{"id":1919,"date":"2021-12-02T14:27:09","date_gmt":"2021-12-02T06:27:09","guid":{"rendered":"https:\/\/www.naxau.cn\/?post_type=docs&#038;p=1919"},"modified":"2023-12-11T08:23:36","modified_gmt":"2023-12-11T00:23:36","password":"","slug":"pvd-\ucf54\ud305-\ub3c4\uae08\uc744-\uc704\ud55c-\uacf5\uc791\ubb3c\uc758-\uc694\uad6c-\uc0ac\ud56d\uc740-\ubb34\uc5c7\uc785\ub2c8\uae4c","status":"publish","type":"docs","link":"https:\/\/www.naxauam.com\/ko\/\ubb38\uc11c\/pvd-\ucf54\ud305-\ub3c4\uae08\uc744-\uc704\ud55c-\uacf5\uc791\ubb3c\uc758-\uc694\uad6c-\uc0ac\ud56d\uc740-\ubb34\uc5c7\uc785\ub2c8\uae4c\/","title":{"rendered":"2.2-PVD \ucf54\ud305\uc744 \uc704\ud55c \uacf5\uc791\ubb3c\uc758 \uc694\uad6c \uc0ac\ud56d\uc740 \ubb34\uc5c7\uc785\ub2c8\uae4c?"},"content":{"rendered":"<p>\ub098\ub178\uc625\uc2a4 PVD \ucf54\ud305 \uacf5\uc815\uc740 200\u00b0C-500\u00b0C\uc758 \uc9c4\uacf5 \ud658\uacbd\uc5d0\uc11c \uc9c4\ud589\ub418\ubbc0\ub85c \ucf54\ud305\ud560 \uacf5\uc791\ubb3c\uc5d0 \ub300\ud55c \ud2b9\uc815 \uc694\uad6c \uc0ac\ud56d\uc774 \uc788\uc2b5\ub2c8\ub2e4. \ucf54\ud305\ub41c \ubd80\ubd84\ubfd0\ub9cc \uc544\ub2c8\ub77c \uc804\uccb4 \uacf5\uc791\ubb3c\uc5d0 \ub300\ud574.<\/p>\n<h2>\ucf54\ud305 \uac00\ub2a5\ud55c \uacf5\uc791\ubb3c \uc7ac\ub8cc<\/h2>\n<p>\ub0b4\uc26c\ub294 \ucf54\ud305\ub41c<a href=\"\/docs\/\u57fa\u6750\u548c\u9776\u6750-substrate-target-material\/\" target=\"_blank\" rel=\"noopener\">\uae30\ud310<\/a>\ud569\ub9ac\uc801\uc778 \uacf5\uc815 \uc870\uac74\uc744 \uc81c\uacf5\ud558\uae30 \uc704\ud574 \uc7ac\ub8cc, \uacbd\ub3c4 \ubc0f \uc5f4\ucc98\ub9ac \ud15c\ud37c\ub9c1 \uc628\ub3c4\ub97c \uace0\ub824\ud569\ub2c8\ub2e4. \ub108\ubb34 \uc800\ub834\ud55c \uc7ac\ub8cc\ub098 \ub108\ubb34 \ubd80\ub4dc\ub7fd\uac70\ub098 \uace0\uc628\uc5d0\uc11c \ubd84\ud574\ub418\uac70\ub098 \ud615\ud0dc\uac00 \ubcc0\ud558\ub294 \uae30\uc9c8\uc740 PVD \ud558\ub4dc \ucf54\ud305\uc5d0 \uc801\ud569\ud558\uc9c0 \uc54a\uc2b5\ub2c8\ub2e4.<\/p>\n<p>\ucf54\ud305\ud560 \uc218 \uc788\ub294 \uc7ac\ub8cc:<\/p>\n<ol>\n<li>\uace0\ud569\uae08 \uacf5\uad6c\uac15, \uace0\uc18d\uac15, \uc2a4\ud14c\uc778\ub9ac\uc2a4\uac15<\/li>\n<li>\ucd08\uacbd\ud569\uae08<\/li>\n<li>\ud2f0\ud0c0\ub284<\/li>\n<li>\ub2c8\ucf08 \ud569\uae08<\/li>\n<\/ol>\n<ul>\n<li>\uacf5\uad6c\uac15\uc740 500\u00b0C\uc5d0\uc11c \ub450 \ubc88 \ud15c\ud37c\ub9c1\ud574\uc57c \ud558\uba70 \uacbd\ub3c4\ub97c \ucda9\uc871\ud560 \uc218 \uc788\ub294 \uacbd\ub3c4\ub97c \ubcf4\uc7a5\ud574\uc57c \ud569\ub2c8\ub2e4.<\/li>\n<li>\uacf5\uc791\ubb3c\uc758 \ud45c\uba74\uc740 \uc804\uae30 \uc804\ub3c4\uc131\uc774 \uc788\uc5b4\uc57c \ud569\ub2c8\ub2e4(Naxion\uc740 \ub2f9\ubd84\uac04 \ud50c\ub77c\uc2a4\ud2f1 \uae30\ud310 \ucf54\ud305\uacfc \uac19\uc740 \ube44\uae08\uc18d \ucf54\ud305\uc744 \ud558\uc9c0 \uc54a\uc2b5\ub2c8\ub2e4).<\/li>\n<\/ul>\n<h2>\ucf54\ud305 \uc601\uc5ed<\/h2>\n<p>PVD \ucf54\ud305\ud560 \ubd80\ud488\uc744 \uba85\ud655\ud558\uac8c \uc2dd\ubcc4\ud574 \uc8fc\uc138\uc694. \uc0c1\ub2e8 \uace0\uc815 \uc7a5\uce58\uac00 \ud544\uc694\ud55c \uacf5\uc791\ubb3c\uc758 \ubd80\ud488\uc774 \uc644\uc804\ud788 \ub3c4\uae08\ub420 \uac00\ub2a5\uc131\uc740 \uac70\uc758 \uc5c6\uc2b5\ub2c8\ub2e4. \ubd80\ubd84 \ub9c8\uc2a4\ud0b9\uc774 \ud544\uc694\ud55c \uacbd\uc6b0 \uc0ac\uc804\uc5d0 \ub0b4\uc26c\uc5d0 \uc54c\ub824\uc8fc\uc2dc\uae30 \ubc14\ub78d\ub2c8\ub2e4. \ub354 \ub098\uc740 \ucee4\ubc84\ub9c1 \ud6a8\uacfc\uac00 \ud544\uc694\ud55c \uacbd\uc6b0 \uc9c0\uadf8\ub97c \uc0ac\uc6a9\uc790 \uc9c0\uc815\ud574\uc57c \ud569\ub2c8\ub2e4.<\/p>\n<h2>\uacf5\uc791\ubb3c \ud45c\uba74 \uc81c\ud55c<\/h2>\n<p>\uae30\ud310\uc758 \ud45c\uba74\uc744 \uc5f0\ub9c8\ud574\uc57c \ud569\ub2c8\ub2e4. Ra\uff1c0.2\uac00 \uc801\ud569\ud569\ub2c8\ub2e4. \uc6b4\uc1a1\uc758 \uacbd\uc6b0 \ud2b9\ud788 \ubcc0\ud615\uc774 \uc26c\uc6b4 \uae08\ud615\uacfc \uac70\uc6b8 \uae08\ud615\uc758 \uacbd\uc6b0 \ud3ec\uc7a5 \ubb38\uc81c\uc5d0\uc8fc\uc758\ud558\uc2ed\uc2dc\uc624. Nasi\ub294 \uacf5\uc791\ubb3c\uc744 \ubcf4\ud638\ud558\uace0 \ubc30\uc1a1 \uc2dc\uac04\uc744 \ubcf4\uc7a5 \ud560 \uc218\uc788\ub294 \ud2b9\uc218 \ucc28\ub7c9 \ud53d\uc5c5 \uc11c\ube44\uc2a4\ub97c \uc81c\uacf5\ud569\ub2c8\ub2e4.<\/p>\n<p>\uacf5\uc791\ubb3c\uc740 \ucf54\ud305\uc5d0 \uc801\ud569\ud558\uc9c0 \uc54a\uc2b5\ub2c8\ub2e4:<\/p>\n<ul>\n<li>\uce7c\ub0a0\uc5d0 \ubc84\uac00 \uc5c6\uc74c<\/li>\n<li>\ub2c8\ucf08 \ub3c4\uae08, \uce68\ud0c4, \uc9c8\ud654(\ube44\ub098\ub178 \ub77c\uc774\uc628 \uacf5\uc815), \uc778\uc0b0\uc5fc \ucc98\ub9ac, \uc0b0\ud654 \ud751\ud654, TD \ub610\ub294 CVD\uc640 \uac19\uc740 \uae30\ud0c0 \ud45c\uba74 \uc218\uc815\uc774 \uc218\ud589\ub418\uc5c8\uc2b5\ub2c8\ub2e4.<\/li>\n<li>\uc6a9\uc811\ubb3c\uc758 \ud45c\uba74\uc740 \ucca0\uc800\ud788 \uccad\uc18c\ud574\uc57c \ud558\uba70 \uc0b0\ud654\ubb3c \uce35\uc774\ub098 \ub9e4\ubab0\ub41c \uad6c\uba4d\uc774 \uc5c6\uc5b4\uc57c \ud569\ub2c8\ub2e4.<\/li>\n<li>\ud398\uc778\ud2b8, \uc804\uae30 \uc601\ub3d9<\/li>\n<li>\ub179, \uc5bc\ub8e9<\/li>\n<li>\uc0b0\ud654\ubb3c \uce35<\/li>\n<li>\ud45c\uba74\uc774 \ub108\ubb34 \uac70\uce60\uace0 \ube14\ub77c\uc2a4\ud2b8 \ub9c8\uac10\uc774 \ub108\ubb34 \uac70\uce60\uba74 \uc811\ucc29 \uac15\ub3c4\uc5d0 \uc601\ud5a5\uc744 \uc904 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/li>\n<li>\uc5f0\ub9c8 \ubc0f \uc5f0\uc0ad \ud6c4 \uc794\uc5ec\ubb3c<\/li>\n<\/ul>\n<h2>\uae30\ud0c0 \uc8fc\uc758 \uc0ac\ud56d<\/h2>\n<ul>\n<li>\uac00\uacf5\ub41c \uacf5\uc791\ubb3c\uc740 \uc804\ucc98\ub9ac \ud6c4 \uc989\uc2dc \ubc29\uccad \uc624\uc77c\uc744 \ubfcc\ub9ac\uac70\ub098 \ubc29\uccad \uc885\uc774\ub85c \uac10\uc2f8\uc11c \ubcf4\uad00\ud574\uc57c \ud569\ub2c8\ub2e4.<\/li>\n<li>\ubc84\ub97c \ud53c\ud558\uc2ed\uc2dc\uc624. \uac00\ub2a5\ud558\uba74 R 0.1-0.2\ub85c \ubaa8\ub530\uae30\ud569\ub2c8\ub2e4.<\/li>\n<li>\uac78\uc774\uc5d0\uc11c \uc9c4\uacf5 \ucf54\ud305\uc744 \uc9c0\uc9c0\ud558\uae30 \uc704\ud574 \uc0dd\ud06c, \uad6c\uba4d, \ud0ed \ub4f1\uc744 \ub9cc\ub4dc\ub294 \uac83\uc744 \uace0\ub824\ud558\uc138\uc694.<\/li>\n<li>\ubcf4\uc5b4 \ucf54\ud305\uc758 \uacbd\uc6b0<a href=\"\/docs\/pvd\u7684\u5b54\u5f84\u6bd4-aspect-ratio\/\" target=\"_blank\" rel=\"noopener\">\uc870\ub9ac\uac1c \ube44\uc728(\uc885\ud6a1\ube44)<\/a>1:1 \ubbf8\ub9cc<\/li>\n<li>\uc870\ub9bd\ub41c \ud0a4\ud2b8\uac00 \ub420 \uc218 \uc5c6\uc73c\uba70, \uac1c\ubcc4\uc801\uc73c\ub85c \ubd84\ud574\ud55c \ub2e4\uc74c PVD \ucf54\ud305\ud574\uc57c \ud569\ub2c8\ub2e4.<\/li>\n<li>\uc6b4\uc1a1 \ud3ec\uc7a5 \ubb38\uc81c, \ud2b9\ud788 \ubcc0\ud615, \uac00\uc7a5\uc790\ub9ac, \ub179 \ubc29\uc9c0 \ub4f1\uc744 \uace0\ub824\ud574 \uc8fc\uc138\uc694.<\/li>\n<\/ul>\n<p>&nbsp;<\/p>\n<p>&nbsp;<\/p>\n<p>&nbsp;<\/p>","protected":false},"excerpt":{"rendered":"<p>\ub098\ub178\uc625\uc2a4 PVD \ucf54\ud305 \uacf5\uc815\uc740 200\u00b0C-500\u00b0C\uc758 \uc9c4\uacf5 \ud658\uacbd\uc5d0\uc11c \uc9c4\ud589\ub418\ubbc0\ub85c \ucf54\ud305\ud560 \uacf5\uc791\ubb3c\uc5d0 \ub300\ud55c \ud2b9\uc815 \uc694\uad6c \uc0ac\ud56d\uc774 \uc788\uc2b5\ub2c8\ub2e4. \ucf54\ud305\ub41c \ubd80\ubd84\ubfd0\ub9cc \uc544\ub2c8\ub77c \uc804\uccb4 \uacf5\uc791\ubb3c\uc5d0 \ub300\ud574.<\/p>","protected":false},"author":1,"featured_media":1569,"comment_status":"open","ping_status":"closed","template":"","meta":{"themepark_post_bcolor":"#f5f5f5","themepark_post_width":"1022px","themepark_post_img":"","themepark_post_img_po":"left","themepark_post_img_re":false,"themepark_post_img_cover":false,"themepark_post_img_fixed":false,"themepark_post_hide_title":false,"themepark_post_main_b":"","themepark_post_main_p":100,"themepark_paddingblock":false,"footnotes":""},"doc_category":[179],"doc_tag":[146,180,142],"class_list":["post-1919","docs","type-docs","status-publish","has-post-thumbnail","hentry","doc_category-pvd-faq","doc_tag-pvd","doc_tag-180","doc_tag-142"],"year_month":"2026-06","word_count":13,"total_views":0,"reactions":{"happy":0,"normal":0,"sad":0},"author_info":{"name":"\uc77c\uc885\uc758 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