{"id":560,"date":"2019-02-13T14:12:39","date_gmt":"2019-02-13T06:12:39","guid":{"rendered":"http:\/\/localhost\/theme20\/?p=560"},"modified":"2023-12-12T09:31:52","modified_gmt":"2023-12-12T01:31:52","slug":"\ub9c8\uadf8\ub124\ud2b8\ub860-\uc2a4\ud37c\ud130\ub9c1-\uc774\uc911-\ub9c8\uadf8\ub124\ud2b8\ub860-\ubc0f-\uc911\uac04-\uc8fc\ud30c","status":"publish","type":"post","link":"https:\/\/www.naxauam.com\/ko\/\ub9c8\uadf8\ub124\ud2b8\ub860-\uc2a4\ud37c\ud130\ub9c1-\uc774\uc911-\ub9c8\uadf8\ub124\ud2b8\ub860-\ubc0f-\uc911\uac04-\uc8fc\ud30c\/","title":{"rendered":"\ub9c8\uadf8\ub124\ud2b8\ub860 \uc2a4\ud37c\ud130\ub9c1 - \uc774\uc911 \ub9c8\uadf8\ub124\ud2b8\ub860 \ubc0f \uc911\uac04 \uc8fc\ud30c\uc218 \ub9c8\uadf8\ub124\ud2b8\ub860 \uc2a4\ud37c\ud130\ub9c1"},"content":{"rendered":"

\uc0b0\uc5c5 \uacf5\uc815\uc5d0\uc11c\ub294 \ub192\uc740 \uc99d\ucc29\ub960\uacfc \ubaa9\ud45c \ud65c\uc6a9\ub3c4\uac00 \uc911\uc694\ud569\ub2c8\ub2e4. \ub9c8\uadf8\ub124\ud2b8\ub860 \uc74c\uadf9\uc758 \uc99d\ucc29 \uc18d\ub3c4\ub294 \uc0c1\ub300\uc801\uc73c\ub85c \ub192\uc9c0\ub9cc \uc99d\ucc29 \uacf5\uc815(\uc774\uc804 \ube14\ub85c\uadf8\uc5d0\uc11c \ub2e4\ub8ec)\uc758 \uc99d\ucc29 \uc18d\ub3c4\ub9cc\ud07c \ub192\uc9c0\ub294 \uc54a\uc2b5\ub2c8\ub2e4. \uc774\uc911 \ub9c8\uadf8\ub124\ud2b8\ub860\/\ud384\uc2a4 \ub9c8\uadf8\ub124\ud2b8\ub860 \uad6c\uc131\uc740 \ub192\uc740 \uc99d\ucc29\ub960\uacfc \ud5a5\uc0c1\ub41c \uc7ac\ub8cc \ud65c\uc6a9\ub3c4\ub97c \ubaa8\ub450 \ub2ec\uc131\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4[1,2,3]. \ub4c0\uc5bc \ub9c8\uadf8\ub124\ud2b8\ub860 \uc2a4\ud37c\ud130\ub9c1\uc740 \uc911\uac04 \uc8fc\ud30c\uc218(~40kHz - 300kHz) \ud384\uc2a4 \uc804\uc6d0 \uacf5\uae09 \uc7a5\uce58\uc640 \ub450 \uac1c\uc758 \ub9c8\uadf8\ub124\ud2b8\ub860 \uce90\uc18c\ub4dc\ub97c \uc0ac\uc6a9\ud569\ub2c8\ub2e4. \uc774\uc911 \ub9c8\uadf8\ub124\ud2b8\ub860 \uad6c\uc131\uc740 \uadf8\ub9bc 2\uc5d0 \ud45c\uc2dc\ub418\uc5b4 \uc788\uc73c\uba70 \uc77c\ubc18\uc801\uc778 \uc804\uc6d0 \uacf5\uae09 \uc7a5\uce58 \ud384\uc2a4\ub294 \uadf8\ub9bc 3\uc5d0 \ub098\uc640 \uc788\uc2b5\ub2c8\ub2e4. \uc804\uc6d0 \uacf5\uae09 \uc7a5\uce58\ub294 \uc0ac\uc774\ud074\uc758 \uc804\ubc18\ubd80 \ub3d9\uc548 \ud55c \ub9c8\uadf8\ub124\ud2b8\ub860 \uc74c\uadf9\uc5d0 \uc591\uc758 \ud384\uc2a4\ub97c \uc804\ub2ec\ud558\uace0 \ub2e4\ub978 \uc74c\uadf9\uc5d0\ub294 \uc74c\uc758 \ubc14\uc774\uc5b4\uc2a4\ub97c \ubd80\uc5ec\ud55c \ub2e4\uc74c \ub2e4\ub978 \ub9c8\uadf8\ub124\ud2b8\ub860 \uc74c\uadf9\uc5d0 \uc591\uc758 \ud384\uc2a4\ub97c \uc804\ub2ec\ud558\uace0 \ub2e4\ub978 \uc74c\uadf9\uc5d0\ub294 \uc74c\uc758 \ubc14\uc774\uc5b4\uc2a4\ub97c \ubd80\uc5ec\ud569\ub2c8\ub2e4. \uc774\ub7ec\ud55c \ubc29\uc2dd\uc73c\ub85c \ud55c \uc74c\uadf9\uc740 \uc591\uadf9 \uc5ed\ud560\uc744 \ud558\uace0 \ub2e4\ub978 \uc74c\uadf9\uc740 \uc2a4\ud37c\ud130\ub9c1 \uc74c\uadf9 \uc5ed\ud560\uc744 \ud569\ub2c8\ub2e4. \uc2a4\ud37c\ud130\ub9c1\uc740 \ub124\uac70\ud2f0\ube0c \ubc14\uc774\uc5b4\uc2a4 \uc911\uc5d0\ub9cc \ubc1c\uc0dd\ud569\ub2c8\ub2e4. \uc774 \uacf5\uc815\uc740 \ubc18\uc751\uc131 \uc2a4\ud37c\ud130\ub9c1\uc5d0 \ub9e4\uc6b0 \uc801\ud569\ud569\ub2c8\ub2e4[4,5,6].<\/p>\n

\"\ub4c0\uc5bc
\uadf8\ub9bc 2. \ub4c0\uc5bc \ub9c8\uadf8\ub124\ud2b8\ub860 \uc74c\uadf9 \uad6c\uc131 [1].<\/figcaption><\/figure>\n
\"\"
\uadf8\ub9bc 3. \uc77c\ubc18\uc801\uc778 IF \uc804\ub825 \ud384\uc2a4 [4].<\/figcaption><\/figure>\n

\ud384\uc2a4 \ub9c8\uadf8\ub124\ud2b8\ub860 \uc2a4\ud37c\ud130\ub9c1\uc740 \ub9c8\uadf8\ub124\ud2b8\ub860 \uc2a4\ud37c\ud130\ub9c1\uc758 \ub450 \uac00\uc9c0 \ub2e8\uc810\uc744 \uadf9\ubcf5\ud569\ub2c8\ub2e4:<\/p>\n

    \n
  • \uc808\uc5f0 \uce35\uc758 \uc99d\ucc29\uc73c\ub85c \uc778\ud574 \uc591\uadf9\uc774 \uc190\uc2e4(\ub610\ub294 \uc228\uaca8\uc9d0)\ub429\ub2c8\ub2e4.<\/li>\n
  • \ubc18\uc751\uc131 \uc2a4\ud37c\ud130\ub9c1 \uacf5\uc815\uc5d0\uc11c\uc758 \uc804\ud558 \ubc0f \uc544\ud06c \ud615\uc131<\/li>\n<\/ul>\n

    \ud384\uc2a4 \uc804\uc6d0 \uacf5\uae09\uacfc \ud384\uc2a4 \uadf9\uc131\uc758 \ubc18\uc804\uc73c\ub85c \uc778\ud574 \ubc18\uc751\uc131 \uc99d\ucc29 \uc911 \ud0c0\uac9f\uc758 \ucda9\uc804\uc774 \uc2e4\uc9c8\uc801\uc73c\ub85c \uc81c\uac70\ub429\ub2c8\ub2e4. \uadf8\ub9bc 4\ub294 \uc774\uc911 \ub9c8\uadf8\ub124\ud2b8\ub860 \uc2a4\ud37c\ud130\ub9c1 \uc911 \ud50c\ub77c\uc988\ub9c8 \uc2a4\uc704\uce6d\uc744 \ubcf4\uc5ec\uc90d\ub2c8\ub2e4[2].<\/p>\n

    \"\"
    \uadf8\ub9bc 4. \uc774\uc911 \ub9c8\uadf8\ub124\ud2b8\ub860 \uc2a4\ud37c\ud130\ub9c1 \uc911 \ud50c\ub77c\uc988\ub9c8 \uc2a4\uc704\uce6d [2].<\/figcaption><\/figure>\n

    \uc774\uc911 \ub9c8\uadf8\ub124\ud2b8\ub860 \uae30\uc220\uc740 \ucc98\uc74c\uc5d0 \uc0b0\ud654\ubb3c, \uc9c8\ud654\ubb3c \ubc0f \ud22c\uba85 \uc804\ub3c4\uc131 \uc0b0\ud654\ubb3c\uacfc \uac19\uc740 \uc808\uc5f0 \ubb3c\uc9c8\uc744 \uc99d\ucc29\ud558\uae30 \uc704\ud574 \uac1c\ubc1c\ub418\uc5c8\uc2b5\ub2c8\ub2e4[4]. \ub3d9\uc77c\ud55c \ud0c0\uac9f\uc744 \uac00\uc9c4 \ud3c9\uba74 \ub9c8\uadf8\ub124\ud2b8\ub860\uc740 \uc77c\ubc18\uc801\uc73c\ub85c \uc11c\ub85c \ub098\ub780\ud788 \ubc30\uce58\ub418\uc9c0\ub9cc, \ud0c0\uac9f\uc774 \ub2e4\ub978 \uacf5\ub3d9 \uc2a4\ud37c\ud130\ub9c1 \uad6c\uc131\uc5d0\uc11c\ub294 \ub354 \uba40\ub9ac \ub5a8\uc5b4\uc838 \uc788\uc744 \uc218 \uc788\uc2b5\ub2c8\ub2e4[5]. \uc544\ud06c\ub294 \uc74c\uc73c\ub85c \ud3b8\ud5a5\ub41c \ud0c0\uac9f(\uc74c\uadf9)\uc5d0\uc11c \ubc29\ucd9c\ub41c \uc774\ucc28 \uc804\uc790\uac00 \uc591\uc73c\ub85c \ud558\uc804\ub41c \ud0c0\uac9f(\uc591\uadf9)\uc73c\ub85c \ub04c\uc5b4\ub2f9\uaca8 \uc99d\ucc29\ub41c \uc808\uc5f0\uccb4\uc758 \uc591\uc73c\ub85c \ud558\uc804\ub41c \ud45c\uba74\uc744 \uc911\ud654\ud568\uc73c\ub85c\uc368 \uac10\uc18c\ub420 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \ud45c 1\uc740 \uae30\uc874 DC \ub9c8\uadf8\ub124\ud2b8\ub860 \uc2a4\ud37c\ud130\ub9c1\uacfc IF \uc2a4\ud37c\ud130\ub9c1\uc73c\ub85c \uc99d\ucc29\ub41c \ub124 \uac00\uc9c0 \uc7ac\ub8cc\uc758 \uc99d\ucc29 \uc18d\ub3c4\uc640 \uad11\ud559\uc801 \ud2b9\uc131\uc744 \ube44\uad50\ud55c \uac83\uc785\ub2c8\ub2e4[1,2]. \ubaa8\ub4e0 \uacbd\uc6b0\uc5d0\uc11c \uc99d\ucc29 \uc18d\ub3c4\ub97c \ucd5c\ub300 5\ubc30\uae4c\uc9c0 \ub192\uc77c \uc218 \uc788\uc74c\uc744 \uc54c \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n

    \"\"
    \ud45c 1.DC \ubc0f MF \uc2a4\ud37c\ud130\ub9c1 \ud544\ub984\uc758 \uad11\ud559\uc801 \ud2b9\uc131 \ube44\uad50 [1,2].<\/figcaption><\/figure>\n

    MF \uc774\uc911 \ub9c8\uadf8\ub124\ud2b8\ub860 \uc2a4\ud37c\ud130\ub9c1\uc758 \uc774\uc810\uc744 \ub204\ub9b4 \uc218 \uc788\ub294 \ub2e4\ub978 \ubc15\ub9c9 \uc7ac\ub8cc\ub85c\ub294 SiO2, Al2O3, MgO, CrN, ITO\uac00 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n

    \uc774\uc911 \ub9c8\uadf8\ub124\ud2b8\ub860 \uacf5\uc815\uc758 \uc7a5\uc810 \uc911 \ud558\ub098\uc778 \ubc18\uc751\uc131 \uc2a4\ud37c\ud130\ub9c1\uc5d0 \ub300\ud574 \ub354 \uc790\uc138\ud788 \uc0b4\ud3b4\ubcf4\uaca0\uc2b5\ub2c8\ub2e4. \ubc18\uc751\uc131 \uc2a4\ud37c\ud130\ub9c1\uc758 \uae30\ubcf8 \uba54\ucee4\ub2c8\uc998\uc740 \ubcf5\uc7a1\ud558\uace0 \uc544\uc9c1 \uc5f0\uad6c \uc911\uc774\uc9c0\ub9cc[7,8], \uc774\uc911 \ub9c8\uadf8\ub124\ud2b8\ub860 \uc2a4\ud37c\ud130\ub9c1\uc740 \uacf5\uc815\uc744 \ub354 \uc27d\uac8c \uc81c\uc5b4\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4[6,9]. \ub610\ud55c \ud3d0\uc1c4 \ub8e8\ud504 \ucee8\ud2b8\ub864\ub7ec\ub97c \uc0ac\uc6a9\ud558\uc5ec \uacf5\uc815\uc744 \uc790\ub3d9\ud654\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4[6]. \ud45c\uc801 \uc0b0\ud654 \ub610\ub294 \uc911\ub3c5\uc740 \uc99d\ucc29 \uc18d\ub3c4\ub97c \uac10\uc18c\uc2dc\ud0a4\uace0 \uc544\ud06c\ub97c \uc720\ubc1c\ud558\uba70 \ubc00\ub3c4\ub97c \uac10\uc18c\uc2dc\ud0a4\ub294 \uc8fc\uc694 \ubb38\uc81c\uc785\ub2c8\ub2e4. \ubc18\uc751\uc131 \uc2a4\ud37c\ud130\ub9c1\uc758 \ube44\uacb0\uc740 \ud0c0\uac9f \ud45c\uba74\uc744 \uae68\ub057\ud558\uac8c \uc720\uc9c0\ud558\uace0 \ubc18\uc751\uc131 \uac00\uc2a4\uc758 \ubd84\uc555 \uc81c\uc5b4\uc640 \uc9c1\uc811\uc801\uc73c\ub85c \uad00\ub828\ub41c \"\uc591\uadf9 \uc18c\uc2e4\"\uc744 \ubc29\uc9c0\ud558\ub294 \uac83\uc785\ub2c8\ub2e4. \uae30\uc874 \ub9c8\uadf8\ub124\ud2b8\ub860\uc758 \uacbd\uc6b0, \uc774\ub294 \uadf8\ub9bc 5 [10]\uc640 \uac19\uc774 \ubc18\uc751 \uae30\uccb4 \ubd84\uc555\uacfc \ubc18\uc751 \uae30\uccb4 \ud750\ub984\uc758 \ud788\uc2a4\ud14c\ub9ac\uc2dc\uc2a4 \ub8e8\ud504\ub97c \ud50c\ub85c\ud305\ud558\uc5ec \ub2ec\uc131\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \uad11\ud559 \ud2b9\uc131\uc740 \uadf8\ub9bc 6 [10,11]\uacfc \uac19\uc774 \uc99d\ucc29 \uc18d\ub3c4\uc640 \ubc18\uc751\uc131 \uac00\uc2a4 \ubd84\uc555\uc5d0 \ub530\ub77c \ub2ec\ub77c\uc9d1\ub2c8\ub2e4. \ucc98\uc74c\uc5d0\ub294 \uae08\uc18d \ud0c0\uac9f\uacfc\uc758 \ud45c\uba74 \ubc18\uc751\uc774 \ub9ce\uc740 \uc591\uc758 \ubc18\uc751\uc131 \uac00\uc2a4\ub97c \uc18c\ube44\ud569\ub2c8\ub2e4. \ubc18\uc751\uc774 \ud3ec\ud654\ub418\uba74 \ud45c\uc801 \ud45c\uba74\uc774 \uc0b0\ud654\ub418\uace0 \ucd94\uac00 \ubc18\uc751\uc131 \uac00\uc2a4\uac00 \uc18c\ube44\ub418\uc9c0 \uc54a\uc73c\ubbc0\ub85c O2<\/sub>\ub0ae\uc740 \uc720\uc18d\uc5d0\uc11c\ub3c4 \ubd84\uc555\uc774 \uc99d\uac00\ud569\ub2c8\ub2e4. \uc774 \uacbd\uc6b0 \uce68\ucc29 \uc18d\ub3c4\uac00 \ud06c\uac8c \uac10\uc18c\ud569\ub2c8\ub2e4. \ud45c\uc801\uc774 \uc644\uc804\ud788 \uc911\ub3c5\ub418\uba74 O\u00a02's<\/sub>\ubd84\uc555\uc740 \ud750\ub984\uc5d0 \ub530\ub77c \uc120\ud615\uc801\uc73c\ub85c \uc99d\uac00\ud569\ub2c8\ub2e4. \uc774 \uacbd\uc6b0 \ud750\ub984 \uc81c\uc5b4 \ubc0f \uc99d\ucc29 \uacf5\uc815\uc740 \uc74c\uc758 \uacbd\uc0ac \uc601\uc5ed\uc5d0 \uc788\uc5b4\uc57c \ud569\ub2c8\ub2e4.<\/p>\n

    \"\"
    \uadf8\ub9bc 5: \ubc18\uc751\uc131 \uc2a4\ud37c\ud130\ub9c1\uc758 \ud788\uc2a4\ud14c\ub9ac\uc2dc\uc2a4 \ub8e8\ud504 \uc608\uc2dc [10<\/figcaption><\/figure>\n
    \"\"
    \uadf8\ub9bc 6. \uc99d\ucc29 \uc18d\ub3c4 \ubc0f O2 \ubd84\uc555\uc5d0 \ub530\ub978 \uc54c\ub8e8\ubbf8\ub098 \ud544\ub984\uc758 \uad11\ud559\uc801 \ud2b9\uc131 \uc758\uc874\ub3c4 [10].<\/figcaption><\/figure>\n

    \uc774\uc911 \ub9c8\uadf8\ub124\ud2b8\ub860 \uc2a4\ud37c\ud130\ub9c1\uc758 \ud788\uc2a4\ud14c\ub9ac\uc2dc\uc2a4 \uace1\uc120\uc740 \uac70\uc758 \ub3d9\uc77c\ud558\uac8c \ubcf4\uc774\uc9c0\ub9cc, \ub300\ubd80\ubd84\uc758 IF \uc2dc\uc2a4\ud15c\uc740 \ubc18\uc751 \uac00\uc2a4\uc758 \ubd84\uc555\uacfc \uc720\ub7c9\uc744 \ucd5c\uc801\uc758 \uac12\uc73c\ub85c \uc720\uc9c0\ud558\uae30 \uc704\ud574 \uc5b4\ub5a4 \ud615\ud0dc\uc758 \ud3d0\uc1c4 \ub8e8\ud504 \ub610\ub294 \ud50c\ub77c\uc988\ub9c8 \ubc29\ucd9c \ubaa8\ub2c8\ud130 \uc81c\uc5b4\ub97c \uc0ac\uc6a9\ud569\ub2c8\ub2e4[1,6,9]. \uc5ec\ub7ec \ud68c\uc0ac\uc5d0\uc11c \ud3d0\uc1c4 \ub8e8\ud504 \ucee8\ud2b8\ub864\ub7ec\ub97c \ud310\ub9e4\ud569\ub2c8\ub2e4. \ucc54\ubc84 \uad6c\uc131\uc758 \uc608\ub294 \uadf8\ub9bc 7\uc5d0 \ub098\uc640 \uc788\uc2b5\ub2c8\ub2e4 [6]. \uc774 \uc2dc\uc2a4\ud15c\uc740 \ubaa9\ud45c \uc804\uc555\uc5d0 \ub300\ud55c \uc124\uc815 \ud3ec\uc778\ud2b8\uc640 \ub9e4\uc6b0 \ube60\ub978 \ud50c\ub7ed\uc2a4 \uc81c\uc5b4 \uac12\uc744 \uc0ac\uc6a9\ud558\uc5ec \ubaa9\ud45c \ud45c\uba74\uc5d0\uc11c \ubc1c\uc0dd\ud558\ub294 \ud654\ud559 \ubc18\uc751\uc5d0 \ubcf4\uc870\ub97c \ub9de\ucda5\ub2c8\ub2e4. \uc989, \ucee8\ud2b8\ub864\ub7ec\ub294 \uc99d\ucc29 \uc911 \ubaa9\ud45c \uc804\uc555\uc744 \uc124\uc815 \ud3ec\uc778\ud2b8\uc640 \ube44\uad50\ud558\uace0 \uadf8\uc5d0 \ub530\ub77c \ubc18\uc751\uc131 \uac00\uc2a4 \ud750\ub984\uc744 \uc870\uc815\ud569\ub2c8\ub2e4.<\/p>\n

    \"\"
    \uadf8\ub9bc 7. \uc774\uc911 \ub9c8\uadf8\ub124\ud2b8\ub860 \ubc18\uc751 \uc2a4\ud37c\ud130\ub9c1\uc744 \uc704\ud55c \ud3d0\uc1c4 \ub8e8\ud504 \uc81c\uc5b4 \ucc54\ubc84 \uad6c\uc870 [6].<\/figcaption><\/figure>\n

    \ucf54 \uc2a4\ud37c\ud130\ub9c1\uc5d0 \ub4c0\uc5bc \ub9c8\uadf8\ub124\ud2b8\ub860\uacfc IF \uc804\uc6d0 \uacf5\uae09 \uc7a5\uce58\ub97c \uc0ac\uc6a9\ud558\uba74 \uac01 \uad6c\uc131 \uc694\uc18c\uc758 \uc591\uc744 \uc815\ubc00\ud558\uac8c \uc81c\uc5b4\ud560 \uc218 \uc788\ub2e4\ub294 \uc7a5\uc810\uc774 \uc788\uc2b5\ub2c8\ub2e4[5]. \ubb3c\ub860 \uc774 \uacf5\uc815\uc5d0\ub294 \ub450 \uac1c\uc758 \ub9c8\uadf8\ub124\ud2b8\ub860\uc774 \ud544\uc694\ud558\uc9c0\ub9cc IF \uc804\uc6d0 \uacf5\uae09 \uc7a5\uce58\ub97c \uc0ac\uc6a9\ud558\uba74 \uac01 \ud0c0\uac9f\uc5d0 \uacf5\uae09\ub418\ub294 \uc804\ub825\uc744 \uac01 \ud0c0\uac9f\uc5d0 \ub300\ud574 \uc548\uc815\uc801\uc774\uace0 \ub3c5\ub9bd\uc801\uc73c\ub85c \uc870\uc808\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \uc774\ub97c \ud1b5\ud574 \uc0c1\ub300\uc801\uc778 \uad6c\uc131\uc744 \ub354 \uc798 \uc81c\uc5b4\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \uadf8\ub9bc 8 [5]\ub294 IF \uc804\uc6d0 \uacf5\uae09 \uc7a5\uce58\ub97c \uc0ac\uc6a9\ud55c \ucf54-\uc2a4\ud37c\ud130\ub9c1 \uc124\uc815\uc744 \ubcf4\uc5ec\uc90d\ub2c8\ub2e4. \uc774 \uad6c\uc131\uc740 Ti \ubc0f Al \ud0c0\uac9f\uc744 \uc0ac\uc6a9\ud55c \ucf54-\uc2a4\ud37c\ud130\ub9c1\uc5d0 \uc0ac\uc6a9\ub418\uc5c8\uc73c\uba70, O\u00a02<\/sub>\ubc18\uc751\uc131 \uac00\uc2a4\ub294 TiAlO \uc815\uc758\uc5d0\uc11c \ube44\ub86f\ub429\ub2c8\ub2e4.\u00a0x<\/sub>\uc758 \uad74\uc808\ub960\uc744 \ub098\ud0c0\ub0c5\ub2c8\ub2e4. \uadf8\ub9bc 9\ub294 \uad74\uc808\ub960\uc744 \uc870\uc815\ud558\uc5ec \uad74\uc808\ub960\uc744 \uc870\uc815\ud558\ub294 \ubc29\ubc95\uc744 \ubcf4\uc5ec\uc90d\ub2c8\ub2e4.\u00a02<\/sub>\uad74\uc808\ub960\uc744 \uc81c\uc5b4\ud558\uae30 \uc704\ud55c \ubd84\uc555.<\/p>\n

    \"\"
    \uadf8\ub9bc 8. IF \uc804\uc6d0 \uacf5\uae09 \uc7a5\uce58\ub97c \uc0ac\uc6a9\ud558\ub294 \uacf5\ub3d9 \uc2a4\ud37c\ud130\ub9c1 \uc7a5\uce58 [5].<\/figcaption><\/figure>\n
    \"\"
    \uadf8\ub9bc 9. \uacf5\ub3d9 \uc2a4\ud37c\ud130\ub9c1\ub41c TiAlOx\uc758 \uad74\uc808\ub960\uacfc O2 \ubd84\uc555 \uc0ac\uc774\uc758 \uad00\uacc4 [5].<\/figcaption><\/figure>\n

    \uc774\uc911 \ub9c8\uadf8\ub124\ud2b8\ub860 \uc2a4\ud37c\ud130\ub9c1\uc740 \uad11\ud559 \ub2e4\uce35 \ucf54\ud305 [9], TCO [4,12] \ubc0f \ub9c8\ucc30 \ucf54\ud305 [13]\uc744 \uc99d\ucc29\ud558\ub294 \ub370\uc5d0\ub3c4 \uc0ac\uc6a9\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \uadf8\ub9bc 10\uacfc \uac19\uc774 \uc774\uc911 \ub9c8\uadf8\ub124\ud2b8\ub860 \uc99d\ucc29\uc744 \uc774\uc6a9\ud55c SiO\u00a02<\/sub>\u00a0\/ Al\u00a02<\/sub>\u00a0O\u00a03<\/sub>\ubc18\uc0ac \ubc29\uc9c0 \ucf54\ud305\uc744 \ud55c \ub2e4\uc74c \uac01 \ud0c0\uac9f\uc5d0\uc11c \uae30\ud310\uc744 \uc21c\ucc28\uc801\uc73c\ub85c \uc774\ub3d9\ud569\ub2c8\ub2e4. ITO \ud544\ub984\uc758 \uc800\ud56d\ub960\uacfc \uad11\ud559 \ud22c\uacfc\uc728\uc740 \ud384\uc2a4 \uae38\uc774\uc640 \ud50c\ub77c\uc988\ub9c8 \ubc00\ub3c4\ubfd0\ub9cc \uc544\ub2c8\ub77c \uae30\uc874\uc758 \ud30c\ub77c\ubbf8\ud130\uc778 O\u00a02<\/sub>\ubd84\uc555\uacfc \ubaa9\ud45c\uc5d0 \ub3c4\ub2ec\ud558\ub294 \uc804\ub825 [12]. \ub450 \uac1c\uc758 In\u00a00.9<\/sub>\u00a0Sn\u00a00.1<\/sub>\uacf5\uc815\uc758 ITO \uc800\ud56d, \ud384\uc2a4 \uae38\uc774 \ubc0f O\u00a02<\/sub>\ud750\ub984 \uac04\uc758 \uad00\uacc4\ub294 \uadf8\ub9bc 11 [12]\uc5d0 \ub098\uc640 \uc788\uc2b5\ub2c8\ub2e4. \uc5ec\uae30\uc5d0\uc11c\ub294 \ud384\uc2a4 \uae38\uc774\uc5d0 \ud06c\uac8c \uc758\uc874\ud558\ub294 \uc57d 5m\u03a9.cm\uc758 \ub9e4\uc6b0 \uc801\uc808\ud55c \uac12\uc744 \uc5bb\uc744 \uc218 \uc788\uc74c\uc744 \uc54c \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n

    \"\"
    \uadf8\ub9bc 10: \uc774\uc911 \ub9c8\uadf8\ub124\ud2b8\ub860 \uc2a4\ud37c\ud130\ub9c1\uc73c\ub85c \uc99d\ucc29\ub41c SiO2 \/ Al2O3 \ubc18\uc0ac\uc728 \uac10\uc18c \ucf54\ud305\uc758 \ubc18\uc0ac\uc728 \uc2a4\ud399\ud2b8\ub7fc [9].<\/figcaption><\/figure>\n
    \"\"
    \uadf8\ub9bc 11: \uc0b0\uc18c \uc720\ub7c9 \ubc0f \ud384\uc2a4 \uae38\uc774\uc5d0 \ub300\ud55c ITO \ud544\ub984\uc758 \uc800\ud56d\ub960 [12].<\/figcaption><\/figure>\n

    \ub450 \uac1c\uc758 \ud0c0\uac9f\uc774 \uc0ac\uc6a9\ub418\uae30 \ub54c\ubb38\uc5d0 \uc774\uc911 \ub9c8\uadf8\ub124\ud2b8\ub860\uc744 \uc0ac\uc6a9\ud558\uc5ec \ub098\ub178\ub77c\ubbf8\ub124\uc774\ud2b8\uc640 \ub098\ub178 \ubcf5\ud569\uccb4\ub97c \uc99d\ucc29\ud560 \uc218\ub3c4 \uc788\uc2b5\ub2c8\ub2e4[3,13]. \uadf8\ub9bc 12\ub294 RF \uc804\uc6d0 \uacf5\uae09 \uc7a5\uce58\ub97c \uc0ac\uc6a9\ud558\uc5ec \uc54c\ub8e8\ubbf8\ub284\uc744 \uc99d\ucc29\ud558\ub294 \ubaa8\uc2b5\uc744 \ubcf4\uc5ec\uc90d\ub2c8\ub2e4.\u00a02<\/sub>\u00a0O\u00a03<\/sub>\u00a0-ZrO\u00a02<\/sub>\ub098\ub178 \ubcf5\ud569\uccb4\uc758 \uace0\ud574\uc0c1\ub3c4 \ubc1d\uc740 \ud544\ub4dc TEM [3]. ZrO2 \ub098\ub178 \ud074\ub7ec\uc2a4\ud130\ub97c \ub3c4\uc785\ud558\uc5ec Al\u00a02<\/sub>\u00a0O\u00a03<\/sub>TiN\/TaN\uc758 \ub0b4\uc2dd\uc131.\u00a0x<\/sub>(\uc774\ubc88 \ub2ec \uce7c\ub7fc \ucc38\uc870) \ub2e4\uce35\uc740 \ub9c8\ucc30\ud559\uc801\uc73c\ub85c \uc751\uc6a9\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. Ti\uc640 Ta \ud0c0\uac9f\uc744 \uc0ac\uc6a9\ud558\uc5ec Ar + N2 \ud63c\ud569\ubb3c\uc5d0 \ub2e4\uce35\uc744 \uc99d\ucc29\ud588\uc2b5\ub2c8\ub2e4[13]. \uc804\uc6d0 \uacf5\uae09\uc758 \uc8fc\uae30\uc131\uc740 \uc790\uc5f0\uc2a4\ub7fd\uac8c \uac01 \uad6c\uc131\uc758 \ub098\ub178\uce35\uc744 \ud615\uc131\ud569\ub2c8\ub2e4. \ubc15\ub9ac \ubc0f \uc811\ucc29\ub825 \uc190\uc2e4\uc744 \ucd5c\uc18c\ud654\ud558\uae30 \uc704\ud574 \uc774\ub7ec\ud55c \ud544\ub984\uc758 \uc751\ub825\uc744 \uc81c\uc5b4\ud558\ub294 \uac83\uc774 \uc911\uc694\ud569\ub2c8\ub2e4. \ub2e4\uce35 \uad6c\uc870\uc758 \uc751\ub825\uc740 \ub77c\ubbf8\ub124\uc774\ud2b8\uc758 \ub450\uaed8\uc640 \uc9c8\uc18c\uc758 \ubd84\uc555(\uc99d\ucc29 \uc18d\ub3c4\uc5d0\ub3c4 \uc601\ud5a5\uc744 \ubbf8\uce68)\uc73c\ub85c \uc81c\uc5b4\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \uadf8\ub9bc 13\uc740 \uc751\ub825\uc774 \uce35 \ub450\uaed8\uc640 \ucd1d \uc555\ub825(Ar + N\u00a02<\/sub>, Ar \uc555\ub825\uc740 \uc77c\uc815\ud558\uac8c \uc720\uc9c0\ub428)\uc5d0 \uc758\uc874\ud569\ub2c8\ub2e4. \uc774\ub7ec\ud55c \ud30c\ub77c\ubbf8\ud130\ub97c \uc870\uc815\ud558\uba74 \uc751\ub825\uc744 \uc555\ucd95\uc5d0\uc11c \uc778\uc7a5\uc73c\ub85c \ubcc0\uacbd\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n

    \"\"
    \uadf8\ub9bc 12: Al2O3-ZrO2 \ub098\ub178 \ubcf5\ud569\uccb4\uc758 \uace0\ud574\uc0c1\ub3c4 \ubc1d\uc740 \ud544\ub4dc TEM [3].<\/figcaption><\/figure>\n
    \"\"
    \uadf8\ub9bc 13: \uce35 \ub450\uaed8 \ubc0f \ucd1d \uc555\ub825\uc758 \ud568\uc218\ub85c\uc11c\uc758 TiN\/TaNx \ud544\ub984\uc758 \uc751\ub825 [13].<\/figcaption><\/figure>\n

    \uc774\uc911 \ub9c8\uadf8\ub124\ud2b8\ub860\uacfc IF \uc2a4\ud37c\ud130\ub9c1\uc758 \uc608\ub294 \uc5ec\ub7ec \ube14\ub85c\uadf8\ub97c \uac00\ub4dd \ucc44\uc6b8 \uc218 \uc788\uc2b5\ub2c8\ub2e4. RF\uc640 IF \uc804\uc6d0\uc744 \uc0ac\uc6a9\ud558\uc5ec \ubc15\ub9c9\uc744 \uc99d\ucc29\ud558\ub294 \uacbd\uc6b0\uc785\ub2c8\ub2e4. \uc74c\uadf9\uc774 \ub098\ub780\ud788 \ubc30\uce58\ub420 \ub54c \uc74c\uadf9 \uc790\uae30 \uc0c1\ud638 \uc791\uc6a9\ub3c4 \ubb38\uc81c\uac00 \ub420 \uc218 \uc788\uc2b5\ub2c8\ub2e4[1]. \uac01\uac01\uc758 \uacbd\uc6b0\uac00 \ub2e4\ub974\uba70 \uc74c\uadf9 \uad6c\uc131\uc740 \uc6d0\ud558\ub294 \uae30\ud310 \ud615\uc0c1, \uad6c\uc131 \ubc0f \ud2b9\uc131\uc5d0 \ub9de\uac8c \uc870\uc815\ud574\uc57c \ud569\ub2c8\ub2e4.<\/p>\n

    \n

    http:\/\/vtcmagblog.com\/ \uc73c\ub85c \uc774\ub3d9<\/p>\n

    \ucc38\uc870:<\/h3>\n
      \n
    1. U Heister \uc678, \uc81c41\ud68c \uc9c4\uacf5 \ucf54\ud305\uae30 \ud559\ud68c \uc5f0\ub840 \uae30\uc220 \ucee8\ud37c\ub7f0\uc2a4 \ud504\ub85c\uc2dc\ub529 (1998) 187.<\/li>\n
    2. T Winkler, \uc81c45\ud68c \uc9c4\uacf5 \ucf54\ud305\uae30 \ud559\ud68c \uc5f0\ub840 \uae30\uc220 \ucee8\ud37c\ub7f0\uc2a4 \ub17c\ubb38\uc9d1(2002) 315\ucabd.<\/li>\n
    3. D H Trinh \uc678, J. Vac. Sci. Technol. A 24(2) (2006) 309.<\/li>\n
    4. W-M Gnehr \uc678, \uc81c48\ud68c \uc9c4\uacf5 \ucf54\ud305\uae30 \ud559\ud68c \uc5f0\ub840 \uae30\uc220 \ucee8\ud37c\ub7f0\uc2a4 \ub17c\ubb38\uc9d1 (2005) 312.<\/li>\n
    5. D J Christie \uc678, \uc81c46\ud68c \uc9c4\uacf5 \ucf54\ud305\uae30 \ud559\ud68c \uc5f0\ub840 \uae30\uc220 \ucee8\ud37c\ub7f0\uc2a4 \ud504\ub85c\uc2dc\ub529 (2003) 393.<\/li>\n
    6. L Lou \uc678, Advanced Energy Industries, Inc. \ubc31\uc11c.<\/li>\n
    7. R DeGryse \uc678, VT&C 2\uc6d4 2008, 48.<\/li>\n
    8. W D Sproul, \uc81c36\ud68c \uc9c4\uacf5 \ucf54\ud305\uae30 \ud559\ud68c \uc5f0\ub840 \uae30\uc220 \ucee8\ud37c\ub7f0\uc2a4 \ub17c\ubb38\uc9d1 (1993) 504.<\/li>\n
    9. J Strumpfel \uc678, \uc81c40\ud68c \uc9c4\uacf5 \ucf54\ud305\uae30 \ud559\ud68c \uc5f0\ub840 \uae30\uc220 \ucee8\ud37c\ub7f0\uc2a4 \ub17c\ubb38\uc9d1 (1997) 179.<\/li>\n
    10. W D Sproul \uc678, J. Vac. Sci. Technol. A 13(3) (1995) 1198.<\/li>\n
    11. W D \uc2a4\ud504\ub85c\uc6b8\uacfc B E \uc2e4\ube44\uc544, VT&C, 2(8) (2001) 32.<\/li>\n
    12. A I \ub85c\uace0\uc9c4 \uc678, J. Vac. Sci. Technol. A 22(2) (2004) 349<\/li>\n
    13. M Nordin \uc678, J. Vac. Sci. Technol. A 18(6) (2000) 2884.<\/li>\n<\/ol>\n

       <\/p>","protected":false},"excerpt":{"rendered":"

      \u9ad8\u6c89\u79ef\u901f\u7387\u548c\u9776\u6750\u5229\u7528\u7387\u5bf9\u4e8e\u5de5\u4e1a\u8fc7\u7a0b\u975e\u5e38\u91cd\u8981\u3002\u5c3d\u7ba1\u78c1\u63a7\u7ba1\u9634\u6781\u7684\u6c89\u79ef\u901f\u7387\u76f8\u5bf9\u8f83\u9ad8\uff0c\u4f46\u4e0d\u5982\u84b8\u53d1\u8fc7\u7a0b\u7684\u6c89\u79ef\u901f\u7387\u9ad8\uff08\u5728\u5148 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