{"id":5188,"date":"2025-02-10T08:50:05","date_gmt":"2025-02-10T00:50:05","guid":{"rendered":"https:\/\/www.naxauam.com\/?post_type=docs&p=5188"},"modified":"2025-02-10T15:30:24","modified_gmt":"2025-02-10T07:30:24","password":"","slug":"ta-c-\ub2e4\uc774\uc544\ubaac\ub4dc-\ucf54\ud305\uc758-\ucd08\uc800\uc628-\uc99d\ucc29","status":"publish","type":"docs","link":"https:\/\/www.naxauam.com\/ko\/\ubb38\uc11c\/ta-c-\ub2e4\uc774\uc544\ubaac\ub4dc-\ucf54\ud305\uc758-\ucd08\uc800\uc628-\uc99d\ucc29\/","title":{"rendered":"ta-C, \ub2e4\uc774\uc544\ubaac\ub4dc \ucf54\ud305\uc758 \uc800\uc628 \uc99d\ucc29"},"content":{"rendered":"

ta-C \ub2e4\uc774\uc544\ubaac\ub4dc \ucf54\ud305\uc774\ub780 \ubb34\uc5c7\uc778\uac00\uc694?<\/h2>\n\n\n\n

ta-C \ub2e4\uc774\uc544\ubaac\ub4dc \ucf54\ud305, \uc989 \uc0ac\uba74\uccb4 \ube44\uc815\uc9c8 \ud0c4\uc18c(\uc0ac\uba74\uccb4 \ube44\uc815\uc9c8 \ud0c4\uc18c) \ucf54\ud305\uc740 \uc77c\uc885\uc758 \ub2e4\uc774\uc544\ubaac\ub4dc \uc720\uc0ac \ucf54\ud305(DLC)\uc73c\ub85c, \uc218\uc18c\uac00 \uc5c6\ub294 DLC \ucf54\ud305\uc5d0 \uc18d\ud569\ub2c8\ub2e4. \ubbf8\uc138 \uacbd\ub3c4\ub294 3000 - 8500hv\uc5d0 \ub2ec\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n\n\n\n

ta-C \ubbf8\uc138 \uacbd\ub3c4\uac00 7500 HV\ub97c \ucd08\uacfc\ud558\uba74 \ub2e4\uc591\ud55c \ubb3c\uc131 \ud2b9\uc131\uc774 \ucc9c\uc5f0 \ub2e4\uc774\uc544\ubaac\ub4dc\uc5d0 \ub9e4\uc6b0 \uadfc\uc811\ud569\ub2c8\ub2e4. \uc6b0\ub9ac\ub294 \uc774\ub97c \ub2e4\uc774\uc544\ubaac\ub4dc \ucf54\ud305\uc774\ub77c\uace0 \ubd80\ub985\ub2c8\ub2e4. 900\u00b0C\uc758 \uace0\uc628 \uace0\uc555 \uc99d\ucc29 \uae30\uc220\uc778 CVD\uc640 \ub2ec\ub9ac \ub098\ub178\ub77c\uc774\uc628\uc758 \uc774\uc628 \uc18c\uc2a4\uc778 ta-C\ub294 80\u00b0C\uc5d0\uc11c \ub192\uc740 \uacb0\ud569 \uac15\ub3c4\uc640 \uc7ac\ub8cc\uc758 \uc885\ub958\uc5d0 \ud06c\uac8c \uad6c\uc560\ubc1b\uc9c0 \uc54a\uace0 \uc644\ubcbd\ud55c \ub2e4\uc774\uc544\ubaac\ub4dc \ucf54\ud305\uc744 \uc99d\ucc29\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n\n\n\n

\"\"<\/figure>\n\n\n\n

\uc774\uc0c1\uc801\uc778 \uc18c\uc7ac\uc778 \ud751\uc5f0\uc740 \ud3c9\uba74 \uad6c\uc870\ub85c 100%\uc758 sp2, \ub2e4\uc774\uc544\ubaac\ub4dc\ub294 \uc785\uccb4 \uad6c\uc870\ub85c 100%\uc758 sp3, DLC\ub294 sp2\uc640 sp3\uc758 \ud558\uc774\ube0c\ub9ac\ub4dc\uc785\ub2c8\ub2e4. \uc77c\ubc18\uc801\uc73c\ub85c \uac80\uc740 \ud68c\uc0c9\uc758 \ub192\uc740 sp2 \ud568\ub7c9\uc758 \ud0c4\uc18c \ud544\ub984, 10-20%\uc758 \uc218\uc18c \ud568\ub7c9\uc5d0 \ub300\ud574 DLC \ucf54\ud305\uc774\ub77c\uace0 \ud569\ub2c8\ub2e4. \uc77c\ubc18\uc801\uc73c\ub85c sp3 \ud568\ub7c9\uc774 30% \uc774\uc0c1\uc778 \ud0c4\uc18c \ud544\ub984\uc778 ta-C \ucf54\ud305.<\/p>\n\n\n\n

\ub0b4\uc26c \ub2e4\uc774\uc544\ubaac\ub4dc \ucf54\ud305<\/h2>\n\n\n\n

\ub098\uc2dc \ub2e4\uc774\uc544\ubaac\ub4dc \ucf54\ud305\uc740 \uc624\ubc84\uc544\ud06c \uae30\uc220\ub85c \uc81c\uc870\ub41c 80% \uc774\uc0c1\uc758 sp3 \ud568\ub7c9\uc744 \uac00\uc9c4 \uace0\uacbd\ub3c4 DLC\ub85c BAG \ud14c\uc2a4\ud2b8, \ub354\ube14 85 48\uc2dc\uac04 \ud14c\uc2a4\ud2b8, \uc2a4\ud2f8 \ubca8\ubcb3 \ub9c8\ucc30 \ud14c\uc2a4\ud2b8, \ubd80\uc2dd \ud14c\uc2a4\ud2b8\ub97c \ud1b5\uacfc\ud55c \uc81c\ud488\uc785\ub2c8\ub2e4. ITO \uc720\ub9ac, \ucd08\uc5f4 \uc804\ub3c4\uc131 \uc720\ub9ac \ubc0f \uae30\ud0c0 \ud558\uc704 \uae08\uc18d \uc7ac\ub8cc \uc218\uc815\uc5d0 \ub110\ub9ac \uc0ac\uc6a9\ub420 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n\n\n\n

\"\"<\/figure>\n\n\n\n

ta-C \uba64\ube0c\ub808\uc778\uc740 \uc5f4\uc804\ub3c4\uc728\uc774 \ub192\uc73c\uba70, \uba64\ube0c\ub808\uc778 \uad6c\uc870\uc0c1 \uac1c\uc778\uc801\uc73c\ub85c 1000W\/m.k\uc758 \uac12\uc744 \uc120\ud638\ud569\ub2c8\ub2e4. \ud558\uc9c0\ub9cc \uc5ec\uc804\ud788 \uc77c\ubc18 \uc18c\uc7ac\ubcf4\ub2e4 \ud6e8\uc52c \ub192\uc2b5\ub2c8\ub2e4.<\/p>\n\n\n\n

20nm \uc774\ud558\uc758 \ud544\ub984 \ub450\uaed8\uc5d0\uc11c\ub294 \uccad\uc0c9 \uc624\ud504 \uc601\uc5ed\uc5d0\uc11c\ub3c4 ta-C \ucf54\ud305\uc774 90%\ubcf4\ub2e4 \uac00\uc2dc\uad11\uc120 \ud22c\uacfc\uc728\uc774 \ub354 \ub192\uc2b5\ub2c8\ub2e4. \ucf54\ud305 \uc900\ube44 \uacf5\uc815\uacfc \uc2dc\uac04 \ube44\uc6a9\uc758 \uc81c\uc57d\uc73c\ub85c \uc778\ud574 PVD \ubc29\uc2dd\uc740 \ub450\uaebc\uc6b4 \ub2e4\uc774\uc544\ubaac\ub4dc \ucf54\ud305\uc744 \uc900\ube44\ud560 \uc218 \uc5c6\uc2b5\ub2c8\ub2e4. \ubc18\uba74 CVD \uacf5\uc815\uc740 \uac00\ub2a5\ud569\ub2c8\ub2e4.<\/p>\n\n\n\n

\uae30\ud310<\/td>\ud770\uc0c9 \uc720\ub9ac<\/td><\/td><\/tr>
\uc544\ub2c8\uc694.<\/td>\ucf54\ud305 \uc804 \ucf54\ud305 \ud6c4<\/td><\/td><\/tr>
1<\/td>94% 91%<\/td><\/td><\/tr>
2<\/td>94% 91%<\/td><\/td><\/tr>
3<\/td>94% 92%<\/td><\/td><\/tr>
4<\/td>94% 91%<\/td><\/td><\/tr>
5<\/td>94% 91%<\/td><\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n
\"\"<\/figure>\n\n\n\n

\uc800\uc628, \uace0\uc5d0\ub108\uc9c0 \uc99d\ucc29<\/h3>\n\n\n\n

\ub2e4\uc774\uc544\ubaac\ub4dc \ud544\ub984\uc758 \uc0dd\uc0b0 \uc18d\ub3c4(R)\ub294 \uc624\ub85c\uc9c0 C+ \uc774\uc628 \ud50c\ub7ed\uc2a4\uc5d0 \uc758\ud574\uc11c\ub9cc \uacb0\uc815\ub429\ub2c8\ub2e4. \ub610\ud55c \uc800\uc628 \uace0\uc774\uc628 \uc5d0\ub108\uc9c0 \uc99d\ucc29 \ubaa8\ub4dc\uc5d0\uc11c\ub294 \ud3c9\ubc29 \uc13c\ud2f0\ubbf8\ud130\ub2f9 \uc218 \ubc00\ub9ac\uc554\ud398\uc5b4 \uc774\uc0c1\uc758 \ub192\uc740 \uc804\ub958 \ubc00\ub3c4\ub97c \uc0dd\uc131\ud558\ub294 \uc804\uc6d0 \uacf5\uae09 \uc7a5\uce58\uc758 \uc9c0\uc6d0\uc774 \ud544\uc694\ud569\ub2c8\ub2e4.<\/p>\n\n\n\n

\"\"<\/figure>\n\n\n\n

100ev\uc758 \uc5d0\ub108\uc9c0\uc5d0\uc11c \uc5bb\uc744 \uc218 \uc788\ub294 sp3 \uacb0\ud569 \ud568\ub7c9\uc740 \uc57d 85%\ub85c \ub9e4\uc6b0 \ud07d\ub2c8\ub2e4.<\/p>\n\n\n\n

\"\"<\/figure>\n\n\n\n

SP3 \uacb0\ud569 \ud568\ub7c9\uc740 150\u00b0C \uc774\uc0c1\uc5d0\uc11c \uac10\uc18c\ud569\ub2c8\ub2e4.<\/p>\n\n\n\n

\ub0b4\uc26c \ubca4\ub4dc \ud544\ud130 \uc544\ud06c \uae30\uc220<\/h3>\n\n\n\n

\ubca4\ud2b8 \ud29c\ube0c \uc790\uae30 \uc5ec\uacfc \uc9c4\uacf5 \uc74c\uadf9 \uc544\ud06c \uc774\uc628 \ub3c4\uae08 \uc7a5\uce58\ub294 \uc9c1\uc120 \ud29c\ube0c\uc640 \ubca4\ud2b8 \ud29c\ube0c \uc124\uacc4\ub97c \ud1b5\ud574 \ud50c\ub77c\uc988\ub9c8\uc758 \ubd88\uc21c\ubb3c\uacfc \ud070 \uc785\uc790\ub97c \ud6a8\uc728\uc801\uc73c\ub85c \uc81c\uac70\ud558\uace0 \ud45c\uba74 \uac70\uce60\uae30\uac00 \ub0ae\uace0 \ub354 \uc644\ubcbd\ud55c \uba64\ube0c\ub808\uc778 \uc7ac\ub8cc\ub97c \uc99d\ucc29 \ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \uadf8\ub7ec\ub098 \uad6c\ubd80\ub7ec\uc9c4 \ud29c\ube0c\uac00 \uc785\uc790\uc640 \uc774\uc628\uc758 \uc808\ubc18 \uc774\uc0c1\uc744 \uac78\ub7ec\ub0b4\uae30 \ub54c\ubb38\uc5d0 \uba64\ube0c\ub808\uc778 \uc99d\ucc29\ub960\uc774 \ud604\uc800\ud788 \ub5a8\uc5b4\uc9d1\ub2c8\ub2e4. \uc5ec\uacfc\uac00 \uc798\ub41c\ub2e4\ub294 \uac83\uc740 \uc99d\ucc29 \ud6a8\uc728\uc774 \ub0ae\ub2e4\ub294 \uac83\uc744 \uc758\ubbf8\ud569\ub2c8\ub2e4.<\/p>\n\n\n\n

\uadf8 \uacb0\uacfc, NACS\ub294 \ucf54\ud305 \ud488\uc9c8\uacfc \uc6a9\ub7c9\uc758 \uade0\ud615\uc744 \ub9de\ucd94\uae30 \uc704\ud574 \ube44\ud544\ud130 \uc544\ud06c ta-C\ub97c \ub354 \uad11\ubc94\uc704\ud558\uac8c \uc0ac\uc6a9\ud569\ub2c8\ub2e4.<\/p>\n\n\n\n

\"\"<\/figure>\n\n\n\n

\ub098\ub178\ub77c\uc774\uc628\uc740 \ub2e4\ub2e8\uacc4 \uad74\uace1 \uc5ec\uacfc\ub97c \uac00\ub2a5\ud558\uac8c \ud558\uc5ec \uc131\uc7a5 \uacb0\ud568\uc774 \uc801\uc740 \uace0\ub3c4\ub85c \uc81c\uc5b4 \uac00\ub2a5\ud55c \ub2e4\uc774\uc544\ubaac\ub4dc \ud544\ub984\uc744 \ub9cc\ub4ed\ub2c8\ub2e4. 10~20nm\uc758 \ucd08\ubc15\ub9c9 \ucf54\ud305\uc758 \uacbd\uc6b0, \ud544\ub984 \uc81c\ud488 \uc218\uc728\uc744 \ubcf4\uc7a5\ud558\uae30 \uc704\ud574 \ub354 \ub0ae\uc740 \uacb0\ud568\ub960\uc774 \ud544\uc694\ud569\ub2c8\ub2e4.<\/p>\n\n\n\n

\"\"<\/figure>\n\n\n\n

ta-C\uc758 \ub2e4\uce35 \ubcf5\ud569 \uad6c\uc870<\/h3>\n\n\n\n

Nasi ta-C\ub294 \uc77c\ubc18\uc801\uc73c\ub85c \ubcf5\ud569 \ud544\ub984 \uad6c\uc870\ub85c, \uae30\ud310\uacfc\uc758 \uacb0\ud569\ub825\uc744 \ub192\uc774\uae30 \uc704\ud574 Cr, Ti \ubc0f \uae30\ud0c0 \uae08\uc18d \ud504\ub77c\uc774\ubc0d \uce35, ta-C: X \uc804\uc774 \uce35, sp3\/sp2 \uc800\ube44\uc728 \uce35, sp3\/sp2 \uace0\ube44\uc728 \uce35\uc73c\ub85c \uad6c\uc131\ub429\ub2c8\ub2e4.<\/p>\n\n\n\n

sp3 \ud568\ub7c9\uc774 \uc99d\uac00\ud568\uc5d0 \ub530\ub77c \uba64\ube0c\ub808\uc778 \uc7ac\ub8cc\uc758 \ubc00\ub3c4\uc640 \uc555\ucd95 \uc751\ub825\uc740 \uc120\ud615\uc801\uc73c\ub85c \uc99d\uac00\ud558\uba70, \ucd08\uacbd\uc9c8 \uba64\ube0c\ub808\uc778\uc758 \ub192\uc740 \uc751\ub825\uc744 \uadf9\ubcf5\ud558\uae30 \uc704\ud574\uc11c\ub294 \ub2e4\uce35 \uad6c\uc870\uac00 \ud544\uc694\ud569\ub2c8\ub2e4. \ucd08\ub450\uaed8\uc758 ta-C \uba64\ube0c\ub808\uc778\uc744 \ub9cc\ub4e4\uc5b4\uc57c \ud558\ub294 \uacbd\uc6b0, ta-C:Xta-C \uc801\uce35\ud615 \ub808\uc774\uc5b4 \uc124\uacc4\uac00 \ud544\uc694\ud569\ub2c8\ub2e4.<\/p>\n\n\n\n

ta-C\ub294 \ub2e4\ub978 DLC \ucf54\ud305\uacfc \ub9c8\ucc2c\uac00\uc9c0\ub85c \ub192\uc740 \uc218\uc900\uc758 \ucee4\uc2a4\ud130\ub9c8\uc774\uc9d5\uc774 \uac00\ub2a5\ud569\ub2c8\ub2e4.<\/p>\n\n\n\n

ta-C \ucd08\ubc15\ub9c9\uc5d0 \ub300\ud55c \uba87 \uac00\uc9c0 \uce21\uc815 \uacb0\uacfc<\/h2>\n\n\n\n

\ud604\uc7ac\uc758 sp3 \ud568\ub7c9\uc740 \ub77c\ub9cc \ud14c\uc2a4\ud2b8\uc640 \uac19\uc740 \uc0c1\ub300\uc801\uc778 \ud14c\uc2a4\ud2b8 \ubc29\ubc95\uc774\ub77c\ub294 \uc810\uc5d0 \uc720\uc758\ud574\uc57c \ud569\ub2c8\ub2e4. sp3\uc758 \uc808\ub300\uc801\uc778 \ud568\ub7c9\uc744 \uc815\ud655\ud558\uac8c \uce21\uc815\ud560 \uc218 \uc5c6\uc2b5\ub2c8\ub2e4.<\/p>\n\n\n\n

\ub610\ud55c \ud544\ub984 \ub450\uaed8\uac00 1\ubbf8\ud06c\ub860 \ubbf8\ub9cc\uc774\uae30 \ub54c\ubb38\uc5d0 ta-C \ub2e4\uc774\uc544\ubaac\ub4dc \ud544\ub984\uc758 \uacbd\ub3c4\ub97c \uc815\ud655\ud558\uac8c \uce21\uc815\ud560 \uc218 \uc5c6\uc2b5\ub2c8\ub2e4. \uc77c\ubc18\uc801\uc73c\ub85c \ud544\ub984\uc758 \uacbd\ub3c4\ub294 SP3\uc758 \ube44\uc728\uc744 \uae30\uc900\uc73c\ub85c \ucd94\ub860\ud569\ub2c8\ub2e4. \uadf8\ub9ac\uace0 \uc77c\ubc18 ta-C \ub450\uaed8 \ud544\ub984\uc758 \uacbd\uc6b0 \ud544\ub984\uc758 \ubbf8\uc138 \uacbd\ub3c4\ub97c \uc721\uc548\uc73c\ub85c \uce21\uc815\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n\n\n\n

\uc811\ucc29\ub825 \ud14c\uc2a4\ud2b8<\/h3>\n\n\n\n
\uc81c\uc791<\/td>\ud544\ub984 \ub450\uaed8(nm)<\/td>\uc784\uacc4 \ubd80\ud558(N)<\/td><\/tr>
\ub098\uc77c\ub860<\/td>20<\/td>30<\/td><\/tr>
\uc218\uc9c0<\/td>20<\/td>25<\/td><\/tr>
\uace0\uc18d \uac15\ucca0<\/td>200<\/td>75<\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n

\uae30\ud0c0 \ud14c\uc2a4\ud2b8<\/h3>\n\n\n\n
    \n
  • 5% \uc5fc\uc218 \ubd84\ubb34 \ud14c\uc2a4\ud2b8: 120\uc2dc\uac04<\/li>\n\n\n\n
  • \ub354\ube14 85 \ud14c\uc2a4\ud2b8: 48\uc2dc\uac04<\/li>\n\n\n\n
  • 1kg \uc9c0\uc6b0\uac1c \ud14c\uc2a4\ud2b8: 5000\ud68c<\/li>\n\n\n\n
  • \uac00\uc2dc\uad11\uc120 \ud22c\uacfc\uc728 \ud14c\uc2a4\ud2b8: 90% \uc774\uc0c1<\/li>\n\n\n\n
  • \uc138\ud3ec \ub3c5\uc131 \ud14c\uc2a4\ud2b8: ISO10993-5 \ubc0f GB\/T16886.5 \ud45c\uc900\uc758 \uc694\uad6c \uc0ac\ud56d\uc5d0 \ub530\ub77c \ud14c\ud2b8\ub77c\uba54\ud2f8 \uc544\uc878 \uc5fc \ubbf8\ub7c9 \ud6a8\uc18c \ubc18\uc751 \ube44\uc0c9\ubc95(MTT\ubc95)\uc744 \uc0ac\uc6a9\ud558\uc5ec \uc138\ud3ec \ub3c5\uc131\uc740 0 \ub4f1\uae09\uc774\uba70 \uc138\ud3ec \ub3c5\uc131\uc740 \uc21c\uc218 \ud2f0\ud0c0\ub284\ubcf4\ub2e4 \uc57d\uac04 \ub0ae\uc2b5\ub2c8\ub2e4.<\/li>\n\n\n\n
  • \uc6a9\ud608 \ud14c\uc2a4\ud2b8: YY\/T0127.1-93\uc758 \ud45c\uc900\uc5d0 \ub530\ub974\uba74 \ud751\uc5f0 \ubd84\ub9d0 \uadf8\ub8f9\uc758 \uc6a9\ud608 \uc18d\ub3c4\ub294 3.08%\ub85c \uc6a9\ud608 \ud6a8\uacfc\uac00 \uc5c6\ub294 \ubb3c\uc9c8\uc785\ub2c8\ub2e4;<\/li>\n<\/ul>\n\n\n\n

    ta-C\uc758 \uc751\uc6a9<\/h2>\n\n\n\n

    \ub300\ubd80\ubd84\uc758 \uacbd\uc6b0, ta-C\uc758 \ub450\uaed8\uc5d0 \ub530\ub77c \uc801\uc6a9 \ubd84\uc57c\uac00 \ub2ec\ub77c\uc9d1\ub2c8\ub2e4. 10\ubbf8\ud06c\ub860 \uc774\uc0c1\uc758 \ucd08\ubc15\ub9c9\uc758 \uacbd\uc6b0, \uc77c\ubc18\uc801\uc73c\ub85c 3000HV \uc774\uc0c1\uc758 \ubbf8\uc138 \uacbd\ub3c4\ub294 \ud6c4\ucc98\ub9ac\uac00 \ud544\uc694\ud569\ub2c8\ub2e4.<\/p>\n\n\n\n

    \ub2e4\uc74c\uacfc \uac19\uc740 \uc6b0\uc218\ud55c \uc18c\uc7ac \ud2b9\uc131\uc744 \uc9c0\ub2cc ta-C \ub2e4\uc774\uc544\ubaac\ub4dc \ucf54\ud305: \ub192\uc740 \uc5f4\uc804\ub3c4\uc728 \ud654\ud559\uc801\uc73c\ub85c \uc548\uc815\ub41c \ub192\uc740 \ud0c4\uc131\ub960 \ub192\uc740 \uacbd\ub3c4 \ubc0f \ub0b4\ub9c8\ubaa8\uc131 \uc2a4\ud37c\ud130\ub9c1 \uc800\ud56d \ub9e4\uc6b0 \ub192\uc740 \uce90\ub9ac\uc5b4 \uc774\ub3d9\ub3c4(\uc804\uc790 \ubc0f \uc815\uacf5) \ub113\uc740 \uae08\uc9c0 \ub300\uc5ed\ud3ed \ub0ae\uc740 \ube44\uc0b0 \uc804\ub825 UV \uac10\ub3c4(\ud761\uc218) \uc801\uc678\uc120 \ud22c\uacfc\uc728 \ub192\uc740 \uc804\uae30 \uc800\ud56d \ub192\uc740 \uc720\uc804\uc728 \ub192\uc740 \ud56d\ubcf5\uc810 \uc218\uc18c \ud504\ub9ac \ucd08\ubc15\ud615 \uc74c\uc804\uc790 \uce5c\ud654 \uc804\uc704(\ub113\uc740 \uad11\ud559 \ub300\uc5ed\ud3ed) \ub192\uc740 \ucda9\uc2e4\ub3c4\ub85c \uc74c\ud30c\uc758 \ube60\ub978 \uc804\ud30c \uc5f4 \ucda9\uaca9 \uc800\ud56d\ub825 \uc815\uade0\uc131 \uc790\uac00 \uc138\ucc99 <\/p>\n\n\n\n

    \ub098\ub178 \uc2a4\ucf00\uc77c \uad11\ud559 \uac1c\uc9c8 \ud544\ub984(\ub192\uc740 \ud22c\uacfc\uc728)<\/h3>\n\n\n\n
      \n
    • ITO \ubcf4\ud638 \ud544\ub984<\/li>\n\n\n\n
    • \uc801\uc678\uc120 \uc5f4\ud654\uc0c1 \uc7a5\uce58 \ucc3d(\uc801\uc678\uc120 \ud22c\uba85\ub3c4 \ud5a5\uc0c1)<\/li>\n\n\n\n
    • X-\ub808\uc774 \ucc3d(\uace0\ud22c\uacfc\uc728, \ub0b4\ubc29\uc0ac\uc120)<\/li>\n\n\n\n
    • CO2 \ub808\uc774\uc800 \ucc3d<\/li>\n\n\n\n
    • \uace0\uc18d \uc694\uaca9 \ubbf8\uc0ac\uc77c(HIM) \uce74\uc6b8\ub9c1<\/li>\n\n\n\n
    • UV \ub610\ub294 \ubc29\uc0ac\uc120 \uc13c\uc11c<\/li>\n<\/ul>\n\n\n\n

      \uc5f4 \uc804\ub3c4\uc131 \ud544\ub984(\ub192\uc740 \uc5f4 \uc804\ub3c4\uc131)<\/h3>\n\n\n\n
        \n
      • \uace0\uc804\ub825 \ubc0f \uace0\uc8fc\ud30c \uc7a5\uce58<\/li>\n\n\n\n
      • \uc720\ub9ac\uc6a9 \ud22c\uba85 \uc5f4 \uc804\ub3c4\uc131 \ud544\ub984<\/li>\n\n\n\n
      • \uad11\uc804\uc790 \uc7a5\uce58\uc6a9 \ubc29\uc5f4 \ud544\ub984<\/li>\n\n\n\n
      • \uace0\uc8fc\ud30c \ubc0f \ub9c8\uc774\ud06c\ub85c\ud30c \uc7a5\uce58\uc758 \ubc29\uc5f4\ud310<\/li>\n\n\n\n
      • \uc628\ub3c4 \uc13c\uc11c<\/li>\n<\/ul>\n\n\n\n

        \uc74c\ud5a5<\/h3>\n\n\n\n
          \n
        • \uc2a4\ud53c\ucee4 \ucf58<\/li>\n\n\n\n
        • \ud45c\uba74 \ud0c4\uc131\ud30c(SAW) [\uace0 \ub300\uc5ed\ud3ed(4GHZ-6GHZ) \ud544\ud130<\/li>\n<\/ul>\n\n\n\n

          \ub0b4\ub9c8\ubaa8\uc131 \uc7a5\uc2dd \ub3c4\uae08<\/h3>\n\n\n\n

          \ucd08\uacbd\uc9c8 \uacf5\uad6c \ucf54\ud305<\/h3>\n\n\n\n
            \n
          • PCB \ub9c8\uc774\ud06c\ub85c \ub4dc\ub9b4 \ubc0f \uacf5 \ucee4\ud130<\/li>\n\n\n\n
          • 12% \uace0\uc2e4\ub9ac\ucf58 \uc54c\ub8e8\ubbf8\ub284 \ud569\uae08 \uac00\uacf5, \uad6c\ub9ac, \uc740, \uae08 \ubc0f \uae30\ud0c0 \ube44\ucca0\uae08\uc18d \uac00\uacf5;<\/li>\n\n\n\n
          • \ubaa9\uacf5\uc6a9 \uce7c, \uc544\ud06c\ub9b4 CNC \uc808\uc0ad \uacf5\uad6c<\/li>\n\n\n\n
          • \uba74\ub3c4\uae30, \ud544\ub984 \uc2ac\ub77c\uc774\uc11c<\/li>\n\n\n\n
          • \uace0\uae09 \uc8fc\ubc29 \uce7c<\/li>\n<\/ul>\n\n\n\n

            \ucd08\uacbd\uc9c8 \uc724\ud65c \ucf54\ud305(\uc778\uccb4\uc5d0 \ubb34\ub3c5\uc131, \uc0dd\uccb4 \uc801\ud569\uc131, \ub0b4\ub9c8\ubaa8\uc131, \uc790\uccb4 \uc724\ud65c\uc131)<\/h3>\n\n\n\n
              \n
            • \uc774\uc2dd\ud615 \uc758\ub8cc \uae30\uae30: \uc778\uacf5 \uad00\uc808, \uc758\uce58, \uce58\uacfc\uc6a9 \ud2b8\ub808\uc774<\/li>\n\n\n\n
            • \uace0\uc8fc\ud30c \uc804\uae30 \ub098\uc774\ud504<\/li>\n<\/ul>\n\n\n\n

              \uc790\ub3d9\ucc28 \uc608\ube44 \ubd80\ud488<\/h3>\n\n\n\n

              \ub2e4\uc591\ud55c \ub2e4\uc774\uc544\ubaac\ub4dc \ud544\ub984\uc758 \ud2b9\uc131\uacfc \ucc9c\uc5f0 \ub2e4\uc774\uc544\ubaac\ub4dc\uc758 \ud2b9\uc131 \ube44\uad50<\/h2>\n\n\n\n

              \ub098\ub178 \ub77c\uc774\uc628 \ub2e4\uc774\uc544\ubaac\ub4dc \ud544\ub984, 10-800nm \ucd08\ubc15\ud615 \ucd08\uacbd\ub3c4\uc6a9(\ucd08\uacbd\ub3c4 \ucf54\ud305\uc758 \uacbd\uc6b0 4000HV \uc774\uc0c1).<\/p>\n\n\n\n

                \n
              • \uc99d\ucc29 \uc628\ub3c4: ta-C\uc758 \uacbd\uc6b0 80\u00b0C, CVD \ubc29\uc2dd\uc758 \uacbd\uc6b0 \uc77c\ubc18\uc801\uc73c\ub85c 900\u00b0C \uc774\uc0c1\uc785\ub2c8\ub2e4;<\/li>\n\n\n\n
              • \ud544\ub984 \ub450\uaed8: ta-C \ubc29\uc2dd\uc740 \uc77c\ubc18\uc801\uc73c\ub85c \ub098\ub178\ubbf8\ud130 \ubc94\uc704, \ub2e4\uc774\uc544\ubaac\ub4dc \ubc29\uc2dd\uc740 \uc774\ub860\uc801\uc73c\ub85c \ub450\uaed8 \uc81c\ud55c\uc774 \uc5c6\uc73c\uba70, \ub9c8\uc774\ud06c\ub85c \ub4dc\ub9b4\uacfc \uac19\uc740 \ub3c4\uad6c\uc5d0\uc11c\ub294 \uc77c\ubc18\uc801\uc73c\ub85c 5-10\ubbf8\ud06c\ub860\uc785\ub2c8\ub2e4;<\/li>\n\n\n\n
              • \uacb0\uc815 \uad6c\uc870: ta-C\ub294 \uc0ac\uba74\uccb4 \ubb34\uc815\ud615, CVD\ub294 \ub2e8\uacb0\uc815 \ub610\ub294 \ub2e4\uacb0\uc815 \uad6c\uc870\uc785\ub2c8\ub2e4.<\/li>\n\n\n\n
              • \uacbd\ub3c4: CVD \ub2e4\uc774\uc544\ubaac\ub4dc\ub294 \ub354 \ub2e8\ub2e8\ud558\uc5ec \uacb0\ud568\uc774 \uc5c6\ub294 \ub2e4\uc774\uc544\ubaac\ub4dc \uc18c\uc7ac\ub97c \ub9cc\ub4e4 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/li>\n\n\n\n
              • \uc801\uc6a9 \ubd84\uc57c : ta-C\ub294 \uc77c\ubc18\uc801\uc73c\ub85c \uae30\ud310\uc5d0 \uc758\ud574 \uc81c\ud55c\ub418\uc9c0 \uc54a\ub294 \ub0ae\uc740 \uc99d\ucc29 \uc628\ub3c4\ub85c \uc778\ud574 \ucd08\ubc15\ud615 \ubcf4\ud638 \ub610\ub294 \uc5f4 \uc804\ub3c4\uc131\uc5d0 \uc0ac\uc6a9\ub418\uba70 \ucd08\ubc15\ud615 \uad11\ud559 \uac1c\uc9c8 \ud544\ub984\uacfc \ucd08\uacbd \uc790\uae30 \uc724\ud65c \uac1c\uc9c8 \ud544\ub984\uc73c\ub85c \ub098\ub269\ub2c8\ub2e4. \uadf8\ub9ac\uace0 CVD\ub294 \uc77c\ubc18\uc801\uc73c\ub85c \uace0\uc628 \ubc0f \ud06c\uae30 \uc81c\ud55c\uc73c\ub85c \uc778\ud574 \ucd08\uacbd \uc808\uc0ad \uacf5\uad6c, \uace0\uae09 \uc7a5\uc2dd \ub4f1\uc5d0 \uc0ac\uc6a9\ub429\ub2c8\ub2e4;<\/li>\n<\/ul>\n\n\n\n
                \ud2b9\uc131\ud654<\/u><\/strong><\/td>\ucc9c\uc5f0 \ub2e4\uc774\uc544\ubaac\ub4dc<\/strong><\/td>CVD<\/strong><\/td>DLC (a:CH) <\/strong><\/td>ta-C<\/strong><\/td><\/tr>
                \uacbd\ub3c4(Gpa)<\/strong><\/td>100<\/td>80 - 100<\/td>10 - 50<\/td>80 - 100<\/td><\/tr>
                \ubc00\ub3c4(g\/cm3)<\/strong><\/td>3.5<\/td>3.2 - 3.4<\/td>1.7 - 2.2<\/td>3.0 - 3.2<\/td><\/tr>
                \ub9c8\ucc30 \uacc4\uc218<\/strong><\/td>0.1<\/td>0.1(\uad11\ud0dd)<\/td>0.1<\/td>0.1<\/td><\/tr>
                \uac70\uce60\uae30<\/strong><\/td>-<\/td>3\u00b5m<\/td>\uad11\ud559 \ud3c9\ud65c\ud654<\/td>\uad11\ud559 \ud3c9\ud65c\ud654<\/td><\/tr>
                \uc811\ucc29\ub825<\/strong><\/td>-<\/td>\uc544\ub798(\uba38\ub9ac)<\/td>\uac00\uc6b4\ub370<\/td>\uadc0\ud558\uc758(\uacbd\uce6d)<\/td><\/tr>
                \uc99d\ucc29 \uc628\ub3c4<\/strong><\/td>-<\/td>>600\u00b0 C<\/td>120\u00b0C - 325\u00b0C<\/td>80\u00b0C - 150\u00b0C<\/td><\/tr>
                \ud504\ub808\uc784\uc6cc\ud06c<\/strong><\/td>\uacb0\uc815\ud559<\/td>\uacb0\uc815\ud559<\/td>\ubb34\uc815\ud615<\/td>\ubb34\uc815\ud615<\/td><\/tr>
                \ubc18\uc751\uc131 \uac00\uc2a4<\/strong><\/td>-<\/td>\uc608<\/td>\uc608<\/td>\uc120\ud0dd \uac00\ub2a5<\/td><\/tr>
                \uc628\ub3c4 \uc800\ud56d<\/strong><\/strong><\/td>-<\/td>600\u00b0 C+<\/td>250\u00b0C - 350\u00b0C<\/td>500\u00b0 C+<\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n

                \ub0b4\uc26c P \uc2dc\ub9ac\uc988 DLC \uc9c4\uacf5 \ucf54\ud305 \uc7a5\ube44<\/h2>\n\n\n\n

                \ub099\uc2dc\uc628\uc758 P-\uc2dc\ub9ac\uc988\ub294 PeCVD, \uc774\uc628 \uc18c\uc2a4, \ubcf5\ud569 \uc99d\ucc29\uc758 \uc138 \uac00\uc9c0 \uc99d\ucc29 \uacf5\uc815\uc73c\ub85c \uad6c\uc131\ub418\uc5b4 \uc788\uc2b5\ub2c8\ub2e4.<\/p>","protected":false},"excerpt":{"rendered":"

                ta-C \ub2e4\uc774\uc544\ubaac\ub4dc \ucf54\ud305\uc774\ub780 \ubb34\uc5c7\uc785\ub2c8\uae4c ta-C \ub2e4\uc774\uc544\ubaac\ub4dc \ucf54\ud305 \uc989, \uc0ac\uba74\uccb4 \ube44\uc815\uc9c8 \ud0c4\uc18c (\uc0ac\uba74\uccb4 \ube44\uc815\uc9c8 \uce74 [...]<\/p>","protected":false},"author":1,"featured_media":0,"comment_status":"closed","ping_status":"closed","template":"","meta":{"themepark_post_bcolor":"#f5f5f5","themepark_post_width":"1022px","themepark_post_img":"","themepark_post_img_po":"left","themepark_post_img_re":false,"themepark_post_img_cover":false,"themepark_post_img_fixed":false,"themepark_post_hide_title":false,"themepark_post_main_b":"","themepark_post_main_p":100,"themepark_paddingblock":false,"footnotes":""},"doc_category":[179],"doc_tag":[357,234,356],"class_list":["post-5188","docs","type-docs","status-publish","hentry","doc_category-pvd-faq","doc_tag-ito","doc_tag-ta-c","doc_tag-356"],"year_month":"2026-04","word_count":190,"total_views":0,"reactions":{"happy":0,"normal":0,"sad":0},"author_info":{"name":"\uc77c\uc885\uc758 \uc815\uc2e0","author_nicename":"lincy","author_url":"https:\/\/www.naxauam.com\/ko\/author\/lincy\/"},"doc_category_info":[{"term_name":"PVD\u6d82\u5c42\u7c7b-FAQ","term_url":"https:\/\/www.naxauam.com\/ko\/\ubb38\uc11c-\uce74\ud14c\uace0\ub9ac\/pvd-\ucf54\ud305-\ud074\ub798\uc2a4-faq\/"}],"doc_tag_info":[{"term_name":"ITO\u73bb\u7483","term_url":"https:\/\/www.naxauam.com\/ko\/\ubb38\uc11c-\ud0dc\uadf8\/\uc774\ud1a0-\uc720\ub9ac\/"},{"term_name":"ta-C","term_url":"https:\/\/www.naxauam.com\/ko\/\ubb38\uc11c-\ud0dc\uadf8\/ta-c\/"},{"term_name":"\u91d1\u521a\u77f3\u6d82\u5c42","term_url":"https:\/\/www.naxauam.com\/ko\/\ubb38\uc11c-\ud0dc\uadf8\/\ub2e4\uc774\uc544\ubaac\ub4dc-\ucf54\ud305\/"}],"_links":{"self":[{"href":"https:\/\/www.naxauam.com\/ko\/wp-json\/wp\/v2\/docs\/5188","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.naxauam.com\/ko\/wp-json\/wp\/v2\/docs"}],"about":[{"href":"https:\/\/www.naxauam.com\/ko\/wp-json\/wp\/v2\/types\/docs"}],"author":[{"embeddable":true,"href":"https:\/\/www.naxauam.com\/ko\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.naxauam.com\/ko\/wp-json\/wp\/v2\/comments?post=5188"}],"version-history":[{"count":3,"href":"https:\/\/www.naxauam.com\/ko\/wp-json\/wp\/v2\/docs\/5188\/revisions"}],"predecessor-version":[{"id":5247,"href":"https:\/\/www.naxauam.com\/ko\/wp-json\/wp\/v2\/docs\/5188\/revisions\/5247"}],"wp:attachment":[{"href":"https:\/\/www.naxauam.com\/ko\/wp-json\/wp\/v2\/media?parent=5188"}],"wp:term":[{"taxonomy":"doc_category","embeddable":true,"href":"https:\/\/www.naxauam.com\/ko\/wp-json\/wp\/v2\/doc_category?post=5188"},{"taxonomy":"doc_tag","embeddable":true,"href":"https:\/\/www.naxauam.com\/ko\/wp-json\/wp\/v2\/doc_tag?post=5188"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}