{"id":657,"date":"2018-11-28T16:43:34","date_gmt":"2018-11-28T08:43:34","guid":{"rendered":"http:\/\/localhost\/theme20\/?p=657"},"modified":"2023-12-12T09:31:52","modified_gmt":"2023-12-12T01:31:52","slug":"hppms\u9ad8\u51fa\u529b\u30d1\u30eb\u30b9\u30de\u30b0\u30cd\u30c8\u30ed\u30f3\u30b9\u30d1\u30c3\u30bf\u30ea\u30f3\u30b0","status":"publish","type":"post","link":"https:\/\/www.naxauam.com\/ja\/hppms\u9ad8\u51fa\u529b\u30d1\u30eb\u30b9\u30de\u30b0\u30cd\u30c8\u30ed\u30f3\u30b9\u30d1\u30c3\u30bf\u30ea\u30f3\u30b0\/","title":{"rendered":"HPPMS \u9ad8\u51fa\u529b\u30d1\u30eb\u30b9\u30de\u30b0\u30cd\u30c8\u30ed\u30f3\u30b9\u30d1\u30c3\u30bf\u30ea\u30f3\u30b0 PVD\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u6280\u8853"},"content":{"rendered":"<p>\u30cf\u30a4\u30d1\u30ef\u30fc\u30d1\u30eb\u30b9\u30de\u30b0\u30cd\u30c8\u30ed\u30f3\u30b9\u30d1\u30c3\u30bf\u30ea\u30f3\u30b0(HPPMS)\u306f\u3001\u30cf\u30a4\u30d1\u30ef\u30fc\u30d1\u30eb\u30b9\u30de\u30b0\u30cd\u30c8\u30ed\u30f3\u30b9\u30d1\u30c3\u30bf\u30ea\u30f3\u30b0(HIPIMS)\u3068\u3082\u547c\u3070\u308c\u3001\u30de\u30b0\u30cd\u30c8\u30ed\u30f3\u30b9\u30d1\u30c3\u30bf\u30ea\u30f3\u30b0\u30c7\u30dd\u30b8\u30b7\u30e7\u30f3\u306b\u57fa\u3065\u304fPVD\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u6280\u8853\u3067\u3059\u3002 <sup>2<\/sup>\u6841\u306e\u975e\u5e38\u306b\u9ad8\u3044\u51fa\u529b\u5bc6\u5ea6\u306f\u300110\uff05\u672a\u6e80\u306e\u4f4e\u3044\u30c7\u30e5\u30fc\u30c6\u30a3\u30b5\u30a4\u30af\u30eb\uff08\u30aa\u30f3\uff0f\u30aa\u30d5\u6642\u9593\u6bd4\uff09\u3067\u6570\u5341\u30de\u30a4\u30af\u30ed\u79d2\u306e\u77ed\u3044\u30d1\u30eb\u30b9\uff08\u30d1\u30eb\u30b9\uff09\u3067\u6e2c\u5b9a\u3055\u308c\u308b\u3002HPPMS\u306e\u969b\u7acb\u3063\u305f\u7279\u5fb4\u306f\u3001\u30b9\u30d1\u30c3\u30bf\u3055\u308c\u305f\u91d1\u5c5e\u306e\u30a4\u30aa\u30f3\u5316\u5ea6\u304c\u9ad8\u3044\u3053\u3068\u3068\u3001\u5206\u5b50\u30ac\u30b9\u306e\u89e3\u96e2\u7387\u304c\u9ad8\u3044\u3053\u3068\u3067\u3042\u308a\u3001\u305d\u306e\u7d50\u679c\u3001\u5806\u7a4d\u819c\u306e\u5bc6\u5ea6\u304c\u9ad8\u304f\u306a\u308b\u3002\u30a4\u30aa\u30f3\u5316\u3068\u89e3\u96e2\u306e\u5ea6\u5408\u3044\u306f\u3001\u30ab\u30bd\u30fc\u30c9\u51fa\u529b\u306e\u30d4\u30fc\u30af\u306b\u5f93\u3063\u3066\u5897\u52a0\u3059\u308b\u3002\u3053\u306e\u9650\u754c\u306f\u3001\u30b0\u30ed\u30fc\u304b\u3089\u30a2\u30fc\u30af\u76f8\u3078\u306e\u653e\u96fb\u306e\u9077\u79fb\u306b\u3088\u3063\u3066\u6c7a\u5b9a\u3055\u308c\u308b\u3002\u30d4\u30fc\u30af\u30d1\u30ef\u30fc\u3068\u30c7\u30e5\u30fc\u30c6\u30a3\u30b5\u30a4\u30af\u30eb\u306f\u3001\u5f93\u6765\u306e\u30b9\u30d1\u30c3\u30bf\u30ea\u30f3\u30b0\u3068\u540c\u69d8\u306e\u5e73\u5747\u30ab\u30bd\u30fc\u30c9\u30d1\u30ef\u30fc\uff081\uff5e10W\/cm\uff09\u3092\u7dad\u6301\u3059\u308b\u3088\u3046\u306b\u9078\u629e\u3055\u308c\u305f\u3002<\/p>\n<p>HPPMS\u306e\u4f7f\u7528\u76ee\u7684<\/p>\n<ul>\n<li>\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u6210\u819c\u524d\u306e\u5bc6\u7740\u6027\u5411\u4e0a\u306e\u305f\u3081\u306e\u57fa\u677f\u306e\u524d\u51e6\u7406\uff08\u57fa\u677f\u30a8\u30c3\u30c1\u30f3\u30b0\uff09<\/li>\n<li>\u5fae\u7d30\u69cb\u9020\u5bc6\u5ea6\u306e\u9ad8\u3044\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u306e\u6210\u819c<\/li>\n<\/ul>\n<p>HPPMS\u306f\u3001\u975e\u5e38\u306b\u77ed\u3044\u6642\u9593\uff08\u901a\u5e38\uff5e100\u03bcs\uff09\u306b\u308f\u305f\u3063\u3066\u30ab\u30bd\u30fc\u30c9\u306b\u4f9b\u7d66\u3055\u308c\u308b\u5927\u304d\u306a\u30a8\u30cd\u30eb\u30ae\u30fc\u30d1\u30eb\u30b9\u3092\u4f7f\u7528\u3059\u308b\u3002HPPMS\u30d7\u30ed\u30bb\u30b9\u306f\u3001\u5927\u304d\u306a\u4f4e\u30a8\u30cd\u30eb\u30ae\u30fc\u30a4\u30aa\u30f3\u675f\u3092\u57fa\u677f\u306b\u4f9b\u7d66\u3059\u308b\u3002\u96fb\u6e90\u306f\u3001\u30d1\u30eb\u30b9\u5e45100\uff5e150\u03bcs\u3067\u3001\u6700\u59273MW\/\u30d1\u30eb\u30b9\u306e\u30d4\u30fc\u30af\u96fb\u529b\u3092\u751f\u6210\u3057\u306a\u3051\u308c\u3070\u306a\u3089\u306a\u3044\u3002\u5e73\u5747\u51fa\u529b\u306f\u3001500 Hz\u307e\u3067\u306e\u5468\u6ce2\u6570\u3067\u7d0420 kW\u3067\u3042\u308b\u3002\u30d1\u30eb\u30b9\u96fb\u529b\u3092\u4f9b\u7d66\u3059\u308b\u3053\u3068\u306b\u52a0\u3048\u3066\u3001\u30a2\u30fc\u30af\u6291\u5236\u3092\u884c\u3046\u5fc5\u8981\u304c\u3042\u308b\u3002\u3053\u306e\u30d7\u30ed\u30bb\u30b9\u306f\u3001\u9ad8\u30a8\u30cd\u30eb\u30ae\u30fc\u30fb\u30d1\u30eb\u30b9\u306b\u3088\u3063\u3066\u751f\u6210\u3055\u308c\u308b\u5f37\u5316\u3055\u308c\u305f\u30a4\u30aa\u30f3\u5316\u3092\u5229\u7528\u3059\u308b\u3002\u30bf\u30fc\u30b2\u30c3\u30c8\u306b\u5370\u52a0\u3055\u308c\u308b\u30d1\u30ef\u30fc\u5bc6\u5ea6\u306f\u7d041\uff5e3kW\/cm\u3067\u3042\u308b\u3002\u00a0<sup>2<\/sup>(\u30d1\u30ef\u30fc\u5bc6\u5ea6\u306f\u7d041\uff5e10W\/cm\uff09\u3002\u00a0<sup>2's<\/sup>(\u5f93\u6765\u306e\u30de\u30b0\u30cd\u30c8\u30ed\u30f3\u30b9\u30d1\u30c3\u30bf\u30ea\u30f3\u30b0\u3068\u6bd4\u8f03\u3057\u3066\uff09[2]\u3002<\/p>\n<p>\u30a4\u30aa\u30f3\u5316\u304c\u4fc3\u9032\u3055\u308c\u308b\u305f\u3081\u3001HPPMS\u306f\u7d50\u6676\u819c\u306e\u6210\u9577\u3060\u3051\u3067\u306a\u304f\u3001\u305d\u306e\u76f8\u7d44\u6210\u306e\u5236\u5fa1\u306b\u3082\u4f7f\u7528\u3067\u304d\u308b[3]\u3002\u6210\u819c\u6761\u4ef6\u3082\u540c\u69d8\u306b\u91cd\u8981\u3067\u3042\u308b\u304c\u3001\u96fb\u6e90\u306e\u30c7\u30e5\u30fc\u30c6\u30a3\u30fb\u30b5\u30a4\u30af\u30eb\u3068\u30d7\u30e9\u30ba\u30de\u30fb\u30d1\u30e9\u30e1\u30fc\u30bf\u30fc\u304c\u7d50\u6676\u69cb\u9020\u306e\u5f62\u6210\u306b\u5bc4\u4e0e\u3059\u308b\u3088\u3046\u3067\u3042\u308b\u3002\u305d\u306e\u7d50\u679c\u3001TiO\u00a0<sub>2<\/sub>\u306e\u30eb\u30c1\u30eb\u76f8\u306f\u30d1\u30eb\u30b9\u5468\u671f\u3068\u3068\u3082\u306b\u5897\u52a0\u3057\u3001\u30d1\u30eb\u30b9\u632f\u5e45\u3068\u3068\u3082\u306b\u5bc6\u5ea6\u304c\u6e1b\u5c11\u3059\u308b[3]\u3002\u3057\u304b\u3057\u3001\u4ed6\u306e\u7814\u7a76\u8005\u306f\u3053\u306e\u73fe\u8c61\u3092\u898b\u3066\u304a\u3089\u305a\u3001\u9ad8\u7d50\u6676\u6027\u30c1\u30bf\u30f3\u3092\u84b8\u7740\u3057\u306a\u304c\u3089\u30a2\u30e2\u30eb\u30d5\u30a1\u30b9\u819c\u3057\u304b\u5f97\u3066\u3044\u306a\u3044[4]\u3002HPPMS\u306f\u9ad8\u7d50\u6676\u6027ITO\u819c\u3092\u84b8\u7740\u3057\u305f\u3002<\/p>\n<p>\u305d\u306e\u7d50\u679c\u3001HPPMS\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u306f\u3001\u30c8\u30e9\u30a4\u30dc\u30ed\u30b8\u30fc\u3001\u5149\u5b66\u7279\u6027\u3001\u96fb\u6c17\u7279\u6027\u3001\u74b0\u5883\u7279\u6027\u304c\u6539\u5584\u3055\u308c\u308b\u306f\u305a\u3067\u3042\u308b\u3002\u5fae\u7d30\u69cb\u9020\u304c\u6539\u5584\u3055\u308c\u308c\u3070\u3001\u5149\u5b66\u7279\u6027\u3082\u5411\u4e0a\u3059\u308b[3,4,5-9]\u3002\u5c48\u6298\u7387\u304c\u5149\u5b66\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u306e\u5bc6\u5ea6\u306b\u4f9d\u5b58\u3059\u308b\u3053\u3068\u306f\u3088\u304f\u77e5\u3089\u308c\u3066\u3044\u308b\u3002\u901a\u5e38\u3001\u5bc6\u5ea6\u306e\u4f4e\u3044\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u306e\u5c48\u6298\u7387\u306f\u3001\u5bc6\u5ea6\u306e\u9ad8\u3044\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u306e\u5c48\u6298\u7387\u3088\u308a\u3082\u4f4e\u3044\u3002 <sub>2<\/sub>\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u306f\u3001\u5bc6\u5ea6\u306b\u4f9d\u5b58\u3059\u308b\u6750\u6599\u306e\u5b8c\u74a7\u306a\u4f8b\u3067\u3042\u308b\u3002\u3053\u306e\u6750\u6599\u306e\u5c48\u6298\u7387\u306f\u3001\u5bc6\u5ea6\u306b\u3088\u3063\u30662.2\uff5e2.5\u306e\u9593\u3067\u5909\u5316\u3059\u308b\u3002HPPMS\u306b\u3088\u3063\u3066\u6210\u819c\u3055\u308c\u305f\u819c\u306f\u3001\u56f31[5]\u306b\u793a\u3059\u3088\u3046\u306b\u3001DC\u30de\u30b0\u30cd\u30c8\u30ed\u30f3\u30b9\u30d1\u30c3\u30bf\u819c\u3068\u6bd4\u8f03\u3057\u3066\u9ad8\u3044\u5c48\u6298\u7387\u3092\u6709\u3059\u308b\u3053\u3068\u304c\u5831\u544a\u3055\u308c\u3066\u3044\u308b\u3002\u5c48\u6298\u7387\u306f\u30b9\u30da\u30af\u30c8\u30eb\u5168\u4f53\u306b\u308f\u305f\u3063\u3066\u9ad8\u3044\u3002\u307e\u305f\u3001\u3053\u308c\u3089\u306e\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u306e\u5bc6\u5ea6\u306f\u30013.83 g \/ cm <sup>3<\/sup>DC\u30d5\u30a3\u30eb\u30e0\u306e\u5bc6\u5ea6\u306f3.71g\/cm\u3067\u3042\u3063\u305f\u3002\u00a0<sup>3<\/sup>nm\u306e\u8868\u9762\u7c97\u3055\u3068\u308f\u305a\u304b0\uff0e\u96fb\u6e90\u306e\u6700\u9069\u306a\u30c7\u30e5\u30fc\u30c6\u30a3\u30fb\u30b5\u30a4\u30af\u30eb\u3092\u4f7f\u7528\u3059\u308c\u3070\u3001TiO\u00a0<sub>2 \u30b3\u30fc\u30c6\u30a3\u30f3\u30b0<\/sub>\u3082\u7d042.72\u3068\u3044\u3046\u9ad8\u3044\u5c48\u6298\u7387\u3092\u6301\u3064[3]\u3002SiO\u00a0<sub>2<\/sub>ZnO, Al\u00a0<sub>2<\/sub>\u00a0O\u00a0<sub>3<\/sub>\u30bf\u00a0<sub>2<\/sub>\u00a0O\u00a0<sub>5<\/sub>\u3068ZrO\u00a0<sub>2's<\/sub>\u5149\u5b66\u6027\u80fd\u30d5\u30a3\u30eb\u30e0\u3082\u5831\u544a\u3055\u308c\u3066\u3044\u308b[6,7,8]\u3002\u3053\u308c\u3089\u306e\u7d50\u679c\u306f\u5370\u8c61\u7684\u306a\u3082\u306e\u3067\u3042\u308b\u304c\u3001\u3042\u308b\u7a2e\u306e\u6ce8\u610f\u70b9\u3092\u6307\u6458\u3057\u306a\u3051\u308c\u3070\u306a\u3089\u306a\u3044\u3002HPPMS\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u306f\u3001\u4ed6\u306e\u96fb\u6e90\u3067\u6210\u819c\u3057\u305f\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u3068\u6bd4\u8f03\u3057\u3066\u3001\u5fc5\u305a\u3057\u3082\u7279\u6027\u304c\u5411\u4e0a\u3059\u308b\u3068\u306f\u9650\u3089\u306a\u3044[10]\u3002\u5149\u5b66\u5b9a\u6570\u306f\u5e38\u306b\u6210\u819c\u6761\u4ef6\u306b\u5927\u304d\u304f\u4f9d\u5b58\u3057\u3001\u5404\u6750\u6599\u3068\u6210\u819c\u30b7\u30b9\u30c6\u30e0\u306b\u5bfe\u3057\u3066\u6700\u9069\u306a\u6761\u4ef6\u3092\u6c7a\u5b9a\u3057\u306a\u3051\u308c\u3070\u306a\u3089\u306a\u3044\u3002\u5e73\u9762\u30de\u30b0\u30cd\u30c8\u30ed\u30f3\u30b9\u30d1\u30c3\u30bf\u819c\u306b\u3064\u3044\u3066\u3082\u3001\u975e\u5e38\u306b\u9ad8\u3044\u5c48\u6298\u7387\u304c\u5831\u544a\u3055\u308c\u3066\u3044\u308b\u306e\u3092\u898b\u305f\u3053\u3068\u304c\u3042\u308a\u307e\u3059\u3002\u5b9f\u969b\u3001\u5834\u5408\u306b\u3088\u3063\u3066\u306f\u3001IF\u30de\u30b0\u30cd\u30c8\u30ed\u30f3\u30b9\u30d1\u30c3\u30bf\u30ea\u30f3\u30b0\u306fHPPMS\u3088\u308a\u3082\u512a\u308c\u305f\u6027\u80fd\u3092\u767a\u63ee\u3057\u307e\u3059[8]\u3002<\/p>\n<figure id=\"attachment_290\" class=\"wp-caption alignnone\" aria-describedby=\"caption-attachment-290\"><img loading=\"lazy\" decoding=\"async\" class=\"size-full wp-image-290\" src=\"https:\/\/vtcmagblog.com\/wp-content\/uploads\/2018\/11\/blogimg_1.10.1.png\" sizes=\"auto, (max-width: 524px) 100vw, 524px\" srcset=\"https:\/\/vtcmagblog.com\/wp-content\/uploads\/2018\/11\/blogimg_1.10.1.png 524w, https:\/\/vtcmagblog.com\/wp-content\/uploads\/2018\/11\/blogimg_1.10.1-300x220.png 300w\" alt=\"\" width=\"524\" height=\"384\" \/><figcaption id=\"caption-attachment-290\" class=\"wp-caption-text\">\u56f31 HPPMS\u819c\u3068DC\u30de\u30b0\u30cd\u30c8\u30ed\u30f3\u30b9\u30d1\u30c3\u30bf\u819c\u306e\u5c48\u6298\u7387\u306e\u6bd4\u8f03[5] 11.<\/figcaption><\/figure>\n<p>HPPMS\u30d7\u30ed\u30bb\u30b9\u306e\u3082\u3046\u4e00\u3064\u306e\u5229\u70b9\u306f\u3001\u5316\u5b66\u7684\u30fb\u74b0\u5883\u7684\u5b89\u5b9a\u6027\u306e\u5411\u4e0a\u3067\u3042\u308b\u3002\u9280\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u306f\u3001\u7279\u306b\u975e\u5e38\u306b\u8584\u3044\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u3067\u306f\u3001\u5316\u5b66\u7684\u30fb\u74b0\u5883\u7684\u5b89\u5b9a\u6027\u306e\u6b20\u5982\u3067\u60aa\u540d\u9ad8\u3044\u3002\u307e\u3060\u591a\u304f\u306e\u30c6\u30b9\u30c8\u304c\u5fc5\u8981\u3067\u3042\u308b\u304c\u3001HPPMS\u306b\u3088\u3063\u3066\u6210\u819c\u3055\u308c\u305f\u9280\u819c\u306f\u3001\u591a\u5c64\u69cb\u9020\u306b\u304a\u3044\u3066\u9ad8\u3044\u5b89\u5b9a\u6027\u3068\u5149\u5b66\u7279\u6027\u3092\u6301\u3064\u3088\u3046\u3067\u3042\u308b[9]\u3002<\/p>\n<p>\u3053\u306e\u30d7\u30ed\u30bb\u30b9\u306f\u3001\u5bc6\u5ea6\u3068\u5e73\u6ed1\u6027\u304c\u9ad8\u307e\u308b\u306b\u3064\u308c\u3066\u3001\u6469\u64e6\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u306e\u6027\u80fd\u3092\u5411\u4e0a\u3055\u305b\u308b\u53ef\u80fd\u6027\u3092\u79d8\u3081\u3066\u3044\u308b[11-15]\u3002\u5fae\u7d30\u69cb\u9020\u304c\u7dfb\u5bc6\u3067\u8868\u9762\u304c\u5e73\u6ed1\u306a\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u306f\u3001\u8010\u98df\u6027\u3068\u8010\u6469\u8017\u6027\u3092\u9ad8\u3081\u3001\u6469\u64e6\u3092\u4f4e\u6e1b\u3059\u308b\u305f\u3081\u3001\u591a\u304f\u306e\u7528\u9014\u3067\u597d\u307e\u308c\u3066\u3044\u308b\u3002TiN\u3001CrN <sub>x<\/sub>Cr\u00a0<sub>x<\/sub>\u00a0N\u00a0<sub>y<\/sub>\u3068Ti\u00a0<sub>3<\/sub>\u00a0SiC\u00a0<sub>2's<\/sub>\u786c\u8cea\u6750\u6599\u306fHPPMS\u306b\u3088\u3063\u3066\u6210\u819c\u3055\u308c\u305f\u3002TiN\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u306f\u3001DC\u30de\u30b0\u30cd\u30c8\u30ed\u30f3\u30b9\u30d1\u30c3\u30bf\u30ea\u30f3\u30b0\u6210\u819c\u3068\u6bd4\u8f03\u3057\u3066\u3001\u975e\u5e38\u306b\u5fae\u7d30\u306a\u7d50\u6676\u69cb\u9020\u3092\u6709\u3059\u308b[19]\u300225GPa\u306b\u8fd1\u3044\u786c\u5ea6\u5024\u30687\u304b\u30890.2\u3078\u306e\u647a\u52d5\u6469\u8017\u4fc2\u6570\u306e\u4f4e\u6e1b\u304c\u5831\u544a\u3055\u308c\u3066\u3044\u308b[15]\u3002<\/p>\n<p>HPePMS\u306f\u307e\u305f\u3001VMeCN\u3068CrN \/ NbN\u6469\u64e6\u8d85\u683c\u5b50\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u3082\u6210\u819c\u3057\u305f[16,17]\u3002TiAlCN\/VCN\u8d85\u683c\u5b50\u306f\u3001\u9ad8\u3044\u786c\u5ea6\u5024\uff08Hv = 2900 kg \/ mm\uff09\u3092\u793a\u3057\u305f\u3002\u00a0<sup>2<\/sup>CrN\/NbN\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u306f\u3001\u8010\u6469\u8017\u6027\u3068\u8010\u98df\u6027\u304c\u5411\u4e0a\u3057\u3001\u8868\u9762\u7c97\u3055\u3082\u4f4e\u3044 [16]\u3002\u30d7\u30ed\u30bb\u30b9\u306b\u304a\u3051\u308b\u91cd\u8981\u306a\u30b9\u30c6\u30c3\u30d7\u306f\u3001HPPMS\u306b\u3088\u3063\u3066\u84b8\u7740\u3055\u308c\u305fV\u3068Nb\u3067\u57fa\u677f\u3092\u524d\u51e6\u7406\u3059\u308b\u3053\u3068\u3067\u3042\u308b\u3002<\/p>\n<p>HPPMS\u819c\u306e\u6a5f\u68b0\u7684\u5fdc\u529b\u306f\u4f4e\u3044\u3053\u3068\u304c\u671b\u307e\u3057\u3044\u3068\u3059\u308b\u6587\u732e\u3082\u3042\u308b[17]\u3002\u5fdc\u529b\u306e\u6e2c\u5b9a\u306f\u4e0d\u5341\u5206\u3067\u3042\u308b\u304c\u3001CrN\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u3067\u306f3 GPa\u4ed8\u8fd1\u306e\u5fdc\u529b\u304c\u5831\u544a\u3055\u308c\u3066\u3044\u308b[15]\u3002\u4f4e\u5fdc\u529b\u306fTiN\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u3067\u3082\u6e2c\u5b9a\u3055\u308c\u3066\u3044\u308b[19,20]\u3002<\/p>\n<p>HPPMS\u306f\u4f4e\u62b5\u6297ITO\u819c\u306e\u6210\u819c\u306b\u4f7f\u7528\u3055\u308c\u3066\u304a\u308a[21]\u3001TCO\u6027\u80fd\u306e\u5168\u4f53\u7684\u306a\u5411\u4e0a\u304c\u671f\u5f85\u3055\u308c\u3066\u3044\u308b\u3002\u307b\u307c\u3059\u3079\u3066\u306e\u95a2\u9023\u30ec\u30dd\u30fc\u30c8\u3067\u306f\u3001HPPMS\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u3068DC\u30de\u30b0\u30cd\u30c8\u30ed\u30f3\u30b9\u30d1\u30c3\u30bf\u30ea\u30f3\u30b0\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u3092\u6bd4\u8f03\u3057\u3066\u3044\u308b\u3002\u56f32\u306f\u3001300\u2103\u3067\u6210\u819c\u3057\u305fHPPMS\u819c\u3068DC\u30b9\u30d1\u30c3\u30bf\u819c\u306e\u8868\u9762\u5f62\u614b\u3092\u6bd4\u8f03\u3057\u305f\u3082\u306e\u3067\u3042\u308b[22]\u3002HPPMS\u819c\u306e\u8868\u9762\u306f\u975e\u5e38\u306b\u6ed1\u3089\u304b\u3067\u3042\u308b\u3002\u56f33\u306f\u3001\u4e21\u65b9\u306e\u65b9\u6cd5\uff089a - DC\u304a\u3088\u30739b - HPPMS\uff09\u3067\u6210\u819c\u3057\u305f\u62b5\u6297\u7387\u819c\u3092\u6bd4\u8f03\u3057\u305f\u3082\u306e\u3067\u3042\u308b\u3002DC\u6cd5\u3067\u9054\u6210\u3055\u308c\u305f\u62b5\u6297\u7387\u306f\u3001o<sub>2<\/sub>1sccm\u306e\u6d41\u91cf\u306f\uff5e3.2\u00d710\u3067\u3042\u308b\u3002\u00a0<sup>-3<\/sup>\u00a0\u03a9.cm\uff08\u3053\u306e\u5206\u91ce\u3067\u306eITO\u306e\u7d76\u5bfe\u72b6\u614b\uff09\u3067\u3042\u308b\u306e\u306b\u5bfe\u3057\u3001HPPMS\u6cd5\u306e\u62b5\u6297\u7387\u306f3.1 ~ \u00d7 10\u00a0<sup>-3<\/sup>\u00a0\u03a9.cm\u3067\u3042\u3063\u305f\u3002\u00a0<sub>2<\/sub>\u30d5\u30ed\u30fc\u3002\u8457\u8005\u3089\u306f\u3053\u308c\u3092\u6709\u610f\u5dee\u3068\u307f\u306a\u3057\u3066\u304a\u308a\u3001\u5831\u544a\u3055\u308c\u3066\u3044\u308b\u62b5\u6297\u7387\u306e\u6700\u4f4e\u5024\u306f1.35 x 10 <sup>-3<\/sup>\u00a0\u03a9.cm\u306eDC\u30d5\u30a3\u30eb\u30e0\u3068\uff5e1.25 X10\u00a0<sup>-3<\/sup> HPPMS\u306e\u672c\u5f53\u306e\u5229\u70b9\u306f\u3001\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u306e\u5e73\u6ed1\u6027\u306b\u3042\u308b\u3088\u3046\u3067\u3001HPPMS\u304c\u6709\u5229\u3067\u3042\u308b\u3002<\/p>\n<figure id=\"attachment_291\" class=\"wp-caption alignnone\" aria-describedby=\"caption-attachment-291\"><img loading=\"lazy\" decoding=\"async\" class=\"alignnone wp-image-866 size-full\" src=\"https:\/\/www.naxau.cn\/wp-content\/uploads\/2020\/03\/HPPMS-HPPMS\u5927\u529f\u7387\u8109\u51b2\u78c1\u63a7\u6e85\u5c04.png\" alt=\"DC\u30de\u30b0\u30cd\u30c8\u30ed\u30f3(a)\u3068HPPMS(b)\u306b\u3088\u308bITO\u819c\u306e\u8868\u9762\u5f62\u72b6\u306e\u6bd4\u8f03\" width=\"654\" height=\"484\" srcset=\"https:\/\/www.naxauam.com\/wp-content\/uploads\/2020\/03\/HPPMS-HPPMS\u5927\u529f\u7387\u8109\u51b2\u78c1\u63a7\u6e85\u5c04.png 654w, https:\/\/www.naxauam.com\/wp-content\/uploads\/2020\/03\/HPPMS-HPPMS\u5927\u529f\u7387\u8109\u51b2\u78c1\u63a7\u6e85\u5c04-300x222.png 300w\" sizes=\"auto, (max-width: 654px) 100vw, 654px\" \/><figcaption id=\"caption-attachment-291\" class=\"wp-caption-text\">\u56f32 DC\u30de\u30b0\u30cd\u30c8\u30ed\u30f3(a)\u3068HPPMS(b)\u3067\u6210\u819c\u3057\u305fITO\u819c\u306e\u8868\u9762\u5f62\u72b6\u306e\u6bd4\u8f03[22]\u3002<\/figcaption><\/figure>\n<figure id=\"attachment_292\" class=\"wp-caption alignnone\" aria-describedby=\"caption-attachment-292\"><img loading=\"lazy\" decoding=\"async\" class=\"size-full wp-image-292\" src=\"https:\/\/vtcmagblog.com\/wp-content\/uploads\/2018\/11\/blogimg_1.10.3.png\" sizes=\"auto, (max-width: 612px) 100vw, 612px\" srcset=\"https:\/\/vtcmagblog.com\/wp-content\/uploads\/2018\/11\/blogimg_1.10.3.png 612w, https:\/\/vtcmagblog.com\/wp-content\/uploads\/2018\/11\/blogimg_1.10.3-300x259.png 300w\" alt=\"\" width=\"612\" height=\"528\" \/><figcaption id=\"caption-attachment-292\" class=\"wp-caption-text\">\u56f33 DC\u30de\u30b0\u30cd\u30c8\u30ed\u30f3(a)\u3068HPPMS(b)\u3067\u6210\u819c\u3057\u305fITO\u819c\u306e\u62b5\u6297\u7387\u3068\u5438\u5149\u5ea6\u306e\u6bd4\u8f03[22]\u3002<\/figcaption><\/figure>\n<hr \/>\n<p>http:\/\/vtcmagblog.com\/<\/p>\n<h3>\u53c2\u8003\u307e\u3067\u306b\uff1a<\/h3>\n<ol>\n<li>D J Christie\u3089\u3001\u7b2c47\u56de\u771f\u7a7a\u6210\u819c\u5b66\u4f1a\u5e74\u6b21\u6280\u8853\u5927\u4f1a\uff082004\u5e74\uff09 113.<\/li>\n<li>William D. Sproul, 50 years of Vacuum Coating Technology and the growth of the Society of Vacuum Coaters, Donald M. Mattox and Vivienne Harwood Mattox ed.Society of Vacuum Coaters (2007) 35.<\/li>\n<li>R Bandorf et al., 50th Annual Technical Conference of the Society of Vacuum Coaters (2007) 160.<\/li>\n<li>J A Davis\u3089\u3001\u7b2c47\u56de\u771f\u7a7a\u6210\u819c\u6280\u8853\u5354\u4f1a\u5e74\u6b21\u6280\u8853\u4f1a\u8b70\uff082004\u5e74\uff09215\u3002<\/li>\n<li>K Sarakinos et al., Rev. Adv. Mater. Sci, 15 (2007) 44.<\/li>\n<li>S Konstantinidis et al., 50th Annual Technical Conference of the Society of Vacuum Coaters (2007) 92.<\/li>\n<li>W.D. Sproul, D.J. Christie, and D.C. Carter, 47th Annual Technical Conference of Society of Vacuum Coaters (2004) 96.<\/li>\n<li>D A Glocker et al, Proceedings of the 48th Technical Conference of the Society of Vacuum Coaters (2005) 53.<\/li>\n<li>J Li, S R Kirkpatrick and S L Rohde, Presentation SE-TuA1, AVS 2007 Fall Technical Conference, October 14 - 19, 2007, Seattle WA.<\/li>\n<li>D A Glocker\u3089, \u7b2c47\u56de\u771f\u7a7a\u6210\u819c\u6280\u8853\u5354\u4f1a\u6280\u8853\u4f1a\u8b70 (2004) 183<\/li>\n<li>A P Ehiasarian et al, Proceedings of the 45th Technical Conference of the Society of Vacuum Coaters (2002) 328.<\/li>\n<li>J B\u00f6hlmark\u3089, Proceedings of the 49th Technical Conference of the Society of Vacuum Coaters (2006) 334.<\/li>\n<li>J Alami et al., Thin Solid Films 515 (4): 1731-1736.<\/li>\n<li>A P Ehiasarian et al., Surface and Coatings Technology 163-164: 267-272.<\/li>\n<li>J Paulitsch\u3089, Proceedings of the 50th Technical Conference of the Society of Vacuum Coaters (2007) 150.<\/li>\n<li>A P Ehiasarian et al, Proceedings of the 49th Technical Conference of Society of Vacuum Coaters (2006) 349.<\/li>\n<li>W D Sproul, \u7b2c50\u56de\u771f\u7a7a\u6210\u819c\u5b66\u4f1a\u6280\u8853\u4f1a\u8b70\u4e88\u7a3f\u96c6(2007) 591<\/li>\n<li>B M DeKoven\u3089\u3001\u7b2c46\u56de\u771f\u7a7a\u6210\u819c\u5b66\u4f1a\u6280\u8853\u4f1a\u8b70\u4e88\u7a3f\u96c6\uff082003\uff09158<\/li>\n<li>SE+PS-MoA1: R. Chistyakov, \"Modulated Pulse Power Deposition of Nanometer-Scale Multilayered Coatings\", presented at 2008 AVS Fall Technical Conference, October 21, 2008.2008 AVS Fall Technical Conference, Seattle, WA, 2008\u5e7410\u670821\u65e5\u3002<\/li>\n<li>SE+PS-MoA3: A. Amassian et al., 2008 AVS Fall Technical Conference, Seattle, WA, October 21, 2008\u306b\u3066\u767a\u8868\u3002<\/li>\n<li>P Eh Hovsepian \u4ed6, Proceedings of the 50th Technical Conference of the Society of Vacuum Coaters (2007) 602.<\/li>\n<li>V Sittinger\u3089, Proceedings of the 49th Technical Conference of Society of Vacuum Coaters (2006) 343.<\/li>\n<\/ol>","protected":false},"excerpt":{"rendered":"<p>\u30cf\u30a4\u30d1\u30ef\u30fc\u30d1\u30eb\u30b9\u30de\u30b0\u30cd\u30c8\u30ed\u30f3\u30b9\u30d1\u30c3\u30bf\u30ea\u30f3\u30b0\uff08HPPMS\uff09\u306f\u3001\u30cf\u30a4\u30d1\u30ef\u30fc\u30d1\u30eb\u30b9\u30de\u30b0\u30cd\u30c8\u30ed\u30f3\u30b9\u30d1\u30c3\u30bf\u30ea\u30f3\u30b0\uff08HIPIMS\uff09\u3068\u3082\u547c\u3070\u308c\u3001\u30de\u30b0\u30cd\u30c8\u30ed\u30f3\u30b9\u30d1\u30c3\u30bf\u30ea\u30f3\u30b0\u30c7\u30dd\u30b8\u30b7\u30e7\u30f3\u306b\u57fa\u3065\u304fPVD\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u6280\u8853\u3067\u3042\u308b\u3002HPPMS\u306f\u3001\u6570\u5341\u30de\u30a4\u30af\u30ed\u79d2\u306e\u77ed\u3044\u30d1\u30eb\u30b9\u3067kW\/cm 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