{"id":2275,"date":"2023-09-01T09:31:17","date_gmt":"2023-09-01T01:31:17","guid":{"rendered":"https:\/\/www.naxau.cn\/?post_type=docs&#038;p=2275"},"modified":"2025-02-10T10:28:28","modified_gmt":"2025-02-10T02:28:28","password":"","slug":"\ud0c0\ud06c-\ub514\uc5d8\uc528-\ucf54\ud305\uacfc-\ud0c0\ud06c-\ud0c4\ud0c8-\uce74\ubc14\uc774\ub4dc-\ucf54\ud305\uc758-\ucc28\uc774","status":"publish","type":"docs","link":"https:\/\/www.naxauam.com\/ko\/\ubb38\uc11c\/\ud0c0\ud06c-\ub514\uc5d8\uc528-\ucf54\ud305\uacfc-\ud0c0\ud06c-\ud0c4\ud0c8-\uce74\ubc14\uc774\ub4dc-\ucf54\ud305\uc758-\ucc28\uc774\/","title":{"rendered":"Ta-C DLC \ucf54\ud305\uacfc TaC \ud0c4\ud0c8 \uce74\ubc14\uc774\ub4dc \ucf54\ud305\uc758 \ucc28\uc774\uc810"},"content":{"rendered":"<p>Ta-C\ub294 DLC \ub2e4\uc774\uc544\ubaac\ub4dc\uc640 \uc720\uc0ac\ud55c \ucf54\ud305\uc758 \uc77c\uc885\uc778 \uc21c\uc218 \ud0c4\uc18c \ud544\ub984\uc785\ub2c8\ub2e4. \uadf8\ub9ac\uace0 TaC\/TAC\ub294 \uae08\uc18d \uce74\ubc14\uc774\ub4dc\uc758 \uc77c\uc885\uc778 \ud0c4\ud0c8 \ud0c4\ud654\ubb3c\uc785\ub2c8\ub2e4. \uc774 \ub458\uc740 \uc644\uc804\ud788 \ub2e4\ub978 \uc18c\uc7ac\uc785\ub2c8\ub2e4.<\/p>\n<h2>01 DLC ta-C \ucf54\ud305\uc774\ub780?<\/h2>\n<p><a href=\"https:\/\/www.naxau.cn\/docs\/%e4%bb%80%e4%b9%88%e6%98%afdlc%e6%b6%82%e5%b1%82\/\" target=\"_blank\" rel=\"noopener\">DLC<\/a>(\ub2e4\uc774\uc544\ubaac\ub4dc\uc640 \uac19\uc740 \ud0c4\uc18c) \ub2e4\uc774\uc544\ubaac\ub4dc\uc640 \uac19\uc740 \ud0c4\uc18c \ucf54\ud305, SP3(\ub2e4\uc774\uc544\ubaac\ub4dc \uad6c\uc870)\uc640 SP2(\ud751\uc5f0 \uad6c\uc870) \ub610\ub294 \uc218\uc18c, \uc2e4\ub9ac\ucf58, \ubd88\uc18c \ubc0f \uae08\uc18d\uacfc \uac19\uc740 \uc6d0\uc18c\uc640 \ud63c\uc131\ud654\ub41c \ud569\uc131 \ubb3c\uc9c8. dLC\ub294 \uad6c\uc870 \uacb0\ud569\uc758 \ube44\uc728\uacfc \ub9ac\uac04\ub4dc \uacb0\ud569 \uc6d0\uc18c\uc758 \uc720\ud615\uc5d0 \ub530\ub77c \uc774\ubc29\uc131\uc774 \ub2ec\ub77c\uc9c0\ub294 \ud0c4\uc18c \ud544\ub984 \uc7ac\ub8cc\uc758 \ucd1d\uce6d\uc785\ub2c8\ub2e4. ta-C \ud544\ub984\uc740 \ube44\uc815\uc9c8 SP3 \uacb0\ud569\uc785\ub2c8\ub2e4. \uc218\uc18c\uac00 \uc5c6\ub294 70% \uc804\ud6c4\uc758 DLC \uad6c\uc870\uc785\ub2c8\ub2e4.<\/p>\n<p>\uae30\uacc4\uc801 \uc811\ucd09\uc2dd \uc790\uccb4 \uc724\ud65c \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc758 \uacbd\uc6b0, \uae30\uc874 DLC \uc194\ub8e8\uc158\uc740 \uc218\uc18c\ud654 \ube44\uc815\uc9c8(a-C:H) \ud0c4\uc18c \ud544\ub984\uc73c\ub85c \ub2e4\uc591\ud55c \uc791\ub3d9 \uc870\uac74 \uc81c\uc57d(\uc628\ub3c4, \ubd80\ud558, \uc0b0\ud654 \ubd84\uc704\uae30 \ub4f1)\uc5d0\uc11c \uc0c1\ub2f9\ud55c \uc131\ub2a5 \ucc28\uc774\uac00 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n<p><a href=\"https:\/\/www.naxauam.com\/docs\/ta-c%ef%bc%8c%e8%b6%85%e4%bd%8e%e6%b8%a9%e6%b2%89%e7%a7%af%e9%87%91%e5%88%9a%e7%9f%b3%e6%b6%82%e5%b1%82\/\" target=\"_blank\" rel=\"noopener\">ta-C<\/a>\ube44\uc815\uc9c8 \uc0ac\uba74\uccb4 \ud0c4\uc18c \ud544\ub984\uc73c\ub85c, DLC\uc758 \uace0\uc720\ud55c \ud2b9\uc131\uc744 \uc720\uc9c0\ud558\uba74\uc11c \ub354 \uac00\ud639\ud55c \uc791\uc5c5 \uc870\uac74\uc5d0\uc11c\ub3c4 \uc0ac\uc6a9\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \ub9ac\ud504\ud305\uacfc \uac19\uc740:<\/p>\n<ul>\n<li>\ud5a5\uc0c1\ub41c \ub0b4\ub9c8\ubaa8\uc131<\/li>\n<li>\ub9c8\ucc30\uc5d0 \uc758\ud55c \ud654\ud559\uc801 \ub9c8\ubaa8\uc5d0 \ub300\ud55c \ub0b4\uc131 \uc99d\uac00<\/li>\n<li>\ub354 \ub113\uc740 \uc555\ub825\/\uc628\ub3c4 \ubc94\uc704<\/li>\n<\/ul>\n<p>\uadf8\ub7ec\ub098 \uc751\ub825\uc774 \ub192\uc744\uc218\ub85d ta-C \ucf54\ud305\uc774 \uc587\uc544\uc9c0\uace0, \ud544\ub984 \ub450\uaed8\ub97c \uc99d\ucc29\ud558\ub824\uba74 \ud45c\uba74 \uac70\uce60\uae30\ub97c \uc904\uc774\uae30 \uc704\ud574 \uc5f0\ub9c8\uac00 \ud544\uc694\ud569\ub2c8\ub2e4.<\/p>\n<h2>02 \ud0c4\ud0c8 \uce74\ubc14\uc774\ub4dc \ucf54\ud305<\/h2>\n<p>\ud0c4\ud0c8 \uce74\ubc14\uc774\ub4dc(TaC)\ub294 \ub192\uc740 \uacbd\ub3c4(\uc0c1\uc628\uc5d0\uc11c \ubaa8\uc2a4 \ucc99\ub3c4 9-10), \ub192\uc740 \uc735\uc810(\uc57d 3880\u00b0C), \ub192\uc740 \uc601\ub960(283-550 GPa), \ub192\uc740 \uc804\uae30 \uc804\ub3c4\ub3c4(25\u00b0C\uc5d0\uc11c 32.7-117.4 \u03bc\u03a9-cm), \uace0\uc628 \ucd08\uc804\ub3c4\uc131(10.5 K), \ud654\ud559 \ubd80\uc2dd \ubc0f \uc5f4 \ucda9\uaca9\uc5d0 \ub192\uc740 \uc800\ud56d\uc131, \uc554\ubaa8\ub2c8\uc544 \ubd84\ud574 \ubc0f \uc218\uc18c \ubd84\ub9ac \ucd09\ub9e4 \ud65c\uc131\ub3c4\uac00 \ub192\uc2b5\ub2c8\ub2e4. \uc554\ubaa8\ub2c8\uc544 \ubd84\ud574 \ubc0f \uc218\uc18c \ubd84\ub9ac\ub97c \uc704\ud55c \ub192\uc740 \ucd09\ub9e4 \ud65c\uc131\uc744 \uac00\uc9c0\uace0 \uc788\uc2b5\ub2c8\ub2e4. \uc8fc\uc694 \uc6a9\ub3c4\ub294 \ucd08\uacbd\ud569\uae08, \ucee4\ud328\uc2dc\ud130, \uc804\uc790 \uc7a5\uce58, \uace0\uc628 \ubd80\ud488, \ud654\ud559 \uc7a5\ube44 \ubc0f \uc7a5\uac11 \uad00\ud1b5 \ud0c4\uc57d\uc785\ub2c8\ub2e4. \ub610\ud55c \ud0c4\uc18c \uae30\ubc18 \uc7ac\ub8cc\uc758 \ud45c\uba74\uc5d0 TaC \ubcf4\ud638 \ucf54\ud305\uc73c\ub85c \uc0ac\uc6a9\ub418\uc5b4 \ub0b4\uc0b0\ud654\uc131, \ub0b4\uc2dd\uc131, \ub0b4\ub9c8\ubaa8\uc131 \ubc0f \uae30\uacc4\uc801 \ud2b9\uc131\uc744 \ud6a8\uacfc\uc801\uc73c\ub85c \ud5a5\uc0c1\uc2dc\ud0ac \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n<p>\ud558\ud504\ub284-\ud0c4\ud0c8 \ud0c4\ud654\ubb3c \ud569\uae08\uc740 \uc54c\ub824\uc9c4 \ud654\ud569\ubb3c \uc911 \ub179\ub294\uc810\uc774 \uac00\uc7a5 \ub192\uc740 \ud14c\ud2b8\ub77c\ud0c4\ud0c8\ub968-\ud558\ud504\ub284 \ud39c\ud0c0\uce74\ubcf4\ub124\uc774\ud2b8 \ud654\ud569\ubb3c\uc744 \ub9d0\ud569\ub2c8\ub2e4.<\/p>\n<h3>\ud0c4\ud0c8 \uce74\ubc14\uc774\ub4dc\uc758 \uc900\ube44<\/h3>\n<p>\ud0c4\ud0c8 \uce74\ubc14\uc774\ub4dc\uc758 \uc81c\uc870: \uc18c\uacb0, CVD, \uac94(\uc878-\uac94)\uacfc \uac19\uc740 \uace0\uc0c1, \uc561\uc0c1 \ubc0f \uae30\uccb4 \uc0c1 \ubc29\ubc95. \uc2ac\ub7ec\ub9ac \uc18c\uacb0 \ubc29\ubc95\uc740 \ubcf5\ud569 \ucf54\ud305\uc744 \uc900\ube44\ud558\uae30 \uc5b4\ub835\uace0 \ucf54\ud305 \uc5f4 \ucda9\uaca9 \uc800\ud56d\uc774 \uc88b\uc9c0 \uc54a\uc73c\uba70 \ucf54\ud305 \uc870\uc131\ubb3c\uc5d0 \uc758\ud574 \uc81c\uc870 \ub41c CVD \ubc29\ubc95\uc740 \uac00\uc7a5 \ub192\uc740 \ubc00\ub3c4\ub97c \uc81c\uc5b4 \ud560 \uc218 \uc788\uc9c0\ub9cc \uc99d\ucc29 \ud6a8\uc728\uc740 \ub0ae\uc2b5\ub2c8\ub2e4.<\/p>\n<p>TaC\uc758 \uc5f4\ud33d\ucc3d \uacc4\uc218(6.6 \u00d7 10<sup>-6<\/sup>K<sup>-1<\/sup>) \ud751\uc5f0, \ud0c4\uc18c \uc12c\uc720, C\/C \ubcf5\ud569\uc7ac\uc640 \uac19\uc740 \ud0c4\uc18c \uae30\ubc18 \uc18c\uc7ac\uc640 \ud2b9\uc815 \ucc28\uc774\uac00 \uc788\uc5b4 \ub2e8\uc0c1 TaC \ucf54\ud305\uc740 \uade0\uc5f4\uacfc \ubc15\ub9ac\uac00 \ubc1c\uc0dd\ud558\uae30 \uc27d\uc2b5\ub2c8\ub2e4. TaC \ucf54\ud305\uc758 \uc131\ub2a5\uc744 \ub354\uc6b1 \ud5a5\uc0c1\uc2dc\ud0a4\uae30 \uc704\ud574 \uc5f0\uad6c\uc790\ub4e4\uc740 \ubcf5\ud569 \ucf54\ud305 \uc2dc\uc2a4\ud15c, \uace0\uc6a9\uccb4 \uac15\ud654 \ucf54\ud305 \uc2dc\uc2a4\ud15c, \uadf8\ub77c\ub370\uc774\uc158 \ucf54\ud305 \uc2dc\uc2a4\ud15c\uacfc \uac19\uc740 \ucf54\ud305 \uc2dc\uc2a4\ud15c\uc744 \uac1c\ubc1c\ud588\uc2b5\ub2c8\ub2e4.<\/p>\n<h2>03 \uace0\uc628 \uc800\ud56d\uc740 \ub0b4\uc0b0\ud654 \uc800\ud56d\uacfc \uac19\uc9c0 \uc54a\uc2b5\ub2c8\ub2e4.<\/h2>\n<p>\ud0c4\ud0c8 \uce74\ubc14\uc774\ub4dc\uc640 \uac19\uc740 \ub9ce\uc740 \uc7ac\ub8cc\ub294 \ub179\ub294\uc810\uc774 \ub9e4\uc6b0 \ub192\uc9c0\ub9cc \uacf5\uae30 \uc911\uc5d0\uc11c \ube60\ub974\uac8c \uc0b0\ud654\ub429\ub2c8\ub2e4. \ud0c4\ud0c8\ub968 \ubc0f \ud0c4\ud0c8\ub968 \ud569\uae08\uc740 \uc6b0\uc218\ud55c \uace0\uc628 \uae30\uacc4\uc801 \ud2b9\uc131\uc744 \uac00\uc9c0\uace0 \uc788\uc9c0\ub9cc \uace0\uc628\uc5d0\uc11c\uc758 \ub0b4 \uc0b0\ud654\uc131\uc740 \uc88b\uc9c0 \uc54a\uc9c0\ub9cc \ud0c4\ud0c8\ub968 \uae08\uc18d\uc740 500 \u2103 \uc774\uc0c1\uc5d0\uc11c \uc0b0\ud654\uac00 \uac00\uc18d\ud654\ub418\uc5b4 Ta2O5\ub97c \uc0dd\uc131\ud569\ub2c8\ub2e4. \ud0c4\ud0c8\ub968 \ubc0f \ud0c4\ud0c8\ub968 \ud569\uae08\uc758 \uace0\uc628 \ud56d\uc0b0\ud654 \ubcf4\ud638\uc5d0\ub294 \u2460 \ud45c\uba74 \ucf54\ud305\uc758 \uace0\uc628 \ud56d\uc0b0\ud654 \ubcf4\ud638 \u2461 \ud569\uae08\uc758 \uace0\uc628 \ud56d\uc0b0\ud654 \ubcf4\ud638\uc758 \ub450 \uac00\uc9c0 \uc8fc\uc694 \ubc29\ubc95\uc774 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n<p data-pid=\"mstPzDHP\">\ud569\uae08 \ubc29\ubc95\uc740 \ud0c4\ud0c8\ub968 \ubc0f \ud0c4\ud0c8\ub968 \ud569\uae08\uc758 \ud56d\uc0b0\ud654 \ud2b9\uc131\uc744 \ud5a5\uc0c1\uc2dc\ud0ac \uc218 \uc788\uc9c0\ub9cc, \ub9e4\ud2b8\ub9ad\uc2a4\uc758 \ub2e4\ub978 \ud2b9\uc131, \ud2b9\ud788 \ub9e4\ud2b8\ub9ad\uc2a4\uc758 \uace0\uc628 \uae30\uacc4\uc801 \ud2b9\uc131\uc5d0 \ub354 \ud070 \uc601\ud5a5\uc744 \ubbf8\uce69\ub2c8\ub2e4.<\/p>\n<p data-pid=\"LwHqYvQJ\">\ud45c\uba74 \ucf54\ud305\uc740 \ub0ae\uc740 \uc0b0\uc18c \ud22c\uacfc\uc131, \uc6b0\uc218\ud55c \ud654\ud559\uc801 \ubc0f \ubb3c\ub9ac\uc801 \ud638\ud658\uc131 \ubc0f \uc548\uc815\uc131, \ub0ae\uc740 \ud718\ubc1c\uc131, \uc5f4\ud33d\ucc3d \uacc4\uc218 \ubc0f \uacb0\ud569 \ub2a5\ub825\uc758 \uc88b\uc740 \ub9e4\uce6d, \uace0\uc628 \uc790\uae30 \uce58\uc720 \ub2a5\ub825\uc758 \uc7a5\uc810\uc744 \ub3d9\uc2dc\uc5d0 \uac00\uc9c8 \uc218 \uc788\uc73c\uba70 \ud0c4\ud0c8\ub968 \ud569\uae08 \uae30\ud310\uc758 \uc6d0\ub798 \uc6b0\uc218\ud55c \uae30\uacc4\uc801 \ud2b9\uc131 \ub4f1\uc5d0 \uc601\ud5a5\uc744 \ubbf8\uce58\uc9c0 \uc54a\uc2b5\ub2c8\ub2e4. \ud0c4\ud0c8\ub968 \ud569\uae08\uc758 \uace0\uc628 \uae30\uacc4\uc801 \ud2b9\uc131 \ubc0f \ud56d\uc0b0\ud654 \ud2b9\uc131 \ubb38\uc81c\uc5d0 \ub300\ud55c \ucd5c\uc0c1\uc758 \uc194\ub8e8\uc158\uc785\ub2c8\ub2e4.<\/p>\n<ul>\n<li data-pid=\"wk0rLd15\">Ir, PL, Rh, HI \ub4f1\uacfc \uac19\uc740 \ub9ce\uc740 \uadc0\uae08\uc18d\uc740 \ub192\uc740 \uc735\uc810 \ud2b9\uc131\uc744 \uac00\uc9c0\uace0 \uc788\uc73c\uba70, \uadf8 \uc911 \uace0\uc628 \uc0b0\uc18c \ud22c\uacfc \uacc4\uc218\uc640 \uc0b0\uc18c \ud655\uc0b0 \uacc4\uc218\uac00 \ub0ae\uae30 \ub54c\ubb38\uc5d0 \ucd5c\ub300 2410 \u2103\uc758 \uae08\uc18d Ir\uc758 \uc735\uc810\uc740 \uace0\uc628 \ud56d\uc0b0\ud654 \uc131\ub2a5\uc774 \uc6b0\uc218\ud558\uc9c0\ub9cc \uace0\uc628 \ub300\uae30 \ud658\uacbd\uc5d0 \uc9c1\uc811 \ub178\ucd9c\ub418\ub294 \uae08\uc18d Ir\uc744 \ud53c\ud558\uae30 \uc704\ud574 \uc0b0\ud654\ubb3c\uc758 \uc99d\uae30\uc555\uc774 \ub354 \ub192\uc544 \uae08\uc18d Ir\uc758 \uc678\ubd80 \uce35\uc5d0 \ucf54\ud305\uc758 \ub2e4\ub978 \uc131\ubd84\uc744 \ucca8\uac00\ud574\uc57c \ud569\ub2c8\ub2e4.<\/li>\n<li data-pid=\"wk0rLd15\">\uace0\uc628 \uc0b0\ud654 \ubc29\uc9c0 \uc138\ub77c\ubbf9 \uc2e4\ub9ac\uc0ac\uc774\ub4dc \ucf54\ud305\uc740 \uc5f4 \uc548\uc815\uc131\uc774 \uc6b0\uc218(1200\u00b0C\uc5d0\uc11c \uc0b0\uc18c \ud655\uc0b0 \uacc4\uc218 10-\"g\/(cm's), 2200\u00b0C\uc5d0\uc11c \uc0b0\uc18c \ud655\uc0b0 \uacc4\uc218 10-1g\/(cm's))\ud558\uae30 \ub54c\ubb38\uc5d0 MoSi, SiN; \ubc0f SiC\uc640 \uac19\uc740 \uace0\uc628 \uc0b0\ud654 \ubc29\uc9c0 \uc138\ub77c\ubbf9 \uaddc\uc18c \ucf54\ud305\uc774 \uad00\uc2ec\uc744 \ubc1b\uace0 \uc788\uc2b5\ub2c8\ub2e4.)<\/li>\n<li data-pid=\"wk0rLd15\">\ubcf5\ud569 \ucf54\ud305\uc740 \uace0\uc628 \ub0b4\uc131 \uc138\ub77c\ubbf9 \ucf54\ud305\uacfc \uace0\uc628 \ub0b4\uc131 \uc720\ub9ac \ub610\ub294 \uace0\uc628 \uc0b0\ud654\ubb3c (\uc678\uce35)\uc744 \uace0\uc628 \ub0b4\uc131 \uc0b0\ud654 \ubc29\uc9c0 \ucf54\ud305\uacfc \ud568\uaed8 \uc0ac\uc6a9\ud558\uc5ec \uace0\uc628 \ud658\uacbd\uc5d0\uc11c \uc791\ub3d9 \ud560 \uc218\uc788\uc744\ubfd0\ub9cc \uc544\ub2c8\ub77c \ubbf8\uc138 \uade0\uc5f4 \uc790\uccb4 \uce58\uc720 \ub2a5\ub825\uc758 \ucf54\ud305 \ub2a5\ub825\uc744 \uac00\uc9c0\uace0 \uc788\uc2b5\ub2c8\ub2e4. \uc608: CVD-MoSi \ubc30\ub9ac\uc5b4 \uce35, Ir-Si \ud655\uc0b0 \uce35, SrZrO; (Al0;) \ubd80\uc2dd \ubc29\uc9c0 \uce35.<\/li>\n<\/ul>\n<p data-pid=\"2r56pWH1\">\uae30\ud0c0 \uc138\ubd80 \uc815\ubcf4: https:\/\/zhuanlan.zhihu.com\/p\/446428135<\/p>","protected":false},"excerpt":{"rendered":"<p>Ta-C\ub294 DLC \ub2e4\uc774\uc544\ubaac\ub4dc\uc640 \uc720\uc0ac\ud55c \ucf54\ud305\uc758 \uc77c\uc885\uc778 \uc21c\uc218 \ud0c4\uc18c \ud544\ub984\uc785\ub2c8\ub2e4. \uadf8\ub9ac\uace0 TaC\/TAC\ub294 \uae08\uc18d \uce74\ubc14\uc774\ub4dc\uc758 \uc77c\uc885\uc778 \ud0c4\ud0c8 \ud0c4\ud654\ubb3c\uc785\ub2c8\ub2e4. \uc774 \ub458\uc740 \uc644\uc804\ud788 \ub2e4\ub978 \uc18c\uc7ac\uc785\ub2c8\ub2e4. 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