{"id":806,"date":"2020-04-10T14:44:07","date_gmt":"2020-04-10T06:44:07","guid":{"rendered":"http:\/\/localhost\/theme20\/?page_id=3"},"modified":"2024-09-01T14:38:20","modified_gmt":"2024-09-01T06:38:20","slug":"\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u3068\u30b5\u30fc\u30d3\u30b9","status":"publish","type":"page","link":"https:\/\/www.naxauam.com\/ja\/\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u3068\u30b5\u30fc\u30d3\u30b9\/","title":{"rendered":"SPARK\u30ca\u30ce\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u6280\u8853"},"content":{"rendered":"

\u5730\u65b9\u306eR&D\u30e9\u30dc\u3068\u5de5\u5834\u306eQC\u30e9\u30dc\u3092\u6301\u3064Naxi\u306f\u3001\u4fe1\u983c\u6027\u306e\u9ad8\u3044\u30ab\u30b9\u30bf\u30de\u30a4\u30ba\u304a\u3088\u3073\u6a19\u6e96\u5316\u3055\u308c\u305fPVD\u30ca\u30ce\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u3092\u63d0\u4f9b\u3059\u308b\u305f\u3081\u306e\u5b8c\u74a7\u306a\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u7279\u6027\u8a55\u4fa1\u8a66\u9a13\u88c5\u7f6e\u3092\u6301\u3063\u3066\u3044\u307e\u3059\u3002\u30ca\u30ce\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u306e\u7d44\u6210\u5206\u6790\u3001\u7d50\u5408\u6027\u3001\u819c\u539a\u3001\u8868\u9762\u786c\u5ea6\u3001\u6469\u64e6\u3001\u7c97\u3055\u3001\u8010\u885d\u6483\u6027\u3001\u7d76\u7e01\u6027\u3001\u8010\u9ad8\u6e29\u6027\u306a\u3069\u306e\u30c6\u30b9\u30c8\u30c1\u30a7\u30c3\u30af\u3092\u63d0\u4f9b\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u307e\u3059\u3002<\/p>\n\n\n\n

Naxau PVD\u30ca\u30ce\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u7814\u7a76\u958b\u767a\u6280\u8853\u30d7\u30e9\u30c3\u30c8\u30d5\u30a9\u30fc\u30e0<\/h2>\n\n\n\n

\u30ca\u30af\u30bd\u30fc\u30fbPVD\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u6280\u8853\u30d7\u30e9\u30c3\u30c8\u30d5\u30a9\u30fc\u30e0<\/p>\n\n\n\n

\"\u30ca\u30c3\u30b7\u30e5\u30fb\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u5206\u6790\u7814\u7a76\u6240\"<\/figure>\n\n\n\n

<\/p>\n\n\n\n

\u7b2c7\u4e16\u4ee3\u30cf\u30a4\u30e9\u30a4\u30c8\u30a2\u30fc\u30afSPARK \u30c9\u30ed\u30c3\u30d7\u30ec\u30c3\u30c8\u30d5\u30ea\u30fcPVD\u30ca\u30ce\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0<\/h2>\n\n\n\n

\u7b2c7\u4e16\u4ee3\u30b9\u30d1\u30fc\u30af\u30c9\u30ed\u30c3\u30d7\u30d5\u30ea\u30fcPVD\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0<\/p>\n\n\n\n

\"\u30ca\u30ce\u30b7\u30fc\u30eb\u30c9\u7121\u6ef4\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\"<\/figure>\n\n\n\n

<\/p>\n\n\n\n

PVD\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u306e\u8868\u9762\u306f\u300110,000\u500d\u306e\u96fb\u5b50\u9855\u5fae\u93e1\u3067\u8089\u773c\u3067\u89b3\u5bdf\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u308b\u30de\u30eb\u30c1\u30a2\u30fc\u30af\u30a4\u30aa\u30f3\u30d7\u30ec\u30fc\u30c6\u30a3\u30f3\u30b0\u3068\u30de\u30b0\u30cd\u30c8\u30ed\u30f3\u30b9\u30d1\u30c3\u30bf\u30ea\u30f3\u30b0\u306f\u3001\u591a\u304f\u306e\u6db2\u6ef4\u306e\u8a73\u7d30\u3092\u898b\u308b\u3053\u3068\u306f\u3067\u304d\u307e\u305b\u3093\u3002<\/p>\n\n\n\n

\u30ca\u30ce\u6750\u6599\u3092\u6b63\u3057\u304f\u4f5c\u308b\u306b\u306f\u3001\u8089\u773c\u3067\u898b\u3048\u306a\u3044\u3082\u306e\u306b\u53d6\u308a\u7d44\u307e\u306a\u3051\u308c\u3070\u306a\u3089\u306a\u3044\u3002\u30ca\u30ce\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u306e\u8981\u306f\u5404\u30d7\u30e9\u30ba\u30de\u4e2d\u306e\u5206\u5b50\u30af\u30e9\u30b9\u30bf\u30fc\u3067\u3042\u308a\u3001\u30d7\u30e9\u30ba\u30de\u306b\u6b20\u9665\u304c\u3042\u308c\u3070\u3001\u305d\u3053\u304b\u3089\u6210\u9577\u3059\u308b\u30ca\u30ce\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u306b\u3082\u6b20\u9665\u304c\u751f\u3058\u308b\u3002\u30ca\u30ce\u30b7\u30fc\u30eb\u30c9\u306e\u79d1\u5b66\u8005\u305f\u3061\u306f\u3001\u6b20\u9665\u306e\u306a\u3044\u30d7\u30e9\u30ba\u30de\u304b\u3089\u5b8c\u74a7\u306a\u30ca\u30ce\u7d50\u6676\u304c\u6210\u9577\u3057\u3001\u53ef\u80fd\u306a\u9650\u308a\u6700\u9ad8\u306e\u30ca\u30ce\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u304c\u6210\u819c\u3055\u308c\u308b\u3053\u3068\u3092\u671f\u5f85\u3057\u3066\u3001\u6700\u3082\u6280\u8853\u7684\u306b\u56f0\u96e3\u306aSPARK\u9ad8\u8f1d\u5ea6\u30a2\u30fc\u30af\u6db2\u6ef4\u30d5\u30ea\u30fc\u30fb\u30ca\u30ce\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u306e\u958b\u767a\u306b\u4f55\u5e74\u3082\u7c98\u308a\u5f37\u304f\u53d6\u308a\u7d44\u3093\u3067\u304d\u305f\u3002SPARK 7\u306f\u30011\u30df\u30af\u30ed\u30f3\u306e\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u6db2\u6ef4\u304c5\u30df\u30af\u30ed\u30f3\u306e\u7cbe\u5ea6\u304c\u8981\u6c42\u3055\u308c\u308b\u6a5f\u68b0\u52a0\u5de5\u88fd\u54c1\u3092\u7834\u58ca\u3059\u308b\u3053\u3068\u304c\u308f\u304b\u3063\u3066\u3044\u308b\u305f\u3081\u3001\u9577\u671f\u9593\u306b\u308f\u305f\u3063\u3066PVD\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u88fd\u54c1\u306e\u5b89\u5b9a\u6027\u3092\u4fdd\u8a3c\u3057\u307e\u3059\u3002\u5de5\u5177\u306e\u30a8\u30c3\u30b8\u306b1\u3064\u306e\u6b20\u9665\u304c\u3042\u308b\u3068\u3001\u52a0\u5de5\u3055\u308c\u308b\u90e8\u54c1\u306b\u5207\u524a\u30b9\u30b8\u304c\u767a\u751f\u3057\u307e\u3059\u3002\u307e\u305f\u3001\u91d1\u578b\u306b\u6db2\u6ef4\u304c1\u3064\u4ed8\u7740\u3059\u308b\u3060\u3051\u3067\u3001\u52a0\u5de5\u3055\u308c\u305f\u88fd\u54c1\u306b\u30b7\u30df\u304c\u767a\u751f\u3059\u308b\u3002<\/p>\n\n\n\n

\u30c0\u30d0\u30b3\u30f3\u30dd\u30b8\u30c3\u30c8PVD\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u6280\u8853<\/h2>\n\n\n\n

DURA\u30b3\u30f3\u30dd\u30b8\u30c3\u30c8PVD\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u6280\u8853<\/p>\n\n\n\n

\"\u30c0\u30d0\u30fb\u30b3\u30f3\u30dd\u30b8\u30c3\u30c8\u30fb\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u6280\u8853\"<\/figure>\n\n\n\n

<\/p>\n\n\n\n

\u30ca\u30b7PVD\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u30a6\u30a3\u30b6\u30fc\u30c9\uff08\u90e8\u5206\uff09<\/h2>\n\n\n\n

\u53b3\u9078\u3055\u308c\u305f\u30ca\u30af\u30bd\u30fc\u306ePVD\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0<\/p>\n\n\n\n

\n

\u5207\u524a\u5de5\u5177\u7528\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0<\/h3>\n<\/td><\/tr>

\u4fdd\u8b77\u5c64<\/td>\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0<\/td>\u30c7\u30e5\u30ed\u30e1\u30fc\u30bf\u30fc
(HV)<\/td>		\u819c\u539a
(\u03bcm\uff09<\/td>		\u6297\u9178\u5316\u6e29\u5ea6
(\u00b0C)<\/td>		\u6469\u64e6\u4fc2\u6570<\/td>\u5916\u89b3 \u8272<\/td>\u9069\u7528\u5206\u91ce<\/td><\/tr>
TN<\/td>\u30c1\u30bf\u30f3<\/td>2000<\/td>1.0~3.0<\/td>600<\/td>0.25<\/td>\u91d1\u8272<\/td>\u30bf\u30c3\u30d7\u306e\u4e00\u822c\u92fc\u6750\u52a0\u5de5<\/td><\/tr>
TiCN<\/td>TiCN<\/td>3800<\/td>1.0~3.0<\/td>450<\/td>0.2<\/td>\u60b2\u89b3\u7684<\/td>\u30b9\u30c6\u30f3\u30ec\u30b9\u30fb\u666e\u901a\u92fc\u30bf\u30c3\u30d7\u306e\u7d20\u6750\u52a0\u5de5<\/td><\/tr>
TiAlN<\/td>TiAlN<\/td>3000<\/td>1.0~3.0<\/td>800<\/td>0.4<\/td>\u7d2b\u304c\u304b\u3063\u305f\u9ed2<\/td>\u4e00\u822c\u91d1\u578b\u92fc\u5207\u65ad<\/td><\/tr>
\u5348\u524d<\/td>AlTi\u30d9\u30fc\u30b9<\/td>3300<\/td>1.5~3.0<\/td>900<\/td>0.4<\/td>\u7070\u9ed2\u8272<\/td>HRC\u226440\u91d1\u578b\u92fc\u3001\u30b9\u30c6\u30f3\u30ec\u30b9\u92fc\u5207\u65ad\u52a0\u5de5<\/td><\/tr>
\u7a7a\u5bfe\u5730\u30df\u30b5\u30a4\u30eb<\/td>AlTiSi\u30d9\u30fc\u30b9<\/td>3500<\/td>1.5~3.0<\/td>1000<\/td>0.35<\/td>\u7070\u9ed2\u8272<\/td>HRC\u226445\u91d1\u578b\u92fc\u3001\u30b9\u30c6\u30f3\u30ec\u30b9\u92fc\u5207\u65ad\u52a0\u5de5<\/td><\/tr>
HM<\/td>TiSi\u30d9\u30fc\u30b9<\/td>3800<\/td>1.0~3.0<\/td>1100<\/td>0.3<\/td>\u30d6\u30ed\u30f3\u30ba\u8272<\/td>\u30b9\u30c6\u30f3\u30ec\u30b9\u92fc\u3001\u91d1\u578b\u92fc\u3001\u30c1\u30bf\u30f3\u5408\u91d1\u52a0\u5de5<\/td><\/tr>
\u30cf\u30a4\u30e1\u30e2\u30ea\u30a8\u30ea\u30a2<\/td>TiSi\u30d9\u30fc\u30b9<\/td>4200<\/td>1.5~3.0<\/td>1100<\/td>0.3<\/td>\u30d6\u30ed\u30f3\u30ba\u8272<\/td>\u30c1\u30bf\u30f3\u5408\u91d1\u3001\u7c89\u672b\u51b6\u91d1\u92fc\u3001HRC30~55\u91d1\u578b\u92fc\u52a0\u5de5<\/td><\/tr>
\u304b\u304f\u306e\u3046<\/td>TiAlSi\u30d9\u30fc\u30b9<\/td>3500<\/td>4~6<\/td>1000<\/td>0.3<\/td>\u91d1\u8272<\/td>\u30d6\u30ec\u30fc\u30c9\u7528\u6a21\u5023CVD\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0<\/td><\/tr>
APS<\/td>AlCr\u30d9\u30fc\u30b9<\/td>3500<\/td>1.5~3.0<\/td>1100<\/td>0.3<\/td>\u7070\u9ed2\u8272<\/td>HRC \u2265 40 \u91d1\u578b\u92fc\u5207\u65ad\u52a0\u5de5\u3001\u30b9\u30c6\u30f3\u30ec\u30b9\u92fc\u52a0\u5de5<\/td><\/tr>
AG<\/td>AlCr\u30d9\u30fc\u30b9<\/td>3500<\/td>0.5~1<\/td>1000<\/td>0.3<\/td>\u7070\u9ed2\u8272<\/td>\u30b9\u30c6\u30f3\u30ec\u30b9\u306e\u30cf\u30a4\u30e9\u30a4\u30c8\u3001\u7279\u6b8a\u9ad8\u5149\u6ca2\u52a0\u5de5<\/td><\/tr>
AMS<\/td>TiAlCr\u30d9\u30fc\u30b9<\/td>3600<\/td>1.0~5.0<\/td>1000<\/td>0.3<\/td>\u7070\u9ed2\u8272<\/td>\u30db\u30d6\u5207\u308a\u3001\u69d8\u3005\u306a\u4f5c\u696d\u6761\u4ef6\u7528\u306e\u30ae\u30e4\u30b7\u30a7\u30fc\u30d4\u30f3\u30b0\u30ab\u30c3\u30bf\u30fc\u3001\u30d5\u30e9\u30a4\u30b9\u30ab\u30c3\u30bf\u30fc\u3001\u30a4\u30f3\u30b5\u30fc\u30c8HRC\u226450\u91d1\u578b\u92fc\u3001\u92f3\u9244\u306a\u3069\u3002<\/td><\/tr>
\u30a8\u30fc\u30a8\u30e0\u30c6\u30a3\u30fc<\/td>AlCr\u30d9\u30fc\u30b9<\/td>4000<\/td>1.0~3.0<\/td>1000<\/td>0.3<\/td>\u7070\u9ed2\u8272<\/td>\u30db\u30d6\u76e4\u304a\u3088\u3073\u30b7\u30a7\u30fc\u30d4\u30f3\u30b0\u30c4\u30fc\u30eb\u306e\u9ad8\u901f\u30c9\u30e9\u30a4\u5207\u524a<\/td><\/tr>
\u30a8\u30fc\u30a8\u30e0\u30a8\u30eb<\/td>AlTi\u30d9\u30fc\u30b9<\/td>3000<\/td>1.0~5.0<\/td>1000<\/td>0.4<\/td>\u9244<\/td>HRC\u226445\u91d1\u578b\u92fc\u3001\u30b9\u30c6\u30f3\u30ec\u30b9\u92fc\u5207\u65ad\u52a0\u5de5<\/td><\/tr>
AMR<\/td>AlTiSi\u30d9\u30fc\u30b9<\/td>3500<\/td>1.0~5.0<\/td>1100<\/td>0.35<\/td>\u30d6\u30ed\u30f3\u30ba\u8272<\/td>HRC55\u4ee5\u4e0a\u306e\u713c\u5165\u308c\u92fc\u7528<\/td><\/tr>
AU<\/td>AlTiSi\u30d9\u30fc\u30b9<\/td>3500<\/td>1.0~5.0<\/td>1100<\/td>0.35<\/td>\u30d6\u30ed\u30f3\u30ba\u8272<\/td>PVD\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u306e\u30b9\u30c6\u30f3\u30ec\u30b9\u88fd\u30d6\u30ec\u30fc\u30c9<\/td><\/tr>
DX<\/td>CrAlTi\u30d9\u30fc\u30b9<\/td>3200<\/td>1.0~5.0<\/td>1000<\/td>0.4<\/td>\u60b2\u89b3\u7684<\/td>HRC55 \u307e\u3067\u306e\u30d5\u30e9\u30a4\u30b9\u52a0\u5de5\u304a\u3088\u3073\u30c9\u30ea\u30eb\u52a0\u5de5\u306b\u4f7f\u7528\u53ef\u80fd<\/td><\/tr>
DA<\/td>ZrN\u30d9\u30fc\u30b9<\/td>3000<\/td>1.0~3.0<\/td>1000<\/td>0.3<\/td>\u660e\u308b\u3044\u9ec4\u91d1\u8272<\/td>\u975e\u9244\u91d1\u5c5e\u52a0\u5de5\u3001\u30b9\u30c6\u30f3\u30ec\u30b9\u52a0\u5de5\u3001\u30c1\u30bf\u30f3\u5408\u91d1\u52a0\u5de5\u3001\u9ad8\u6e29\u5408\u91d1\u52a0\u5de5<\/td><\/tr>
AMD<\/td>AlTiSi\u30d9\u30fc\u30b9<\/td>4000<\/td>1.0~3.0<\/td>1200<\/td>0.35<\/td>\u7070\u9ed2\u8272<\/td>\u9ad8\u786c\u5ea6\u91d1\u578b\u92fc\u52a0\u5de5\u3001\u30c1\u30bf\u30f3\u5408\u91d1\u52a0\u5de5\u3001\u9ad8\u6e29\u5408\u91d1\u52a0\u5de5<\/td><\/tr>
DH<\/td>CrAlSi\u30d9\u30fc\u30b9<\/td>3500<\/td>1.0~5.0<\/td>1100<\/td>0.35<\/td>\u30d6\u30ed\u30f3\u30ba\u8272<\/td>\u30b9\u30c6\u30f3\u30ec\u30b9\u92fc\u30d5\u30e9\u30a4\u30b9\u52a0\u5de5\u3001\u30c1\u30bf\u30f3\u5207\u65ad<\/td><\/tr>
DP<\/td>AlCr\u30d9\u30fc\u30b9<\/td>3200<\/td>1.0~5.0<\/td>1000<\/td>0.3<\/td>\u7070\u9ed2\u8272<\/td>\u30db\u30d6\u5207\u308a\u5de5\u5177\u306e\u9ad8\u901f\u4e7e\u5f0f\u5207\u524a\u3001\u30b9\u30c6\u30f3\u30ec\u30b9\u92fc\u3001\u30c1\u30bf\u30f3\u5408\u91d1\u3001\u91d1\u578b\u92fc\u52a0\u5de5\u7528\u8d85\u786c\u5de5\u5177\u3002<\/td><\/tr>
DT<\/td>AlCrTiSi\u30d9\u30fc\u30b9<\/td>3600<\/td>0.5~3<\/td>1100<\/td>0.3<\/td>\u30d6\u30ed\u30f3\u30ba\u8272<\/td>52\uff5e65HRC\u306e\u9ad8\u786c\u5ea6\u91d1\u578b\u7528\u92fc\u3001\u958b\u767a\u53ef\u80fd\u5408\u91d1\u3001\u8010\u6469\u8017\u6750\u6599\u3001\u30bf\u30f3\u30b0\u30b9\u30c6\u30f3\u9285\u5408\u91d1\u3001\u8907\u5408\u6750\u6599<\/td><\/tr>
TX-S<\/td>AlTi\u30d9\u30fc\u30b9<\/td>3000<\/td>1.0~5.0<\/td>600<\/td>0.35<\/td>\u91d1\u8272<\/td>HRC40\u307e\u3067\u306e\u70ad\u7d20\u92fc\u30d6\u30ec\u30fc\u30c9<\/td><\/tr>
TiB2<\/td>TiB2<\/td>3000<\/td>1.0~3.0<\/td>600<\/td>0.3<\/td>fig.\u53cd\u52d5\u7684<\/td>\u975e\u9244\u91d1\u5c5e\u52a0\u5de5\u3001\u30d7\u30e9\u30b9\u30c1\u30c3\u30af\u52a0\u5de5<\/td><\/tr>
\n

\u30ab\u30fc\u30dc\u30f3\u30d5\u30a3\u30eb\u30e0\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0<\/h3>\n<\/td><\/tr>

\u4fdd\u8b77\u5c64<\/td>\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0<\/td>\u30c7\u30e5\u30ed\u30e1\u30fc\u30bf\u30fc
(HV)<\/td>		\u819c\u539a
(\u03bcm\uff09<\/td>		\u6297\u9178\u5316\u6e29\u5ea6
(\u00b0C)<\/td>		\u6469\u64e6\u4fc2\u6570<\/td>\u5916\u89b3 \u8272<\/td>\u9069\u7528\u5206\u91ce<\/td><\/tr>
C H<\/td>a-C:H<\/td>1500-2500<\/td>1~5<\/td>300<\/td>0.1~0.2<\/td>\u9244<\/td>\u30ac\u30bd\u30ea\u30f3\u30a8\u30f3\u30b8\u30f3\u306e\u30d0\u30eb\u30d6\u30c8\u30ec\u30a4\u30f3\u3068\u30d4\u30b9\u30c8\u30f3\u3001\u30dd\u30f3\u30d7\u3001\u30b3\u30f3\u30d7\u30ec\u30c3\u30b5\u30fc\u3001\u30d9\u30a2\u30ea\u30f3\u30b0\u5916\u8f2a\u306a\u3069\u3002<\/td><\/tr>
C HS<\/td>a-C:H:Si<\/td>1500-2500<\/td>1~5<\/td>400<\/td>0.1~0.2<\/td>\u9244<\/td>\u30d7\u30e9\u30b9\u30c1\u30c3\u30af\u5c04\u51fa\u6210\u5f62\u647a\u52d5\u90e8\u54c1\u3001\u30a2\u30eb\u30df\u677f\u30d7\u30ec\u30b9\u91d1\u578b\u3001\u533b\u7642\u90e8\u54c1\u7b49<\/td><\/tr>
C RH<\/td>CrN+a-C:H<\/td>1500-2500<\/td>2~5<\/td>350<\/td>0.1~0.2<\/td>\u9244<\/td>\u30c7\u30a3\u30fc\u30bc\u30eb\u30a8\u30f3\u30b8\u30f3\u90e8\u54c1\u3001\u8edf\u8cea\u57fa\u6750\uff08\u30a2\u30eb\u30df\u30cb\u30a6\u30e0\u3084\u9285\u306a\u3069\uff09\u3001\u30dd\u30f3\u30d7\u3001\u30b3\u30f3\u30d7\u30ec\u30c3\u30b5\u30fc\u306a\u3069\u3002<\/td><\/tr>
C HW<\/td>WC\/C<\/td>1000-1500<\/td>1~4<\/td>300<\/td>0.1~0.2<\/td>\u7070\u9ed2\u8272<\/td>\u6b6f\u8eca\u3084\u30dc\u30fc\u30eb\u30d9\u30a2\u30ea\u30f3\u30b0\u3001\u9ad8\u7cbe\u5ea6\u5185\u71c3\u6a5f\u95a2\u90e8\u54c1\u306a\u3069\u3002<\/td><\/tr>
C TA<\/td>\u30bfC<\/td>5000<\/td>0.2~2<\/td>500<\/td>0.1~0.2<\/td>\u660e\u308b\u3044\u8272\u307e\u305f\u306f\u30b0\u30ec\u30fc\u30d6\u30e9\u30c3\u30af<\/td>\u975e\u9244\u91d1\u5c5e\u3001\u5408\u6210\u7d20\u6750\u3001\u6709\u6a5f\u7d20\u6750\u306a\u3069\u306e\u7a74\u3042\u3051\u3001\u30d5\u30e9\u30a4\u30b9\u52a0\u5de5\u3001\u3055\u3089\u7a74\u3042\u3051\u3001\u30ea\u30fc\u30de\u52a0\u5de5\u7528\u306e\u52a0\u5de5\u5de5\u5177\u3002<\/td><\/tr>
C A<\/td>a-C<\/td>3000<\/td>1~5<\/td>400<\/td>0.1~0.2<\/td>\u7070\u9ed2\u8272<\/td>\u30a2\u30eb\u30df\u30b7\u30fc\u30c8\u306e\u30c8\u30ea\u30df\u30f3\u30b0\u3001\u30d7\u30e9\u30b9\u30c1\u30c3\u30af\u5c04\u51fa\u6210\u5f62\u3001\u30a8\u30b8\u30a7\u30af\u30bf\u30fc\u30d4\u30f3\u3001\u30ac\u30a4\u30c9\u30d4\u30f3\u3001\u30d6\u30c3\u30b7\u30f3\u30b0\u3001\u91d1\u578b\u7528\u647a\u52d5\u90e8\u54c1\u306a\u3069\u3002<\/td><\/tr>
\u30c0\u30a4\u30a2<\/td>\u30c0\u30a4\u30e4\u30e2\u30f3\u30c9<\/td>10000<\/td>1.0~12<\/td>600<\/td>0.02~0.1<\/td>\u30c0\u30fc\u30af\u30b0\u30ec\u30fc<\/td>\u30b0\u30e9\u30d5\u30a1\u30a4\u30c8, \u8907\u5408\u6750\u6599, \u70ad\u7d20\u7e4a\u7dad<\/td><\/tr>
\n

\u91d1\u578b\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0<\/h3>\n<\/td><\/tr>

\u4fdd\u8b77\u5c64<\/td>\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0<\/td>\u30c7\u30e5\u30ed\u30e1\u30fc\u30bf\u30fc
(HV)<\/td>		\u819c\u539a
(\u03bcm\uff09<\/td>		\u6297\u9178\u5316\u6e29\u5ea6
(\u00b0C)<\/td>		\u6469\u64e6\u4fc2\u6570<\/td>\u5916\u89b3 \u8272<\/td>\u9069\u7528\u5206\u91ce<\/td><\/tr>
\u30c8\u30e9\u30f3\u30b6\u30af\u30b7\u30e7\u30f3\u3057\u3087\u308a\u30cd\u30c3\u30c8\u30ef\u30fc\u30af<\/td>CrN<\/td>2000<\/td>4~10<\/td>700<\/td>0.4<\/td>\u305d\u3046\u306f\u304f<\/td>\u30c1\u30bf\u30f3\u71b1\u9593\u935b\u9020\u3001\u30a2\u30eb\u30df\u677f\u30d7\u30ec\u30b9<\/td><\/tr>
\u6025\u6027\u653e\u5c04\u7dda\u969c\u5bb3<\/td>CrAlTi\u30d9\u30fc\u30b9<\/td>3600<\/td>4~7<\/td>1000<\/td>0.6<\/td>\u7070\u9ed2\u8272<\/td>\u9ad8\u5f37\u5ea6\u677f\u30d7\u30ec\u30b9<\/td><\/tr>
AMC<\/td>CrAlTi\u30d9\u30fc\u30b9<\/td>3800<\/td>4~7<\/td>400<\/td>0.2<\/td>\u30ed\u30fc\u30ba\u30b4\u30fc\u30eb\u30c9<\/td>\u30b9\u30c6\u30f3\u30ec\u30b9\u91d1\u578b\u30d7\u30ec\u30b9<\/td><\/tr>
\u30a2\u30fc\u30d7<\/td>CrAlTiN\u30d9\u30fc\u30b9<\/td>3600<\/td>3~5<\/td>1100<\/td>0.5<\/td>\u7070\u9ed2\u8272<\/td>\u30b9\u30c6\u30f3\u30ec\u30b9\u92fc\u30db\u30c3\u30c8\u30b9\u30bf\u30f3\u30d7\u3001\u30d5\u30a1\u30a4\u30f3\u30d6\u30e9\u30f3\u30ad\u30f3\u30b0\u3001\u30d0\u30fc\u30d1\u30f3\u30c1\u306a\u3069<\/td><\/tr>
\u30a2\u30fc\u30af<\/td>CrN\u30d9\u30fc\u30b9<\/td>1800<\/td>3~5<\/td>600<\/td>0.6<\/td>\u305d\u3046\u306f\u304f<\/td>\u30d7\u30e9\u30b9\u30c1\u30c3\u30af\u91d1\u578b\u3001\u534a\u5c0e\u4f53\u5305\u88c5\u91d1\u578b \u6c4e\u7528\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0<\/td><\/tr>
ARD<\/td>CrO\u30d9\u30fc\u30b9<\/td>2800<\/td>3~6<\/td>1200<\/td>0.6<\/td>\u30d6\u30e9\u30c3\u30af\u30ab\u30e9\u30fc<\/td>\u9ad8\u6e29\u8010\u6469\u8017\u90e8\u54c1\u3001\u9ad8\u6e29\u96fb\u6c17\u7d76\u7e01\u90e8\u54c1\u3001\u8010\u98df\u30fb\u8010\u6469\u8017\u90e8\u54c1<\/td><\/tr>
DE<\/td>CrAl\u30d9\u30fc\u30b9<\/td>3000<\/td>4~7<\/td>1000<\/td>0.5<\/td>\u7070\u9ed2\u8272<\/td>\u2264 500MPa \u4e00\u822c\u92fc\u677f\u30b9\u30bf\u30f3\u30d4\u30f3\u30b0\u3001\u975e\u9244\u91d1\u5c5e\u52a0\u5de5\u91d1\u578b\u3001\u30c0\u30a4\u30ab\u30b9\u30c8\u91d1\u578b<\/td><\/tr>
\u30c7\u30c3\u30af<\/td>CrAlTi\u30d9\u30fc\u30b9<\/td>3800<\/td>4~7<\/td>400<\/td>0.2<\/td>\u30ed\u30fc\u30ba\u30b4\u30fc\u30eb\u30c9<\/td>\u30b9\u30c6\u30f3\u30ec\u30b9\u91d1\u578b\u30d7\u30ec\u30b9\u3001\u9ad8\u5f37\u5ea6\u677f\u3001\u6df1\u7d5e\u308a\u30bf\u30a4\u30d7\u52a0\u5de5\u91d1\u578b<\/td><\/tr><\/tbody><\/table><\/figure>","protected":false},"excerpt":{"rendered":"

NanoShield SPARK 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