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<\/p>\n<\/p>\n
1.\u5de5\u5177\u5bff\u547d\u306b\u5f71\u97ff\u3092\u4e0e\u3048\u308b\u8981\u56e0<\/strong> 2.\u7740\u7528\u57fa\u6e96<\/strong> 3.\u904e\u5ea6\u306e\u78e8\u8017\u3068\u640d\u50b7\u306e\u5146\u5019<\/strong> 4.\u30b3\u30f3\u30ed\u306e\u6545\u969c\u30e2\u30fc\u30c9\u306e\u6a21\u5f0f\u56f3<\/strong><\/p>\n \u5929\u5730\u3068\u5074\u7e01\u306b\u64e6\u308c\u3042\u308a \u7570\u5e38\u6469\u8017<\/strong><\/p>\n \u6b6f\u306e\u7834\u6298 4.1 \u30c8\u30c3\u30d7\u3068\u30b5\u30a4\u30c9\u30a8\u30c3\u30b8\u306e\u5883\u754c\u6469\u8017\uff08\u901a\u5e38\u306e\u6469\u8017\uff09<\/strong><\/p>\n \u5de5\u5177\u640d\u50b7\u30d1\u30bf\u30fc\u30f3<\/strong><\/p><\/blockquote>\n \u30b5\u30a4\u30c9\u30fb\u30a6\u30a7\u30a2\u306e\u4e00\u7a2ePVD\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0<\/strong>\u4e0b\u5730\u3082\u6469\u8017\u3059\u308b\u3002\u3055\u307e\u3056\u307e\u306a\u7528\u9014\u3067\u306f\u3001\u901a\u5e38\u306e\u6469\u8017\u91cf\u3092\u8a31\u5bb9\u3059\u308b\u3002<\/p>\n \u8003\u3048\u3089\u308c\u308b\u539f\u56e0<\/strong><\/p><\/blockquote>\n \u539f\u56e01<\/strong>\u901a\u5e38\u306e\u6d88\u8017\u306f\u8d77\u3053\u308b\u3082\u306e\u3067\u3001\u8010\u7528\u5e74\u6570\u304c\u8a2d\u5b9a\u3055\u308c\u305f\u76ee\u6a19\u306b\u9054\u3057\u3066\u3044\u308b\u304b\u3069\u3046\u304b\u304c\u554f\u984c\u306a\u3093\u3060\u3002<\/p>\n \u539f\u56e02<\/strong>\u5de5\u5177\u6750\u6599\u306e\u9069\u6b63\u3001PVD\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u306e\u8010\u6469\u8017\u6027\u3002<\/p>\n \u539f\u56e03<\/strong>PVD\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u306e\u524d\u306b\u3001\u5de5\u5177\u306e\u518d\u7814\u78e8\u3067\u751f\u3058\u305f\u30d0\u30ea\u304c\u5341\u5206\u306b\u9664\u53bb\u3055\u308c\u3066\u3044\u306a\u3044\u3002<\/p>\n \u53ef\u80fd\u306a\u89e3\u6c7a\u7b56<\/strong><\/p><\/blockquote>\n 4.2 \u30af\u30ec\u30bb\u30f3\u30c8\u30fb\u30d4\u30c3\u30c8\u306e\u6469\u8017<\/strong> \u5de5\u5177\u640d\u50b7\u30d1\u30bf\u30fc\u30f3<\/strong><\/p><\/blockquote>\n \u30a8\u30c3\u30b8\u306e\u8fd1\u304f\u306b\u904e\u5927\u306a\u4e09\u65e5\u6708\u72b6\u306e\u7aaa\u307f\u304c\u3042\u308b\u3068\u3001\u30a8\u30c3\u30b8\u304c\u5272\u308c\u3084\u3059\u304f\u306a\u3063\u305f\u308a\u3001\u30ef\u30fc\u30af\u306e\u8868\u9762\u54c1\u8cea\u304c\u60aa\u304f\u306a\u3063\u305f\u308a\u3059\u308b\u3002<\/p>\n \u8003\u3048\u3089\u308c\u308b\u539f\u56e0<\/strong><\/p><\/blockquote>\n \u539f\u56e01<\/strong>\u904e\u5ea6\u306e\u5207\u524a\u5727\u529b\u3001\u9ad8\u6e29\u3001\u30d5\u30ed\u30f3\u30c8\u30a8\u30c3\u30b8\u306e\u8150\u98df\u3001\u9ad8\u3044\u5207\u308a\u304f\u305a\u539a\u3055<\/p>\n \u539f\u56e02<\/strong>\u5de5\u5177\u6750\u6599\u3001PVD\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u3001\u9ad8\u6e29\u8010\u6027\u306e\u4e0d\u9069\u5207\u306a\u9078\u629e<\/p>\n \u53ef\u80fd\u306a\u89e3\u6c7a\u7b56<\/strong><\/p><\/blockquote>\n \u30aa\u30d7\u30b7\u30e7\u30f31<\/strong>\u30b9\u30d4\u30fc\u30c9\u3068\u6e29\u5ea6\u3092\u4e0b\u3052\u308b<\/p>\n \u30aa\u30d7\u30b7\u30e7\u30f32<\/strong>\u5207\u308a\u5c51\u306e\u539a\u3055\u3092\u6700\u5c0f\u306b\u3059\u308b\u305f\u3081\u306b\u9001\u308a\u3092\u6e1b\u3089\u3059<\/p>\n \u30d7\u30ed\u30b0\u30e9\u30e0III<\/strong>\u30d5\u30ed\u30f3\u30c8\u30d5\u30a7\u30fc\u30b9\u306b\u30dd\u30b8\u30c6\u30a3\u30d6\u306a\u3059\u304f\u3044\u89d2<\/p>\n \u30aa\u30d7\u30b7\u30e7\u30f3 IV<\/strong>\u3088\u308a\u8010\u71b1\u6027\u306e\u9ad8\u3044\u5de5\u5177\u57fa\u6750\u3068\u3001\u3088\u308a\u8010\u71b1\u6027\u306e\u9ad8\u3044PVD\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\uff08ALTiN\u3001CrAlN\u306a\u3069\uff09\u306e\u4f7f\u7528\u3002<\/p>\n 4.2.1 \u5f8c\u7aef\u9762\u306e\u6e9d\u4ed8\u304d\u6469\u8017<\/strong> \u5de5\u5177\u640d\u50b7\u30d1\u30bf\u30fc\u30f3<\/strong><\/p><\/blockquote>\n \u30ea\u30a2\u30d6\u30ec\u30fc\u30c9\u306e\u8868\u9762\u306b\u91cd\u5ea6\u306e\u3072\u305a\u307f\u304c\u3042\u308a\u3001\u901a\u5e38\u30011\u5c64\u307e\u305f\u306f2\u5c64\u306e\u8907\u5408\u6750\u304c\u5265\u304c\u308c\u3066\u3044\u308b\u3002<\/p>\n \u8003\u3048\u3089\u308c\u308b\u539f\u56e0<\/strong><\/p><\/blockquote>\n \u539f\u56e01<\/strong>\u5de5\u5177\u5bff\u547d\u3092\u8d85\u3048\u308b\u9577\u6642\u9593\u306e\u5207\u524a\u3084\u3001\u52a0\u5de5\u3092\u7d9a\u884c\u3059\u308b\u306e\u306b\u5341\u5206\u306a\u6642\u9593\u5185\u306b\u691c\u51fa\u3055\u308c\u306a\u3044\u30c1\u30c3\u30d4\u30f3\u30b0\uff1f<\/p>\n \u539f\u56e02<\/strong>\u30c1\u30c3\u30d7\u30d5\u30a9\u30fc\u30de\u30fc\u306b\u6e9c\u307e\u3063\u305f\u5207\u308a\u5c51\u304c\u6392\u51fa\u3055\u308c\u306a\u3044\u3053\u3068\u304c\u539f\u56e0\u304b\uff1f<\/p>\n \u539f\u56e03<\/strong>\u6700\u5f8c\u306e\u6469\u8017\u3092\u5b8c\u5168\u306b\u4fee\u5fa9\u3059\u308b\u3053\u3068\u306a\u304f\u3001\u5de5\u5177\u3092\u518d\u7814\u78e8\u3059\u308b\u3053\u3068\uff1f<\/p>\n \u7406\u75314<\/strong>\u30ef\u30fc\u30af\u304c\u30af\u30e9\u30f3\u30d7\u3055\u308c\u3066\u3044\u306a\u3044<\/p>\n \u53ef\u80fd\u306a\u89e3\u6c7a\u7b56<\/strong><\/p><\/blockquote>\n \u30aa\u30d7\u30b7\u30e7\u30f31<\/strong>\u6539\u3056\u3093\u3092\u5897\u3084\u3059<\/p>\n \u30aa\u30d7\u30b7\u30e7\u30f32<\/strong>\u5de5\u5177\u6539\u3056\u3093\u56de\u6570\u306e\u524a\u6e1b<\/p>\n \u30d7\u30ed\u30b0\u30e9\u30e0III<\/strong>\u30c1\u30c3\u30d4\u30f3\u30b0<\/p>\n \u30aa\u30d7\u30b7\u30e7\u30f3 IV<\/strong>\u5207\u524a\u52a0\u5de5<\/p>\n \u30d7\u30ed\u30b0\u30e9\u30e0V<\/strong>\u30db\u30d6\u306e\u518d\u7814\u78e8\u91cf\u306e\u8a55\u4fa1<\/p>\n \u30aa\u30d7\u30b7\u30e7\u30f36<\/strong>\u30ef\u30fc\u30af\u628a\u6301\u529b\u306e\u5411\u4e0a<\/p>\n 4.3 \u30c1\u30c3\u30d4\u30f3\u30b0<\/strong><\/p>\n \u5de5\u5177\u640d\u50b7\u30d1\u30bf\u30fc\u30f3<\/strong><\/p><\/blockquote>\n \u5203\u5148\u306e\u5c0f\uff5e\u4e2d\u7a0b\u5ea6\u306e\u6b20\u3051<\/p>\n \u8003\u3048\u3089\u308c\u308b\u539f\u56e0<\/strong><\/p><\/blockquote>\n \u539f\u56e01<\/strong>\u5de5\u5177\u6750\u6599\u304c\u786c\u3059\u304e\u3066\u8106\u3044<\/p>\n \u539f\u56e02<\/strong>\u88ab\u524a\u6750\u304c\u786c\u3059\u304e\u308b<\/p>\n \u539f\u56e03<\/strong>\u525b\u6027\u4e0d\u8db3\u3068\u5207\u524a\u6642\u306e\u632f\u52d5<\/p>\n \u30aa\u30d7\u30b7\u30e7\u30f31<\/strong>\u3088\u308a\u5f37\u5ea6\u306e\u9ad8\u3044\u5de5\u5177\u6750\u6599\u306e\u9078\u629e<\/p>\n \u30aa\u30d7\u30b7\u30e7\u30f32<\/strong>\u5de5\u5177\u518d\u7814\u78e8\u5f8c\u3001\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u524d\u306e\u920d\u3044\u5207\u308c\u5203<\/p>\n \u30d7\u30ed\u30b0\u30e9\u30e0III<\/strong>\u71b1\u51e6\u7406\u6642\u306e\u5de5\u5177\u5f37\u5ea6\u306e\u5411\u4e0a<\/p>\n \u30aa\u30d7\u30b7\u30e7\u30f3 IV<\/strong>\u9001\u308a\u3092\u6e1b\u3089\u3057\u3066\u5207\u308a\u5c51\u306e\u539a\u307f\u3092\u6e1b\u3089\u3059<\/p>\n \u30d7\u30ed\u30b0\u30e9\u30e0V<\/strong>\u5de5\u5177\u306e\u691c\u67fb\u3001\u56fa\u5b9a\u30d6\u30e9\u30b1\u30c3\u30c8\u306e\u8ffd\u52a0<\/p>\n 4.4 \u6298\u308c\u305f\u30a8\u30c3\u30b8\u3001\u6298\u308c\u305f\u6b6f<\/strong><\/p>\n \u5de5\u5177\u640d\u50b7\u30d1\u30bf\u30fc\u30f3<\/strong><\/p><\/blockquote>\n \u30a8\u30c3\u30b8\u304c\u5927\u304d\u304f\u6b20\u3051\u3066\u3044\u305f\u308a\u3001\u6b6f\u5168\u4f53\u304c\u6298\u308c\u3066\u3044\u305f\u308a\u3059\u308b\u3002<\/p>\n \u8003\u3048\u3089\u308c\u308b\u539f\u56e0<\/strong><\/p><\/blockquote>\n \u539f\u56e01<\/strong>\u904e\u5ea6\u306e\u885d\u6483\u8377\u91cd \u53ef\u80fd\u306a\u89e3\u6c7a\u7b56<\/strong><\/p><\/blockquote>\n \u30aa\u30d7\u30b7\u30e7\u30f31<\/strong>\u901f\u5ea6\u3092\u4e0b\u3052\u3066\u6e29\u5ea6\u3092\u4e0b\u3052\u3001\u9001\u308a\u901f\u5ea6\u3092\u4e0b\u3052\u3066\u5207\u308a\u5c51\u306e\u539a\u3055\u3092\u6e1b\u3089\u3059\u3002 4.5 \u30c1\u30c3\u30d7\u30d5\u30a9\u30fc\u30de\u30fc\u3067\u306e\u5207\u308a\u5c51\u306e\u5806\u7a4d<\/strong><\/p>\n \u5de5\u5177\u640d\u50b7\u30d1\u30bf\u30fc\u30f3<\/strong><\/p><\/blockquote>\n \u30ef\u30fc\u30af\u304b\u3089\u306e\u5207\u308a\u5c51\u304c\u84c4\u7a4d\u3057\u3001\u30c1\u30c3\u30d7\u30d5\u30a9\u30fc\u30de\u30fc\u306b\u8a70\u307e\u308a\u3001\u6b6f\u306e\u524d\u7aef\u3084\u5f8c\u7aef\u306b\u4ed8\u7740\u3059\u308b\u3002<\/p>\n \u8003\u3048\u3089\u308c\u308b\u539f\u56e0<\/strong><\/p><\/blockquote>\n \u539f\u56e01<\/strong>\u30c1\u30c3\u30d7\u30d5\u30a9\u30fc\u30de\u30fc\u306e\u30b5\u30a4\u30ba\u4e0d\u8db3 \u53ef\u80fd\u306a\u89e3\u6c7a\u7b56<\/strong><\/p><\/blockquote>\n \u30aa\u30d7\u30b7\u30e7\u30f31<\/strong>\u30c1\u30c3\u30d7\u30d5\u30a9\u30fc\u30de\u30fc\u306e\u80cc\u9762\u3092\u7814\u78e8\u3057\u3001\u30c1\u30c3\u30d7\u30d5\u30a9\u30fc\u30de\u30fc\u306e\u30b5\u30a4\u30ba\u3092\u5927\u304d\u304f\u3057\u305f\u308a\u3001\u8868\u9762\u7c97\u3055\u3092\u6539\u5584\u3059\u308b\u3002 \u88ab\u524a\u6750\u304c\u5de5\u5177\u306e\u5207\u308c\u5203\u306b\u4ed8\u7740\u3057\u3066\u51b7\u9593\u6eb6\u63a5\u3055\u308c\u3001\u65b0\u305f\u306a\u5207\u308c\u5203\u304c\u5f62\u6210\u3055\u308c\u3001\u65b0\u305f\u306a\u5207\u308c\u5203\u306e\u51f9\u51f8\u304c\u88ab\u524a\u6750\u306e\u8868\u9762\u54c1\u8cea\u3092\u4f4e\u4e0b\u3055\u305b\u308b\u3002<\/p>\n \u5207\u5c51\u3092\u84c4\u7a4d\u3057\u305f\u816b\u760d\u304c\u30b9\u30dd\u30fc\u30eb\u30aa\u30d5\u3059\u308b\u969b\u306b\u3001\u5de5\u5177\u5203\u5148\u304c\u30c1\u30c3\u30d4\u30f3\u30b0\u3059\u308b\u5371\u967a\u6027\u304c\u3042\u308b\u3002<\/p>\n 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\n\u30d7\u30ed\u30b0\u30e9\u30e0III<\/strong>\u8010\u885d\u6483\u6027\u306b\u512a\u308c\u305f\u5de5\u5177\u6750\u6599\u306e\u4f7f\u7528
\n\u30aa\u30d7\u30b7\u30e7\u30f3 IV<\/strong>\u518d\u7814\u78e8\u30d7\u30ed\u30bb\u30b9\u5236\u5fa1\u306e\u5f37\u5316
\n\u30d7\u30ed\u30b0\u30e9\u30e0V<\/strong>\u7d99\u304e\u76ee\u306e\u5fdc\u529b\u96c6\u4e2d\u7b87\u6240\u3078\u306e\u4e38\u307f\u3092\u5e2f\u3073\u305f\u79fb\u884c\u90e8<\/p>\n<\/p>\n
\n\u539f\u56e02<\/strong>\u5207\u7c89\u3067\u8a70\u307e\u3063\u305f\u53f0\u5f62\u30c1\u30c3\u30d7\u30d5\u30a9\u30fc\u30de\u30fc
\n\u539f\u56e03<\/strong>\u30c1\u30c3\u30d7\u30d5\u30a9\u30fc\u30de\u30fc\u306e\u8868\u3068\u88cf\u306e\u8868\u9762\u54c1\u8cea\u304c\u60aa\u3044\u3002
\n\u7406\u75314<\/strong>\u30af\u30fc\u30e9\u30f3\u30c8\u307e\u305f\u306f\u7a7a\u51b7\u30a8\u30a2\u306e\u6d41\u91cf\u4e0d\u8db3
\n\u539f\u56e05<\/strong>\u5207\u7c89\u306e\u6392\u51fa\u91cf\u304c\u30c1\u30c3\u30d7\u30b3\u30f3\u30d9\u30e4\u306e\u80fd\u529b\u3092\u8d85\u3048\u3066\u3044\u308b\u3002<\/p>\n
\n\u30aa\u30d7\u30b7\u30e7\u30f32<\/strong>\u30c1\u30c3\u30d7\u30d5\u30a9\u30fc\u30de\u30fc\u306e\u53f0\u5f62\u90e8\u5206\u3092\u4e38\u307f\u3092\u5e2f\u3073\u305f\u5186\u5f27\u306b\u5909\u5316\u3055\u305b\u308b\u3002
\n\u30d7\u30ed\u30b0\u30e9\u30e0III<\/strong>\u30af\u30fc\u30e9\u30f3\u30c8\u30ce\u30ba\u30eb\u3084\u30a8\u30a2\u30ce\u30ba\u30eb\u306e\u4f4d\u7f6e\u3084\u6d41\u91cf\u306e\u8abf\u6574
\n\u30aa\u30d7\u30b7\u30e7\u30f3 IV<\/strong>\u5207\u524a\u6642\u9593\u3092\u9577\u304f\u3059\u308b\u305f\u3081\u306b\u9001\u308a\u901f\u5ea6\u3092\u4e0b\u3052\u308b
\n4.6 \u30a8\u30c3\u30b8\u306e\u30c1\u30c3\u30d7\u816b\u760d<\/strong><\/p>\n<\/p>\n
\n
\n\u539f\u56e02<\/strong>\u30c4\u30fc\u30eb\u30d0\u30c3\u30af\u89d2\u4e0d\u8db3
\n\u539f\u56e03<\/strong>\u30af\u30fc\u30e9\u30f3\u30c8\u306e\u6d41\u91cf\u4e0d\u8db3\u307e\u305f\u306f\u7a2e\u985e\u9055\u3044<\/p>\n
\n\u30aa\u30d7\u30b7\u30e7\u30f32<\/strong>\u5de5\u5177\u8868\u9762\u306e\u6469\u64e6\u4fc2\u6570\u4f4e\u6e1b\u306e\u305f\u3081\u306ePVD\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u306e\u4f7f\u7528
\n\u30d7\u30ed\u30b0\u30e9\u30e0III<\/strong>\u88ab\u524a\u6750\u306e\u786c\u5ea6\u3092\u4e0a\u3052\u308b\u305f\u3081\u306b\u3001\u88ab\u524a\u6750\u306e\u6750\u8cea\u3092\u5909\u66f4\u3057\u305f\u308a\u3001\u713c\u304d\u306a\u307e\u3057\u3092\u884c\u3046\u3002
\n\u30aa\u30d7\u30b7\u30e7\u30f3 IV<\/strong>\u30ea\u30a2\u30b3\u30fc\u30ca\u30fc\u306e\u5897\u52a0\u3001\u30c0\u30a4\u30ca\u30df\u30c3\u30af\u306a\u30ea\u30a2\u30b3\u30fc\u30ca\u30fc\u306e\u8a55\u4fa1
\n\u30d7\u30ed\u30b0\u30e9\u30e0V<\/strong>\u30d5\u30ed\u30f3\u30c8\u30d6\u30ec\u30fc\u30c9\u306e\u30b3\u30fc\u30ca\u30fc\u89d2\u5ea6\u3092\u5927\u304d\u304f\u3059\u308b\u3002
\n\u30aa\u30d7\u30b7\u30e7\u30f36<\/strong>\u3079\u305f\u3064\u304d\u9632\u6b62\u30af\u30fc\u30e9\u30f3\u30c8\u306e\u4f7f\u7528<\/p>","protected":false},"excerpt":{"rendered":"