HPPMS\u5927\u529f\u7387\u8109\u51b2\u78c1\u63a7\u6e85\u5c04-300x222.png 300w\" sizes=\"auto, (max-width: 654px) 100vw, 654px\" \/><figcaption id=\"caption-attachment-291\" class=\"wp-caption-text\">\uadf8\ub9bc 2: DC \ub9c8\uadf8\ub124\ud2b8\ub860(a)\uacfc HPPMS(b)\ub85c \uc99d\ucc29\ud55c ITO \ud544\ub984\uc758 \ud45c\uba74 \ud615\ud0dc \ube44\uad50 [22].<\/figcaption><\/figure>\n<figure id=\"attachment_292\" class=\"wp-caption alignnone\" aria-describedby=\"caption-attachment-292\"><img loading=\"lazy\" decoding=\"async\" class=\"size-full wp-image-292\" src=\"https:\/\/vtcmagblog.com\/wp-content\/uploads\/2018\/11\/blogimg_1.10.3.png\" sizes=\"auto, (max-width: 612px) 100vw, 612px\" srcset=\"https:\/\/vtcmagblog.com\/wp-content\/uploads\/2018\/11\/blogimg_1.10.3.png 612w, https:\/\/vtcmagblog.com\/wp-content\/uploads\/2018\/11\/blogimg_1.10.3-300x259.png 300w\" alt=\"\" width=\"612\" height=\"528\" \/><figcaption id=\"caption-attachment-292\" class=\"wp-caption-text\">\uadf8\ub9bc 3: DC \ub9c8\uadf8\ub124\ud2b8\ub860(a)\uacfc HPPMS(b)\ub85c \uc99d\ucc29\ud55c ITO \ud544\ub984\uc758 \uc800\ud56d\ub960\uacfc \uad11\ud761\uc218\uc728 \ube44\uad50 [22].<\/figcaption><\/figure>\n<hr \/>\n<p>http:\/\/vtcmagblog.com\/ \uc73c\ub85c \uc774\ub3d9<\/p>\n<h3>\ucc38\uc870:<\/h3>\n<ol>\n<li>D J Christie \uc678, \uc81c47\ud68c \uc9c4\uacf5 \ucf54\ud305\uae30 \ud559\ud68c \uc5f0\ub840 \uae30\uc220 \ucee8\ud37c\ub7f0\uc2a4 (2004) 113.<\/li>\n<li>\uc70c\ub9ac\uc5c4 D. \uc2a4\ud504\ub864, \uc9c4\uacf5 \ucf54\ud305 \uae30\uc220\uc758 50\ub144\uacfc \uc9c4\uacf5 \ucf54\ud305 \ud559\ud68c\uc758 \uc131\uc7a5, Donald M. Mattox \ubc0f Vivienne Harwood Mattox ed. \uc9c4\uacf5 \ucf54\ud305 \ud559\ud68c (2007) 35.<\/li>\n<li>R Bandorf \uc678, \uc81c50\ucc28 \uc9c4\uacf5 \ucf54\ud305\uae30 \ud559\ud68c \uc5f0\ub840 \uae30\uc220 \ucee8\ud37c\ub7f0\uc2a4 (2007) 160.<\/li>\n<li>J A \ub370\uc774\ube44\uc2a4 \uc678, \uc81c47\ud68c \uc9c4\uacf5 \ucf54\ud305\uae30 \ud559\ud68c \uc5f0\ub840 \uae30\uc220 \ucee8\ud37c\ub7f0\uc2a4 (2004) 215.<\/li>\n<li>K Sarakinos \uc678, Rev. Adv. Mater. Sci, 15 (2007) 44.<\/li>\n<li>S \ucf58\uc2a4\ud0c4\ud2f0\ub2c8\ub514\uc2a4 \uc678, \uc81c50\ucc28 \uc9c4\uacf5 \ucf54\ud305\uae30 \ud559\ud68c \uc5f0\ub840 \uae30\uc220 \ucee8\ud37c\ub7f0\uc2a4 (2007) 92.<\/li>\n<li>W.D. Sproul, D.J. Christie, D.C. Carter, \uc81c47\ud68c \uc9c4\uacf5 \ucf54\ud305\uae30 \ud559\ud68c \uc5f0\ub840 \uae30\uc220 \ucee8\ud37c\ub7f0\uc2a4(2004) 96.<\/li>\n<li>D A Glocker \uc678, \uc81c48\ud68c \uc9c4\uacf5 \ucf54\ud305\uae30 \ud559\ud68c \uae30\uc220 \ud68c\uc758\ub85d (2005) 53.<\/li>\n<li>J Li, S R Kirkpatrick \ubc0f S L Rohde, \ud504\ub808\uc820\ud14c\uc774\uc158 SE-TuA1, AVS 2007 \ucd94\uacc4 \uae30\uc220 \ucee8\ud37c\ub7f0\uc2a4, 2007\ub144 10\uc6d4 14~19\uc77c, \uc6cc\uc2f1\ud134 \uc8fc \uc2dc\uc560\ud2c0.<\/li>\n<li>\uc9c4\uacf5 \ucf54\ud305\uae30 \ud559\ud68c 47\ucc28 \uc5f0\ub840 \uae30\uc220 \ucee8\ud37c\ub7f0\uc2a4 (2004) 183<\/li>\n<li>A P Ehiasarian \uc678, \uc81c45\ud68c \uc9c4\uacf5 \ucf54\ud305\uae30 \ud559\ud68c \uae30\uc220 \ucee8\ud37c\ub7f0\uc2a4(2002) 328\ucabd.<\/li>\n<li>J B\u00f6hlmark \uc678, \uc81c49\ud68c \uc9c4\uacf5 \ucf54\ud305\uae30 \ud559\ud68c \uae30\uc220 \ucee8\ud37c\ub7f0\uc2a4(2006) 334\ucabd.<\/li>\n<li>J Alami \uc678, \uc587\uc740 \uace0\uccb4 \ud544\ub984 515 (4): 1731-1736.<\/li>\n<li>A P Ehiasarian \uc678, \ud45c\uba74 \ubc0f \ucf54\ud305 \uae30\uc220 163-164: 267-272.<\/li>\n<li>J Paulitsch \uc678, \uc81c50\ud68c \uc9c4\uacf5 \ucf54\ud305\uae30 \ud559\ud68c \uae30\uc220 \ucee8\ud37c\ub7f0\uc2a4(2007) 150.<\/li>\n<li>A P Ehiasarian \uc678, \uc81c49\ud68c \uc9c4\uacf5 \ucf54\ud305\uae30 \ud559\ud68c \uae30\uc220 \ucee8\ud37c\ub7f0\uc2a4(2006) 349\ucabd.<\/li>\n<li>W D Sproul, \uc9c4\uacf5 \ucf54\ud305\uae30 \ud559\ud68c \uc81c50\ucc28 \uae30\uc220 \ud68c\uc758\ub85d(2007) 591\ucabd<\/li>\n<li>\uc9c4\uacf5 \ucf54\ud305\uae30 \ud559\ud68c \uc81c46\ud68c \uae30\uc220 \ucee8\ud37c\ub7f0\uc2a4 (2003) 158<\/li>\n<li>SE+PS-MoA1: R. \uce58\uc2a4\ud2f0\uc57c\ucf54\ud504, \"\ub098\ub178\ubbf8\ud130 \uaddc\ubaa8\uc758 \ub2e4\uce35 \ucf54\ud305\uc758 \ubcc0\uc870 \ud384\uc2a4 \uc804\ub825 \uc99d\ucc29\", \ubc1c\ud45c \ub0b4\uc6a9 2008\ub144 10\uc6d4 21\uc77c, \uc6cc\uc2f1\ud134 \uc8fc \uc2dc\uc560\ud2c0, 2008 AVS \uac00\uc744 \uae30\uc220 \ucee8\ud37c\ub7f0\uc2a4.<\/li>\n<li>SE+PS-MoA3: A. Amassian \uc678, 2008\ub144 10\uc6d4 21\uc77c, \uc6cc\uc2f1\ud134\uc8fc \uc2dc\uc560\ud2c0, 2008 AVS \ucd94\uacc4 \uae30\uc220 \ucee8\ud37c\ub7f0\uc2a4\uc5d0\uc11c \ubc1c\ud45c.<\/li>\n<li>\uc9c4\uacf5 \ucf54\ud305\uae30 \ud559\ud68c \uc81c50\ud68c \uae30\uc220 \ucee8\ud37c\ub7f0\uc2a4(2007) 602\ucabd, P Eh Hovsepian \uc678, \uc9c4\uacf5 \ucf54\ud305\uae30 \ud559\ud68c \uc81c50\ud68c \uae30\uc220 \ucee8\ud37c\ub7f0\uc2a4 \ub17c\ubb38\uc9d1.<\/li>\n<li>V Sittinger \uc678, \uc81c49\ud68c \uc9c4\uacf5 \ucf54\ud305\uae30 \ud559\ud68c \uae30\uc220 \ucee8\ud37c\ub7f0\uc2a4(2006) 343\ucabd.<\/li>\n<\/ol>","protected":false},"excerpt":{"rendered":"<p>\u9ad8\u529f\u7387\u8109\u51b2\u78c1\u63a7\u6e85\u5c04\uff08HPPMS\uff09\uff0c\u4e5f\u79f0\u4e3a\u9ad8\u529f\u7387\u8109\u51b2\u78c1\u63a7\u6e85\u5c04\uff08HIPIMS\uff09\u662f\u57fa\u4e8e\u78c1\u63a7\u6e85\u5c04\u6c89\u79ef\u7684PVD\u6d82\u5c42\u6280\u672f\u3002 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