{"id":560,"date":"2019-02-13T14:12:39","date_gmt":"2019-02-13T06:12:39","guid":{"rendered":"http:\/\/localhost\/theme20\/?p=560"},"modified":"2023-12-12T09:31:52","modified_gmt":"2023-12-12T01:31:52","slug":"\u30de\u30b0\u30cd\u30c8\u30ed\u30f3\u30b9\u30d1\u30c3\u30bf\u30ea\u30f3\u30b0-\u30c7\u30e5\u30a2\u30eb\u30de\u30b0\u30cd\u30c8\u30ed","status":"publish","type":"post","link":"https:\/\/www.naxauam.com\/ja\/\u30de\u30b0\u30cd\u30c8\u30ed\u30f3\u30b9\u30d1\u30c3\u30bf\u30ea\u30f3\u30b0-\u30c7\u30e5\u30a2\u30eb\u30de\u30b0\u30cd\u30c8\u30ed\/","title":{"rendered":"\u30de\u30b0\u30cd\u30c8\u30ed\u30f3\u30b9\u30d1\u30c3\u30bf\u30ea\u30f3\u30b0 - 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class=\"wp-block-image\"><img loading=\"lazy\" decoding=\"async\" class=\"alignnone size-full wp-image-868\" src=\"https:\/\/www.naxau.cn\/wp-content\/uploads\/2020\/02\/\u53cc\u78c1\u63a7\u7ba1\u9634\u6781\u7ed3\u6784.jpeg\" alt=\"\u30c7\u30e5\u30a2\u30eb\u30de\u30b0\u30cd\u30c8\u30ed\u30f3\u30ab\u30bd\u30fc\u30c9\u69cb\u9020\" width=\"614\" height=\"328\" srcset=\"https:\/\/www.naxauam.com\/wp-content\/uploads\/2020\/02\/\u53cc\u78c1\u63a7\u7ba1\u9634\u6781\u7ed3\u6784.jpeg 614w, https:\/\/www.naxauam.com\/wp-content\/uploads\/2020\/02\/\u53cc\u78c1\u63a7\u7ba1\u9634\u6781\u7ed3\u6784-300x160.jpeg 300w\" sizes=\"auto, (max-width: 614px) 100vw, 614px\" \/><figcaption>\u56f32.\u30c7\u30e5\u30a2\u30eb\u30de\u30b0\u30cd\u30c8\u30ed\u30f3\u30ab\u30bd\u30fc\u30c9\u69cb\u6210[1]\u3002<\/figcaption><\/figure>\n<figure class=\"wp-block-image\"><img loading=\"lazy\" decoding=\"async\" class=\"wp-image-307\" src=\"https:\/\/vtcmagblog.com\/wp-content\/uploads\/2019\/02\/pmm_img3.jpeg\" sizes=\"auto, (max-width: 516px) 100vw, 516px\" srcset=\"https:\/\/vtcmagblog.com\/wp-content\/uploads\/2019\/02\/pmm_img3.jpeg 516w, https:\/\/vtcmagblog.com\/wp-content\/uploads\/2019\/02\/pmm_img3-300x223.jpeg 300w\" alt=\"\" width=\"516\" height=\"384\" \/><figcaption>\u56f33. \u5178\u578b\u7684\u306aIF\u30d1\u30ef\u30fc\u30fb\u30d1\u30eb\u30b9[4]\u3002<\/figcaption><\/figure>\n<p>\u30d1\u30eb\u30b9\u30de\u30b0\u30cd\u30c8\u30ed\u30f3\u30b9\u30d1\u30c3\u30bf\u30ea\u30f3\u30b0\u306f\u3001\u30de\u30b0\u30cd\u30c8\u30ed\u30f3\u30b9\u30d1\u30c3\u30bf\u30ea\u30f3\u30b0\u306e2\u3064\u306e\u6b20\u70b9\u3092\u514b\u670d\u3057\u3066\u3044\u308b\uff1a<\/p>\n<ul>\n<li>\u7d76\u7e01\u5c64\u306e\u5806\u7a4d\u306b\u3088\u308a\u967d\u6975\u304c\u5931\u308f\u308c\u308b\uff08\u307e\u305f\u306f\u96a0\u308c\u308b\uff09\u3002<\/li>\n<li>\u53cd\u5fdc\u6027\u30b9\u30d1\u30c3\u30bf\u30ea\u30f3\u30b0\u4e2d\u306e\u8377\u96fb\u3068\u30a2\u30fc\u30af\u5f62\u6210<\/li>\n<\/ul>\n<p>\u30d1\u30eb\u30b9\u96fb\u6e90\u3068\u30d1\u30eb\u30b9\u306e\u6975\u6027\u3092\u53cd\u8ee2\u3055\u305b\u308b\u3053\u3068\u306b\u3088\u308a\u3001\u53cd\u5fdc\u6027\u6210\u819c\u4e2d\u306e\u30bf\u30fc\u30b2\u30c3\u30c8\u306e\u5e2f\u96fb\u306f\u5b9f\u8cea\u7684\u306b\u6392\u9664\u3055\u308c\u308b\u3002\u56f34\u306f\u3001\u30c7\u30e5\u30a2\u30eb\u30de\u30b0\u30cd\u30c8\u30ed\u30f3\u30b9\u30d1\u30c3\u30bf\u30ea\u30f3\u30b0\u4e2d\u306e\u30d7\u30e9\u30ba\u30de\u30b9\u30a4\u30c3\u30c1\u30f3\u30b0\u3092\u793a\u3057\u3066\u3044\u308b[2]\u3002<\/p>\n<figure class=\"wp-block-image\"><img loading=\"lazy\" decoding=\"async\" class=\"wp-image-308\" src=\"https:\/\/vtcmagblog.com\/wp-content\/uploads\/2019\/02\/pmm_img4.jpeg\" sizes=\"auto, (max-width: 392px) 100vw, 392px\" srcset=\"https:\/\/vtcmagblog.com\/wp-content\/uploads\/2019\/02\/pmm_img4.jpeg 392w, https:\/\/vtcmagblog.com\/wp-content\/uploads\/2019\/02\/pmm_img4-295x300.jpeg 295w\" alt=\"\" width=\"392\" height=\"398\" \/><figcaption>\u56f34. \u30c7\u30e5\u30a2\u30eb\u30de\u30b0\u30cd\u30c8\u30ed\u30f3\u30b9\u30d1\u30c3\u30bf\u30ea\u30f3\u30b0\u4e2d\u306e\u30d7\u30e9\u30ba\u30de\u30b9\u30a4\u30c3\u30c1\u30f3\u30b0[2]\u3002<\/figcaption><\/figure>\n<p>\u30c7\u30e5\u30a2\u30eb\u30de\u30b0\u30cd\u30c8\u30ed\u30f3\u6280\u8853\u306f\u5f53\u521d\u3001\u9178\u5316\u7269\u3001\u7a92\u5316\u7269\u3001\u900f\u660e\u5c0e\u96fb\u6027\u9178\u5316\u7269\u306a\u3069\u306e\u7d76\u7e01\u6750\u6599\u3092\u6210\u819c\u3059\u308b\u305f\u3081\u306b\u958b\u767a\u3055\u308c\u305f[4]\u3002\u540c\u3058\u30bf\u30fc\u30b2\u30c3\u30c8\u3092\u6301\u3064\u5e73\u9762\u30de\u30b0\u30cd\u30c8\u30ed\u30f3\u306f\u3001\u901a\u5e38\u96a3\u308a\u5408\u3063\u3066\u914d\u7f6e\u3055\u308c\u307e\u3059\u304c\u3001\u7570\u306a\u308b\u30bf\u30fc\u30b2\u30c3\u30c8\u3092\u6301\u3064\u5171\u30b9\u30d1\u30c3\u30bf\u30ea\u30f3\u30b0\u69cb\u6210\u3067\u306f\u3001\u3055\u3089\u306b\u96e2\u3059\u3053\u3068\u304c\u3067\u304d\u307e\u3059[5]\u3002\u8ca0\u306b\u30d0\u30a4\u30a2\u30b9\u3055\u308c\u305f\u30bf\u30fc\u30b2\u30c3\u30c8\uff08\u30ab\u30bd\u30fc\u30c9\uff09\u304b\u3089\u653e\u51fa\u3055\u308c\u305f\u4e8c\u6b21\u96fb\u5b50\u304c\u6b63\u306b\u5e2f\u96fb\u3057\u305f\u30bf\u30fc\u30b2\u30c3\u30c8\uff08\u30a2\u30ce\u30fc\u30c9\uff09\u306b\u5f15\u304d\u5bc4\u305b\u3089\u308c\u3001\u84b8\u7740\u3055\u308c\u305f\u7d76\u7e01\u4f53\u306e\u6b63\u306b\u5e2f\u96fb\u3057\u305f\u8868\u9762\u3092\u672c\u8cea\u7684\u306b\u4e2d\u548c\u3059\u308b\u3053\u3068\u306b\u3088\u308a\u3001\u30a2\u30fc\u30af\u653e\u96fb\u3092\u4f4e\u6e1b\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u308b\u3002\u88681\u306f\u3001\u5f93\u6765\u306eDC\u30de\u30b0\u30cd\u30c8\u30ed\u30f3\u30b9\u30d1\u30c3\u30bf\u30ea\u30f3\u30b0\u3068IF\u30b9\u30d1\u30c3\u30bf\u30ea\u30f3\u30b0[1,2]\u306b\u3088\u3063\u3066\u6210\u819c\u3055\u308c\u305f4\u3064\u306e\u6750\u6599\u306e\u6210\u819c\u901f\u5ea6\u3068\u5149\u5b66\u7279\u6027\u3092\u6bd4\u8f03\u3057\u305f\u3082\u306e\u3067\u3042\u308b\u3002\u3044\u305a\u308c\u306e\u5834\u5408\u3082\u3001\u6210\u819c\u901f\u5ea6\u306f\u6700\u59275\u500d\u307e\u3067\u5411\u4e0a\u3059\u308b\u3053\u3068\u304c\u308f\u304b\u308b\u3002<\/p>\n<figure class=\"wp-block-image\"><img loading=\"lazy\" decoding=\"async\" class=\"wp-image-309\" src=\"https:\/\/vtcmagblog.com\/wp-content\/uploads\/2019\/02\/pmm_table1.jpeg\" sizes=\"auto, (max-width: 767px) 89vw, (max-width: 1000px) 54vw, (max-width: 1071px) 543px, 580px\" srcset=\"https:\/\/vtcmagblog.com\/wp-content\/uploads\/2019\/02\/pmm_table1.jpeg 788w, https:\/\/vtcmagblog.com\/wp-content\/uploads\/2019\/02\/pmm_table1-300x244.jpeg 300w, https:\/\/vtcmagblog.com\/wp-content\/uploads\/2019\/02\/pmm_table1-768x626.jpeg 768w\" alt=\"\" width=\"788\" height=\"642\" \/><figcaption>\u88681.DC\u30b9\u30d1\u30c3\u30bf\u819c\u3068MF\u30b9\u30d1\u30c3\u30bf\u819c\u306e\u5149\u5b66\u7279\u6027\u306e\u6bd4\u8f03[1,2]\u3002<\/figcaption><\/figure>\n<p>MF\u30c7\u30e5\u30a2\u30eb\u30de\u30b0\u30cd\u30c8\u30ed\u30f3\u30b9\u30d1\u30c3\u30bf\u30ea\u30f3\u30b0\u306e\u6069\u6075\u3092\u53d7\u3051\u308b\u4ed6\u306e\u8584\u819c\u6750\u6599\u306b\u306f\u3001SiO2\u3001Al2O3\u3001MgO\u3001CrN\u3001ITO\u304c\u3042\u308b\u3002<\/p>\n<p>\u30c7\u30e5\u30a2\u30eb\u30de\u30b0\u30cd\u30c8\u30ed\u30f3\u30d7\u30ed\u30bb\u30b9\u306e\u5229\u70b9\u306e1\u3064\u3067\u3042\u308b\u53cd\u5fdc\u6027\u30b9\u30d1\u30c3\u30bf\u30ea\u30f3\u30b0\u306b\u3064\u3044\u3066\u8a73\u3057\u304f\u898b\u3066\u307f\u3088\u3046\u3002\u53cd\u5fdc\u6027\u30b9\u30d1\u30c3\u30bf\u30ea\u30f3\u30b0\u306e\u80cc\u5f8c\u306b\u3042\u308b\u57fa\u672c\u7684\u306a\u30e1\u30ab\u30cb\u30ba\u30e0\u306f\u8907\u96d1\u3067\u3001\u73fe\u5728\u3082\u8abf\u67fb\u4e2d\u3067\u3042\u308b\u304c [7,8]\u3001\u30c7\u30e5\u30a2\u30eb\u30de\u30b0\u30cd\u30c8\u30ed\u30f3\u30b9\u30d1\u30c3\u30bf\u30ea\u30f3\u30b0\u306b\u3088\u308a\u3001\u30d7\u30ed\u30bb\u30b9\u306e\u5236\u5fa1\u304c\u5bb9\u6613\u306b\u306a\u308b [6,9]\u3002\u3055\u3089\u306b\u3001\u30af\u30ed\u30fc\u30ba\u30c9\u30eb\u30fc\u30d7\u30b3\u30f3\u30c8\u30ed\u30fc\u30e9\u30fc\u3092\u4f7f\u7528\u3057\u3066\u30d7\u30ed\u30bb\u30b9\u3092\u81ea\u52d5\u5316\u3059\u308b\u3053\u3068\u3082\u3067\u304d\u308b[6]\u3002\u30bf\u30fc\u30b2\u30c3\u30c8\u306e\u9178\u5316\u307e\u305f\u306f\u88ab\u6bd2\u306f\u3001\u6210\u819c\u901f\u5ea6\u3092\u4f4e\u4e0b\u3055\u305b\u3001\u30a2\u30fc\u30af\u653e\u96fb\u3092\u5f15\u304d\u8d77\u3053\u3057\u3001\u5bc6\u5ea6\u3092\u4f4e\u4e0b\u3055\u305b\u308b\u4e3b\u306a\u554f\u984c\u3067\u3042\u308b\u3002\u53cd\u5fdc\u6027\u30b9\u30d1\u30c3\u30bf\u30ea\u30f3\u30b0\u306e\u30b3\u30c4\u306f\u3001\u30bf\u30fc\u30b2\u30c3\u30c8\u8868\u9762\u3092\u6e05\u6d44\u306b\u4fdd\u3061\u3001\u300c\u30a2\u30ce\u30fc\u30c9\u6d88\u5931\u300d\u3092\u9632\u3050\u3053\u3068\u3067\u3042\u308a\u3001\u3053\u308c\u306f\u53cd\u5fdc\u6027\u30ac\u30b9\u306e\u5206\u5727\u3092\u5236\u5fa1\u3059\u308b\u3053\u3068\u306b\u76f4\u63a5\u95a2\u4fc2\u3057\u3066\u3044\u308b\u3002\u5f93\u6765\u306e\u30de\u30b0\u30cd\u30c8\u30ed\u30f3\u3067\u306f\u3001\u56f35 [10]\u306b\u793a\u3059\u3088\u3046\u306b\u3001\u53cd\u5fdc\u6027\u30ac\u30b9\u306e\u5206\u5727\u3068\u53cd\u5fdc\u6027\u30ac\u30b9\u6d41\u91cf\u306e\u30d2\u30b9\u30c6\u30ea\u30b7\u30b9\u30eb\u30fc\u30d7\u3092\u30d7\u30ed\u30c3\u30c8\u3059\u308b\u3053\u3068\u3067\u3053\u308c\u3092\u5b9f\u73fe\u3059\u308b\u3002\u5149\u5b66\u7279\u6027\u306f\u3001\u56f36[10,11]\u306b\u793a\u3059\u3088\u3046\u306b\u3001\u84b8\u7740\u901f\u5ea6\u3068\u53cd\u5fdc\u6027\u30ac\u30b9\u5206\u5727\u306b\u4f9d\u5b58\u3059\u308b\u3002\u521d\u671f\u306b\u306f\u3001\u91d1\u5c5e\u30bf\u30fc\u30b2\u30c3\u30c8\u3068\u306e\u8868\u9762\u53cd\u5fdc\u306b\u3088\u3063\u3066\u5927\u91cf\u306e\u53cd\u5fdc\u6027\u30ac\u30b9\u304c\u6d88\u8cbb\u3055\u308c\u308b\u3002\u53cd\u5fdc\u304c\u98fd\u548c\u3059\u308b\u3068\u3001\u30bf\u30fc\u30b2\u30c3\u30c8\u8868\u9762\u306f\u9178\u5316\u3055\u308c\u3001\u8ffd\u52a0\u306e\u53cd\u5fdc\u6027\u30ac\u30b9\u306f\u6d88\u8cbb\u3055\u308c\u306a\u304f\u306a\u308b\u305f\u3081\u3001O<sub>2<\/sub>\u4f4e\u6d41\u91cf\u3067\u3082\u5206\u5727\u306f\u4e0a\u6607\u3059\u308b\u3002\u3053\u306e\u5834\u5408\u3001\u84b8\u7740\u901f\u5ea6\u306f\u5927\u5e45\u306b\u4f4e\u4e0b\u3059\u308b\u3002\u30bf\u30fc\u30b2\u30c3\u30c8\u304c\u5b8c\u5168\u306b\u88ab\u6bd2\u3055\u308c\u308b\u3068\u3001O\u00a0<sub>2's<\/sub>\u5206\u5727\u306f\u6d41\u91cf\u3068\u3068\u3082\u306b\u76f4\u7dda\u7684\u306b\u5897\u52a0\u3059\u308b\u3002\u3053\u306e\u5834\u5408\u3001\u6d41\u91cf\u5236\u5fa1\u3068\u6210\u819c\u30d7\u30ed\u30bb\u30b9\u306f\u8ca0\u306e\u30b9\u30ed\u30fc\u30d7\u9818\u57df\u306b\u3042\u308b\u3079\u304d\u3067\u3042\u308b\u3002<\/p>\n<figure class=\"wp-block-image\"><img loading=\"lazy\" decoding=\"async\" class=\"wp-image-310\" src=\"https:\/\/vtcmagblog.com\/wp-content\/uploads\/2019\/02\/pmm_img5.jpeg\" sizes=\"auto, (max-width: 546px) 100vw, 546px\" srcset=\"https:\/\/vtcmagblog.com\/wp-content\/uploads\/2019\/02\/pmm_img5.jpeg 546w, https:\/\/vtcmagblog.com\/wp-content\/uploads\/2019\/02\/pmm_img5-300x192.jpeg 300w\" alt=\"\" width=\"546\" height=\"350\" \/><figcaption>\u56f35 \u53cd\u5fdc\u6027\u30b9\u30d1\u30c3\u30bf\u30ea\u30f3\u30b0\u306e\u30d2\u30b9\u30c6\u30ea\u30b7\u30b9\u30eb\u30fc\u30d7\u306e\u4f8b [10<\/figcaption><\/figure>\n<figure class=\"wp-block-image\"><img loading=\"lazy\" decoding=\"async\" class=\"wp-image-311\" src=\"https:\/\/vtcmagblog.com\/wp-content\/uploads\/2019\/02\/pmm_img6.jpeg\" sizes=\"auto, (max-width: 514px) 100vw, 514px\" srcset=\"https:\/\/vtcmagblog.com\/wp-content\/uploads\/2019\/02\/pmm_img6.jpeg 514w, https:\/\/vtcmagblog.com\/wp-content\/uploads\/2019\/02\/pmm_img6-300x224.jpeg 300w\" alt=\"\" width=\"514\" height=\"384\" \/><figcaption>\u56f36.\u30a2\u30eb\u30df\u30ca\u819c\u306e\u5149\u5b66\u7279\u6027\u306e\u84b8\u7740\u901f\u5ea6\u3068\u9178\u7d20\u5206\u5727\u4f9d\u5b58\u6027[10]\u3002<\/figcaption><\/figure>\n<p>\u30c7\u30e5\u30a2\u30eb\u30de\u30b0\u30cd\u30c8\u30ed\u30f3\u30b9\u30d1\u30c3\u30bf\u30ea\u30f3\u30b0\u306e\u30d2\u30b9\u30c6\u30ea\u30b7\u30b9\u66f2\u7dda\u306f\u307b\u307c\u540c\u3058\u306b\u898b\u3048\u308b\u304c\u3001\u307b\u3068\u3093\u3069\u306eIF\u30b7\u30b9\u30c6\u30e0\u3067\u306f\u3001\u53cd\u5fdc\u30ac\u30b9\u306e\u5206\u5727\u3068\u6d41\u91cf\u3092\u6700\u9069\u5024\u306b\u7dad\u6301\u3059\u308b\u305f\u3081\u306b\u3001\u4f55\u3089\u304b\u306e\u30af\u30ed\u30fc\u30ba\u30c9\u30eb\u30fc\u30d7\u5236\u5fa1\u307e\u305f\u306f\u30d7\u30e9\u30ba\u30de\u30a8\u30df\u30c3\u30b7\u30e7\u30f3\u30e2\u30cb\u30bf\u30fc\u5236\u5fa1\u304c\u7528\u3044\u3089\u308c\u3066\u3044\u308b[1,6,9]\u3002\u3044\u304f\u3064\u304b\u306e\u4f1a\u793e\u304c\u30af\u30ed\u30fc\u30ba\u30c9\u30eb\u30fc\u30d7\u5236\u5fa1\u88c5\u7f6e\u3092\u8ca9\u58f2\u3057\u3066\u3044\u308b\u3002\u30c1\u30e3\u30f3\u30d0\u30fc\u306e\u69cb\u6210\u4f8b\u3092\u56f37\u306b\u793a\u3059[6]\u3002\u3053\u306e\u30b7\u30b9\u30c6\u30e0\u3067\u306f\u3001\u30bf\u30fc\u30b2\u30c3\u30c8\u96fb\u5727\u306e\u8a2d\u5b9a\u70b9\u3068\u3001\u30bf\u30fc\u30b2\u30c3\u30c8\u8868\u9762\u3067\u767a\u751f\u3059\u308b\u5316\u5b66\u53cd\u5fdc\u306b\u8ffd\u5f93\u3059\u308b\u305f\u3081\u306e\u975e\u5e38\u306b\u9ad8\u901f\u306a\u30d5\u30e9\u30c3\u30af\u30b9\u5236\u5fa1\u5024\u3092\u4f7f\u7528\u3059\u308b\u3002\u8981\u3059\u308b\u306b\u3001\u5236\u5fa1\u88c5\u7f6e\u306f\u6210\u819c\u4e2d\u306e\u76ee\u6a19\u96fb\u5727\u3068\u8a2d\u5b9a\u5024\u3092\u6bd4\u8f03\u3057\u3001\u305d\u308c\u306b\u5fdc\u3058\u3066\u53cd\u5fdc\u30ac\u30b9\u6d41\u91cf\u3092\u8abf\u6574\u3059\u308b\u3002<\/p>\n<figure class=\"wp-block-image\"><img loading=\"lazy\" decoding=\"async\" class=\"wp-image-312\" src=\"https:\/\/vtcmagblog.com\/wp-content\/uploads\/2019\/02\/pmm_img7.jpeg\" sizes=\"auto, (max-width: 566px) 100vw, 566px\" srcset=\"https:\/\/vtcmagblog.com\/wp-content\/uploads\/2019\/02\/pmm_img7.jpeg 566w, https:\/\/vtcmagblog.com\/wp-content\/uploads\/2019\/02\/pmm_img7-300x197.jpeg 300w\" alt=\"\" width=\"566\" height=\"372\" \/><figcaption>\u56f37. \u30c7\u30e5\u30a2\u30eb\u30de\u30b0\u30cd\u30c8\u30ed\u30f3\u53cd\u5fdc\u30b9\u30d1\u30c3\u30bf\u7528\u9589\u30eb\u30fc\u30d7\u5236\u5fa1\u30c1\u30e3\u30f3\u30d0\u30fc\u69cb\u9020[6]\u3002<\/figcaption><\/figure>\n<p>\u5171\u30b9\u30d1\u30c3\u30bf\u30ea\u30f3\u30b0\u306b\u30c7\u30e5\u30a2\u30eb\u30de\u30b0\u30cd\u30c8\u30ed\u30f3\u3068IF\u96fb\u6e90\u3092\u4f7f\u7528\u3059\u308b\u5229\u70b9\u306f\u3001\u5404\u6210\u5206\u306e\u91cf\u3092\u6b63\u78ba\u306b\u5236\u5fa1\u3067\u304d\u308b\u3053\u3068\u3067\u3042\u308b[5]\u3002\u660e\u3089\u304b\u306b\u3001\u3053\u306e\u30d7\u30ed\u30bb\u30b9\u306b\u306f2\u3064\u306e\u30de\u30b0\u30cd\u30c8\u30ed\u30f3\u304c\u5fc5\u8981\u3067\u3042\u308b\u304c\u3001IF\u96fb\u6e90\u3092\u4f7f\u7528\u3059\u308b\u3053\u3068\u3067\u3001\u5404\u30bf\u30fc\u30b2\u30c3\u30c8\u306b\u4f9b\u7d66\u3055\u308c\u308b\u96fb\u529b\u3092\u5404\u30bf\u30fc\u30b2\u30c3\u30c8\u3054\u3068\u306b\u72ec\u7acb\u3057\u3066\u78ba\u5b9f\u306b\u8abf\u6574\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u308b\u3002\u3053\u308c\u306f\u3001\u76f8\u5bfe\u7684\u306a\u7d44\u6210\u3092\u3088\u308a\u5236\u5fa1\u3059\u308b\u3053\u3068\u306b\u3064\u306a\u304c\u308b\u3002\u56f38[5]\u306f\u3001IF\u96fb\u6e90\u3092\u4f7f\u7528\u3057\u305f\u30b3\u30b9\u30d1\u30c3\u30bf\u30ea\u30f3\u30b0\u306e\u30bb\u30c3\u30c8\u30a2\u30c3\u30d7\u3092\u793a\u3057\u3066\u3044\u308b\u3002\u3053\u306e\u69cb\u6210\u306f\u3001Ti\u304a\u3088\u3073Al\u30bf\u30fc\u30b2\u30c3\u30c8\u306a\u3089\u3073\u306bO\u00a0<sub>2<\/sub>\u53cd\u5fdc\u6027\u30ac\u30b9\u306f\u3001\u5b9a\u7fa9\u3055\u308c\u305fTiAlO\u00a0<sub>x<\/sub>\u5c48\u6298\u7387\u306e\u56f39\u306f\u3001\u5c48\u6298\u7387\u3092O\u00a0<sub>2<\/sub>\u5c48\u6298\u7387\u3092\u5236\u5fa1\u3059\u308b\u5206\u5727\u3002<\/p>\n<figure class=\"wp-block-image\"><img loading=\"lazy\" decoding=\"async\" class=\"wp-image-313\" src=\"https:\/\/vtcmagblog.com\/wp-content\/uploads\/2019\/02\/pmm_img8.jpeg\" sizes=\"auto, (max-width: 468px) 100vw, 468px\" srcset=\"https:\/\/vtcmagblog.com\/wp-content\/uploads\/2019\/02\/pmm_img8.jpeg 468w, https:\/\/vtcmagblog.com\/wp-content\/uploads\/2019\/02\/pmm_img8-300x226.jpeg 300w\" alt=\"\" width=\"468\" height=\"352\" \/><figcaption>\u56f38. IF\u96fb\u6e90\u3092\u7528\u3044\u305f\u30b3\u30b9\u30d1\u30c3\u30bf\u30ea\u30f3\u30b0\u88c5\u7f6e[5]\u3002<\/figcaption><\/figure>\n<figure class=\"wp-block-image\"><img loading=\"lazy\" decoding=\"async\" class=\"wp-image-314\" src=\"https:\/\/vtcmagblog.com\/wp-content\/uploads\/2019\/02\/pmm_img9.jpeg\" sizes=\"auto, (max-width: 444px) 100vw, 444px\" srcset=\"https:\/\/vtcmagblog.com\/wp-content\/uploads\/2019\/02\/pmm_img9.jpeg 444w, https:\/\/vtcmagblog.com\/wp-content\/uploads\/2019\/02\/pmm_img9-300x222.jpeg 300w\" alt=\"\" width=\"444\" height=\"328\" \/><figcaption>\u56f39. \u5171\u30b9\u30d1\u30c3\u30bf\u3055\u308c\u305fTiAlOx\u306e\u5c48\u6298\u7387\u3068\u9178\u7d20\u5206\u5727\u306e\u95a2\u4fc2[5]\u3002<\/figcaption><\/figure>\n<p>\u30c7\u30e5\u30a2\u30eb\u30de\u30b0\u30cd\u30c8\u30ed\u30f3\u30b9\u30d1\u30c3\u30bf\u30ea\u30f3\u30b0\u306f\u3001\u5149\u5b66\u591a\u5c64\u819c[9]\u3001TCO[4,12]\u3001\u6469\u64e6\u819c[13]\u306e\u6210\u819c\u306b\u3082\u4f7f\u7528\u3067\u304d\u308b\u3002\u56f310\u306b\u793a\u3059\u3088\u3046\u306b\u3001SiO\u00a0<sub>2<\/sub>\u00a0\/ \u30a2\u30eb\u00a0<sub>2<\/sub>\u00a0O\u00a0<sub>3<\/sub>\u53cd\u5c04\u9632\u6b62\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u3092\u65bd\u3057\u305f\u5f8c\u3001\u5404\u30bf\u30fc\u30b2\u30c3\u30c8\u4e0a\u3067\u57fa\u677f\u3092\u9806\u6b21\u79fb\u52d5\u3055\u305b\u305f\u3002ITO\u819c\u306e\u62b5\u6297\u7387\u304a\u3088\u3073\u5149\u900f\u904e\u7387\u306f\u3001\u30d1\u30eb\u30b9\u9577\u304a\u3088\u3073\u30d7\u30e9\u30ba\u30de\u5bc6\u5ea6\u306e\u307b\u304b\u3001\u5f93\u6765\u306e\u30d1\u30e9\u30e1\u30fc\u30bf\u3067\u3042\u308bO\u00a0<sub>2<\/sub>\u5206\u5727\u3068\u30bf\u30fc\u30b2\u30c3\u30c8\u306b\u5230\u9054\u3059\u308b\u30d1\u30ef\u30fc [12]\u30022\u3064\u306eIn\u00a0<sub>0.9<\/sub>\u00a0\u30b9\u30ca\u30c3\u30d7\u00a0<sub>0.1<\/sub>\u30d7\u30ed\u30bb\u30b9\u306eITO\u62b5\u6297\u7387\u3001\u30d1\u30eb\u30b9\u9577\u3001O\u00a0<sub>2<\/sub>\u30d5\u30ed\u30fc\u9593\u306e\u95a2\u4fc2\u306e\u76ee\u7684\u3092\u56f311\u306b\u793a\u3059[12]\u3002\u3053\u3053\u3067\u306f\u3001\u30d1\u30eb\u30b9\u9577\u306b\u5f37\u304f\u4f9d\u5b58\u3057\u306a\u304c\u3089\u30015m\u03a9.cm\u524d\u5f8c\u306e\u975e\u5e38\u306b\u7acb\u6d3e\u306a\u5024\u304c\u5f97\u3089\u308c\u3066\u3044\u308b\u3053\u3068\u304c\u308f\u304b\u308b\u3002<\/p>\n<figure class=\"wp-block-image\"><img loading=\"lazy\" decoding=\"async\" class=\"wp-image-315\" src=\"https:\/\/vtcmagblog.com\/wp-content\/uploads\/2019\/02\/pmm_img10.jpeg\" sizes=\"auto, (max-width: 528px) 100vw, 528px\" srcset=\"https:\/\/vtcmagblog.com\/wp-content\/uploads\/2019\/02\/pmm_img10.jpeg 528w, https:\/\/vtcmagblog.com\/wp-content\/uploads\/2019\/02\/pmm_img10-300x218.jpeg 300w\" alt=\"\" width=\"528\" height=\"384\" \/><figcaption>\u56f310 \u30c7\u30e5\u30a2\u30eb\u30de\u30b0\u30cd\u30c8\u30ed\u30f3\u30b9\u30d1\u30c3\u30bf\u30ea\u30f3\u30b0\u6cd5\u306b\u3088\u308a\u6210\u819c\u3055\u308c\u305fSiO2 \/ Al2O3\u53cd\u5c04\u7387\u4f4e\u6e1b\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u306e\u53cd\u5c04\u30b9\u30da\u30af\u30c8\u30eb[9]\u3002<\/figcaption><\/figure>\n<figure class=\"wp-block-image\"><img loading=\"lazy\" decoding=\"async\" class=\"wp-image-316\" src=\"https:\/\/vtcmagblog.com\/wp-content\/uploads\/2019\/02\/pmm_img11.jpeg\" sizes=\"auto, (max-width: 502px) 100vw, 502px\" srcset=\"https:\/\/vtcmagblog.com\/wp-content\/uploads\/2019\/02\/pmm_img11.jpeg 502w, https:\/\/vtcmagblog.com\/wp-content\/uploads\/2019\/02\/pmm_img11-300x182.jpeg 300w\" alt=\"\" width=\"502\" height=\"304\" \/><figcaption>\u56f311 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Vac. Sci. Technol. A 24(2) (2006) 309.<\/li>\n<li>W-M Gnehr\u3089\u3001\u7b2c48\u56de\u771f\u7a7a\u6210\u819c\u5b66\u4f1a\u5e74\u6b21\u5927\u4f1a\u8b1b\u6f14\u8ad6\u6587\u96c6(2005) 312.<\/li>\n<li>D J Christie\u3089, \u7b2c46\u56de\u771f\u7a7a\u6210\u819c\u5b66\u4f1a\u5e74\u6b21\u6280\u8853\u5927\u4f1a\u8b1b\u6f14\u8ad6\u6587\u96c6(2003) 393.<\/li>\n<li>L Lou\u3089\u3001Advanced Energy Industries, Inc.\u306e\u30db\u30ef\u30a4\u30c8\u30da\u30fc\u30d1\u30fc\u3002<\/li>\n<li>R DeGryse et al., VT&amp;C February 2008, 48.<\/li>\n<li>W D Sproul, 36th Annual Technical Conference Proceedings of the Society of Vacuum Coaters (1993) 504.<\/li>\n<li>J Strumpfel\u3089, 40th Annual Technical Conference Proceedings of Society of Vacuum Coaters (1997) 179.<\/li>\n<li>W D Sproul et al., J. Vac. Sci. Technol. A 13(3) (1995) 1198.<\/li>\n<li>W D Sproul and B E Sylvia, VT&amp;C, 2(8) (2001) 32.<\/li>\n<li>A I Rogozin et al., J. Vac. Sci. Technol. A 22(2) (2004) 349<\/li>\n<li>M Nordin et al., J. Vac. 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