{"id":5188,"date":"2025-02-10T08:50:05","date_gmt":"2025-02-10T00:50:05","guid":{"rendered":"https:\/\/www.naxauam.com\/?post_type=docs&p=5188"},"modified":"2025-02-10T15:30:24","modified_gmt":"2025-02-10T07:30:24","password":"","slug":"ta-c-\u30c0\u30a4\u30e4\u30e2\u30f3\u30c9\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u306e\u8d85\u4f4e\u6e29\u84b8\u7740","status":"publish","type":"docs","link":"https:\/\/www.naxauam.com\/ja\/\u8af8\u6ce8\u610f\/ta-c-\u30c0\u30a4\u30e4\u30e2\u30f3\u30c9\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u306e\u8d85\u4f4e\u6e29\u84b8\u7740\/","title":{"rendered":"ta-C\u4f4e\u6e29\u30c0\u30a4\u30e4\u30e2\u30f3\u30c9\u30fb\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0"},"content":{"rendered":"

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\"\"<\/figure>\n\n\n\n

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\"\"<\/figure>\n\n\n\n

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1<\/td>94% 91%<\/td><\/td><\/tr>
2<\/td>94% 91%<\/td><\/td><\/tr>
3<\/td>94% 92%<\/td><\/td><\/tr>
4<\/td>94% 91%<\/td><\/td><\/tr>
5<\/td>94% 91%<\/td><\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n
\"\"<\/figure>\n\n\n\n

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\"\"<\/figure>\n\n\n\n

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\"\"<\/figure>\n\n\n\n

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\"\"<\/figure>\n\n\n\n

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\"\"<\/figure>\n\n\n\n

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\u73fe\u5728\u306esp3\u542b\u6709\u91cf\u306f\u3001\u30e9\u30de\u30f3\u30c6\u30b9\u30c8\u306e\u3088\u3046\u306a\u76f8\u5bfe\u7684\u306a\u30c6\u30b9\u30c8\u65b9\u6cd5\u3067\u3042\u308b\u3053\u3068\u306b\u6ce8\u610f\u3059\u3079\u304d\u3067\u3042\u308b\u3002sp3\u306e\u7d76\u5bfe\u91cf\u3092\u6b63\u78ba\u306b\u6e2c\u5b9a\u3059\u308b\u3053\u3068\u306f\u3067\u304d\u306a\u3044\u3002<\/p>\n\n\n\n

\u307e\u305f\u3001\u819c\u539a\u304c1\u30df\u30af\u30ed\u30f3\u4ee5\u4e0b\u3067\u3042\u308b\u305f\u3081\u3001ta-C\u30c0\u30a4\u30e4\u30e2\u30f3\u30c9\u819c\u306e\u786c\u5ea6\u3092\u6b63\u78ba\u306b\u6e2c\u5b9a\u3059\u308b\u3053\u3068\u306f\u3067\u304d\u307e\u305b\u3093\u3002\u901a\u5e38\u306fsp3\u306e\u6bd4\u7387\u304b\u3089\u819c\u306e\u786c\u3055\u3092\u63a8\u6e2c\u3057\u307e\u3059\u3002\u307e\u305f\u3001\u901a\u5e38\u306eTa-C\u819c\u539a\u306e\u5834\u5408\u3001\u819c\u306e\u5fae\u5c0f\u786c\u5ea6\u3092\u76ee\u8996\u3067\u6e2c\u5b9a\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u307e\u3059\u3002<\/p>\n\n\n\n

\u63a5\u7740\u8a66\u9a13<\/h3>\n\n\n\n
\u30e1\u30a4\u30af<\/td>\u819c\u539a (nm)<\/td>\u9650\u754c\u8377\u91cd\uff08N\uff09<\/td><\/tr>
\u30ca\u30a4\u30ed\u30f3<\/td>20<\/td>30<\/td><\/tr>
\u6a39\u8102\u6027<\/td>20<\/td>25<\/td><\/tr>
\u9ad8\u901f\u5ea6\u92fc<\/td>200<\/td>75<\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n

\u305d\u306e\u4ed6\u306e\u30c6\u30b9\u30c8<\/h3>\n\n\n\n
    \n
  • 5% \u5869\u6c34\u5674\u9727\u8a66\u9a13\uff1a120\u6642\u9593<\/li>\n\n\n\n
  • \u30c0\u30d6\u30eb85\u30c6\u30b9\u30c8\uff1a48\u6642\u9593<\/li>\n\n\n\n
  • 1KG\u6d88\u3057\u30b4\u30e0\u30c6\u30b9\u30c8\uff1a5000\u56de<\/li>\n\n\n\n
  • \u53ef\u8996\u5149\u7dda\u900f\u904e\u7387\u8a66\u9a13\uff1a90%\u4ee5\u4e0a<\/li>\n\n\n\n
  • \u7d30\u80de\u6bd2\u6027\u8a66\u9a13\uff1aISO10993-5\u3068GB\/T16886.5\u6a19\u6e96\u306e\u8981\u6c42\u306b\u5f93\u3044\u3001\u30c6\u30c8\u30e9\u30e1\u30c1\u30eb\u30a2\u30be\u30fc\u30eb\u5869\u5fae\u91cf\u9175\u7d20\u53cd\u5fdc\u6bd4\u8272\u6cd5\uff08MTT\u6cd5\uff09\uff1a\u7d30\u80de\u6bd2\u6027\u306f0\u7d1a\u3067\u3001\u7d14\u30c1\u30bf\u30f3\u3088\u308a\u82e5\u5e72\u4f4e\u3044\u3002<\/li>\n\n\n\n
  • \u6eb6\u8840\u8a66\u9a13\uff1aYY\/T0127.1-93\u306e\u6a19\u6e96\u306b\u3088\u308b\u3068\u3001\u9ed2\u925b\u7c89\u672b\u30b0\u30eb\u30fc\u30d7\u306e\u6eb6\u8840\u7387\u306f3.08%\u3067\u3042\u308a\u3001\u6eb6\u8840\u52b9\u679c\u306e\u306a\u3044\u6750\u6599\u3067\u3042\u308b\uff1b<\/li>\n<\/ul>\n\n\n\n

    ta-C\u306e\u5fdc\u7528<\/h2>\n\n\n\n

    \u307b\u3068\u3093\u3069\u306e\u5834\u5408\u3001\u7570\u306a\u308b\u539a\u3055\u306eta-C\u306f\u7570\u306a\u308b\u9069\u7528\u9818\u57df\u306b\u5bfe\u5fdc\u3059\u308b\u300210\u30df\u30af\u30ed\u30f3\u4ee5\u4e0a\u306e\u8d85\u539a\u819c\u306e\u5834\u5408\u30013000HV\u4ee5\u4e0a\u306e\u5fae\u5c0f\u786c\u5ea6\u306f\u901a\u5e38\u3001\u5f8c\u51e6\u7406\u3092\u5fc5\u8981\u3068\u3059\u308b\u3002<\/p>\n\n\n\n

    \u9ad8\u71b1\u4f1d\u5c0e\u6027 \u5316\u5b66\u7684\u306b\u5b89\u5b9a \u9ad8\u5f3e\u6027\u7387 \u9ad8\u786c\u5ea6 \u8010\u6469\u8017\u6027 \u30b9\u30d1\u30c3\u30bf\u30ea\u30f3\u30b0\u8010\u6027 \u6975\u3081\u3066\u9ad8\u3044\u30ad\u30e3\u30ea\u30a2\u79fb\u52d5\u5ea6\uff08\u96fb\u5b50\u3068\u6b63\u5b54\uff09 \u5927\u304d\u306a\u7981\u5236\u5e2f\u57df\u5e45 \u4f4e\u30d5\u30e5\u30b8\u30c6\u30a3\u30d6\u30d1\u30ef\u30fc \u7d2b\u5916\u7dda\u611f\u5ea6\uff08\u5438\u53ce\uff09 \u8d64\u5916\u7dda\u900f\u904e\u6027 \u9ad8\u96fb\u6c17\u62b5\u6297\u7387 \u9ad8\u8a98\u96fb\u7387 \u9ad8\u30d6\u30ec\u30fc\u30af\u30c0\u30a6\u30f3\u70b9 \u6c34\u7d20\u30d5\u30ea\u30fc \u8d85\u8584\u819c \u8ca0\u306e\u96fb\u5b50\u89aa\u548c\u529b\u30dd\u30c6\u30f3\u30b7\u30e3\u30eb\uff08\u30ef\u30a4\u30c9\u30aa\u30d7\u30c6\u30a3\u30ab\u30eb\u30d0\u30f3\u30c9\u30ae\u30e3\u30c3\u30d7\uff09 \u9ad8\u5fe0\u5b9f\u5ea6\u306e\u97f3\u6ce2\u306e\u9ad8\u901f\u4f1d\u64ad \u8010\u71b1\u885d\u6483\u6027\u9759\u83cc \u30bb\u30eb\u30d5\u30af\u30ea\u30fc\u30cb\u30f3\u30b0 <\/p>\n\n\n\n

    \u30ca\u30ce\u30b9\u30b1\u30fc\u30eb\u5149\u5b66\u4fee\u98fe\u30d5\u30a3\u30eb\u30e0\uff08\u9ad8\u900f\u904e\u7387\uff09<\/h3>\n\n\n\n
      \n
    • ITO\u4fdd\u8b77\u30d5\u30a3\u30eb\u30e0<\/li>\n\n\n\n
    • \u8d64\u5916\u7dda\u30b5\u30fc\u30de\u30eb\u30a4\u30e1\u30fc\u30b8\u30f3\u30b0\u88c5\u7f6e\u306e\u30a6\u30a3\u30f3\u30c9\u30a6\uff08\u8d64\u5916\u7dda\u900f\u904e\u6027\u5411\u4e0a\uff09<\/li>\n\n\n\n
    • X\u7dda\u30a6\u30a4\u30f3\u30c9\u30a6\uff08\u9ad8\u900f\u904e\u7387\u3001\u8010\u653e\u5c04\u7dda\u6027\uff09<\/li>\n\n\n\n
    • CO2\u30ec\u30fc\u30b6\u30fc\u30fb\u30a6\u30a3\u30f3\u30c9\u30a6<\/li>\n\n\n\n
    • \u9ad8\u901f\u8fce\u6483\u30df\u30b5\u30a4\u30eb\uff08HIM\uff09\u30ab\u30a6\u30ea\u30f3\u30b0<\/li>\n\n\n\n
    • \u7d2b\u5916\u7dda\u307e\u305f\u306f\u653e\u5c04\u7dda\u30bb\u30f3\u30b5\u30fc<\/li>\n<\/ul>\n\n\n\n

      \u71b1\u4f1d\u5c0e\u6027\u30d5\u30a3\u30eb\u30e0\uff08\u9ad8\u71b1\u4f1d\u5c0e\u6027\uff09<\/h3>\n\n\n\n
        \n
      • \u9ad8\u51fa\u529b\u30fb\u9ad8\u5468\u6ce2\u30c7\u30d0\u30a4\u30b9<\/li>\n\n\n\n
      • \u30ac\u30e9\u30b9\u7528\u900f\u660e\u71b1\u4f1d\u5c0e\u30d5\u30a3\u30eb\u30e0<\/li>\n\n\n\n
      • \u5149\u96fb\u5b50\u30c7\u30d0\u30a4\u30b9\u7528\u653e\u71b1\u30d5\u30a3\u30eb\u30e0<\/li>\n\n\n\n
      • \u9ad8\u5468\u6ce2\u304a\u3088\u3073\u30de\u30a4\u30af\u30ed\u6ce2\u30c7\u30d0\u30a4\u30b9\u306e\u30d2\u30fc\u30c8\u30b7\u30f3\u30af<\/li>\n\n\n\n
      • \u6e29\u5ea6\u30bb\u30f3\u30b5\u30fc<\/li>\n<\/ul>\n\n\n\n

        \u97f3\u97ff<\/h3>\n\n\n\n
          \n
        • \u30b9\u30d4\u30fc\u30ab\u30fc\u30b3\u30fc\u30f3<\/li>\n\n\n\n
        • \u8868\u9762\u5f3e\u6027\u6ce2\u30c7\u30d0\u30a4\u30b9(SAW) [\u9ad8\u5e2f\u57df(4GHZ-6GHZ)\u30d5\u30a3\u30eb\u30bf<\/li>\n<\/ul>\n\n\n\n

          \u8010\u6469\u8017\u6027\u88c5\u98fe\u3081\u3063\u304d<\/h3>\n\n\n\n

          \u8d85\u786c\u5de5\u5177\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0<\/h3>\n\n\n\n
            \n
          • PCB\u30de\u30a4\u30af\u30ed\u30c9\u30ea\u30eb\u3068\u30b4\u30f3\u30b0\u30ab\u30c3\u30bf\u30fc<\/li>\n\n\n\n
          • 12%\u30cf\u30a4\u30b7\u30ea\u30b3\u30f3\u30a2\u30eb\u30df\u5408\u91d1\u52a0\u5de5\u3001\u9285\u3001\u9280\u3001\u91d1\u3001\u305d\u306e\u4ed6\u975e\u9244\u91d1\u5c5e\u52a0\u5de5\uff1b<\/li>\n\n\n\n
          • \u6728\u5de5\u696d\u306e\u30ca\u30a4\u30d5\u3001\u30a2\u30af\u30ea\u30eb CNC \u306e\u5207\u524a\u5de5\u5177<\/li>\n\n\n\n
          • \u30ab\u30df\u30bd\u30ea\u3001\u30d5\u30a3\u30eb\u30e0\u30b9\u30e9\u30a4\u30b5\u30fc<\/li>\n\n\n\n
          • \u9ad8\u7d1a\u5305\u4e01<\/li>\n<\/ul>\n\n\n\n

            \u8d85\u786c\u8cea\u6f64\u6ed1\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\uff08\u4eba\u4f53\u306b\u7121\u5bb3\u3001\u751f\u4f53\u9069\u5408\u6027\u3001\u8010\u6469\u8017\u6027\u3001\u81ea\u5df1\u6f64\u6ed1\u6027\uff09<\/h3>\n\n\n\n
              \n
            • \u30a4\u30f3\u30d7\u30e9\u30f3\u30c8\u533b\u7642\u6a5f\u5668\uff1a\u4eba\u5de5\u95a2\u7bc0\u3001\u7fa9\u6b6f\u3001\u6b6f\u79d1\u7528\u30c8\u30ec\u30fc<\/li>\n\n\n\n
            • \u9ad8\u5468\u6ce2\u96fb\u6c17\u30ca\u30a4\u30d5<\/li>\n<\/ul>\n\n\n\n

              \u81ea\u52d5\u8eca\u90e8\u54c1<\/h3>\n\n\n\n

              \u5404\u7a2e\u30c0\u30a4\u30e4\u30e2\u30f3\u30c9\u819c\u306e\u7279\u6027\u3068\u5929\u7136\u30c0\u30a4\u30e4\u30e2\u30f3\u30c9\u306e\u7279\u6027\u3068\u306e\u6bd4\u8f03<\/h2>\n\n\n\n

              \u30ca\u30ce\u30e9\u30a4\u30aa\u30f3\u30c0\u30a4\u30e4\u30e2\u30f3\u30c9\u30d5\u30a3\u30eb\u30e0\u300110-800nm\u6975\u8584\u8d85\u786c\u8cea\u7528\uff08\u8d85\u786c\u8cea\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u306f4000HV\u4ee5\u4e0a\uff09\u3002<\/p>\n\n\n\n

                \n
              • \u6210\u819c\u6e29\u5ea6\uff1ata-C\u3067\u306f80\u2103\u3001CVD\u6cd5\u3067\u306f\u901a\u5e38900\u2103\u4ee5\u4e0a\uff1b<\/li>\n\n\n\n
              • \u819c\u539a\uff1aTa-C\u6cd5\u306f\u901a\u5e38\u30ca\u30ce\u30e1\u30fc\u30c8\u30eb\u306e\u7bc4\u56f2\u3001\u30c0\u30a4\u30e4\u30e2\u30f3\u30c9\u6cd5\u306f\u7406\u8ad6\u4e0a\u819c\u539a\u306e\u5236\u9650\u306f\u306a\u3044\u3002\u30de\u30a4\u30af\u30ed\u30c9\u30ea\u30eb\u306a\u3069\u306e\u5de5\u5177\u3067\u306f\u901a\u5e385\uff5e10\u30df\u30af\u30ed\u30f3\uff1b<\/li>\n\n\n\n
              • \u7d50\u6676\u69cb\u9020\uff1ata-C\u306f\u56db\u9762\u4f53\u30a2\u30e2\u30eb\u30d5\u30a1\u30b9\u3001CVD\u306f\u5358\u7d50\u6676\u307e\u305f\u306f\u591a\u7d50\u6676\u3002<\/li>\n\n\n\n
              • \u786c\u5ea6: CVD\u30c0\u30a4\u30e4\u30e2\u30f3\u30c9\u306f\u3088\u308a\u786c\u3044\u305f\u3081\u3001\u6b20\u9665\u306e\u306a\u3044\u30c0\u30a4\u30e4\u30e2\u30f3\u30c9\u6750\u6599\u3092\u4f5c\u308b\u3053\u3068\u304c\u3067\u304d\u308b\u3002<\/li>\n\n\n\n
              • \u5fdc\u7528\u5206\u91ce\uff1aTa-C\u306f\u901a\u5e38\u3001\u8d85\u8584\u578b\u4fdd\u8b77\u819c\u3084\u71b1\u4f1d\u5c0e\u819c\u306b\u4f7f\u7528\u3055\u308c\u3001\u6210\u819c\u6e29\u5ea6\u304c\u4f4e\u3044\u305f\u3081\u3001\u57fa\u6750\u306b\u5236\u9650\u3055\u308c\u305a\u3001\u8d85\u8584\u578b\u5149\u5b66\u6539\u8cea\u819c\u3068\u8d85\u786c\u8cea\u81ea\u5df1\u6f64\u6ed1\u6027\u6539\u8cea\u819c\u306b\u5206\u3051\u3089\u308c\u308b\u3002\u307e\u305f\u3001CVD\u306f\u3001\u9ad8\u6e29\u3067\u30b5\u30a4\u30ba\u306b\u5236\u9650\u304c\u3042\u308b\u305f\u3081\u3001\u901a\u5e38\u3001\u8d85\u786c\u5207\u524a\u5de5\u5177\u3084\u9ad8\u7d1a\u88c5\u98fe\u54c1\u306a\u3069\u306b\u4f7f\u7528\u3055\u308c\u307e\u3059\uff1b<\/li>\n<\/ul>\n\n\n\n
                \u6027\u683c\u63cf\u5199<\/u><\/strong><\/td>\u5929\u7136\u30c0\u30a4\u30e4\u30e2\u30f3\u30c9<\/strong><\/td>CVD<\/strong><\/td>DLC (a:CH) <\/strong><\/td>\u30bfC<\/strong><\/td><\/tr>
                \u786c\u5ea6 (Gpa)<\/strong><\/td>100<\/td>80 - 100<\/td>10 - 50<\/td>80 - 100<\/td><\/tr>
                \u5bc6\u5ea6(g\/cm3)<\/strong><\/td>3.5<\/td>3.2 - 3.4<\/td>1.7 - 2.2<\/td>3.0 - 3.2<\/td><\/tr>
                \u6469\u64e6\u4fc2\u6570<\/strong><\/td>0.1<\/td>0.1\uff08\u30dd\u30ea\u30c3\u30b7\u30e5\uff09<\/td>0.1<\/td>0.1<\/td><\/tr>
                \u51f9\u51f8<\/strong><\/td>-<\/td>3\u03bcm<\/td>\u30aa\u30d7\u30c6\u30a3\u30ab\u30eb\u30fb\u30b9\u30e0\u30fc\u30b8\u30f3\u30b0<\/td>\u30aa\u30d7\u30c6\u30a3\u30ab\u30eb\u30fb\u30b9\u30e0\u30fc\u30b8\u30f3\u30b0<\/td><\/tr>
                \u7c98\u7740<\/strong><\/td>-<\/td>\u4fef\u3059<\/td>\u771f\u3093\u4e2d<\/td>\u5fa1\u524d<\/td><\/tr>
                \u84b8\u7740\u6e29\u5ea6<\/strong><\/td>-<\/td>>600\u00b0 C<\/td>120\u00b0 C - 325\u00b0 C<\/td>80\u00b0 C - 150\u00b0 C<\/td><\/tr>
                \u30d5\u30ec\u30fc\u30e0\u30ef\u30fc\u30af<\/strong><\/td>\u7d50\u6676\u5b66<\/td>\u7d50\u6676\u5b66<\/td>\u30a2\u30e2\u30eb\u30d5\u30a1\u30b9<\/td>\u30a2\u30e2\u30eb\u30d5\u30a1\u30b9<\/td><\/tr>
                \u53cd\u5fdc\u6027\u30ac\u30b9<\/strong><\/td>-<\/td>\u30a4\u30a8\u30b9<\/td>\u30a4\u30a8\u30b9<\/td>\u9078\u629e\u53ef\u80fd<\/td><\/tr>
                \u8010\u71b1\u6e29\u5ea6<\/strong><\/strong><\/td>-<\/td>600\u00b0 C+<\/td>250\u00b0 c - 350\u00b0 c<\/td>500\u00b0 C+<\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n

                \u30ca\u30c3\u30b7\u30e5 P \u30b7\u30ea\u30fc\u30ba DLC \u771f\u7a7a\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u88c5\u7f6e<\/h2>\n\n\n\n

                \u30ca\u30af\u30b7\u30aa\u30f3\u306eP\u30b7\u30ea\u30fc\u30ba\u306f\u3001PeCVD\u3001\u30a4\u30aa\u30f3\u30bd\u30fc\u30b9\u3001\u30b3\u30f3\u30dd\u30b8\u30c3\u30c8\u30fb\u30c7\u30dd\u30b8\u30b7\u30e7\u30f3\u306e3\u3064\u306e\u6210\u819c\u30d7\u30ed\u30bb\u30b9\u3067\u69cb\u6210\u3055\u308c\u3066\u3044\u308b\u3002<\/p>","protected":false},"excerpt":{"rendered":"

                ta-C\u30c0\u30a4\u30e4\u30e2\u30f3\u30c9\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u3068\u306f ta-C\u30c0\u30a4\u30e4\u30e2\u30f3\u30c9\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u306f\u3001\u56db\u9762\u4f53\u30a2\u30e2\u30eb\u30d5\u30a1\u30b9\u30ab\u30fc\u30dc\u30f3\uff08\u56db\u9762\u4f53\u975e\u6676\u8cea\u70ad\u7d20\uff09\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u3067\u3042\u308a\u3001\u30c0\u30a4\u30e4\u30e2\u30f3\u30c9\u30e9\u30a4\u30af\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\uff08DLC\uff09\u306e\u4e00\u7a2e\u3067\u3001\u6c34\u7d20\u30d5\u30ea\u30fcDLC\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u306b\u5c5e\u3057\u307e\u3059\u3002\u305d\u306e\u5fae\u5c0f\u786c\u5ea6\u306f3000 &#821 [...] \u306b\u9054\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u307e\u3059\u3002<\/p>","protected":false},"author":1,"featured_media":0,"comment_status":"closed","ping_status":"closed","template":"","meta":{"themepark_post_bcolor":"#f5f5f5","themepark_post_width":"1022px","themepark_post_img":"","themepark_post_img_po":"left","themepark_post_img_re":false,"themepark_post_img_cover":false,"themepark_post_img_fixed":false,"themepark_post_hide_title":false,"themepark_post_main_b":"","themepark_post_main_p":100,"themepark_paddingblock":false,"footnotes":""},"doc_category":[179],"doc_tag":[357,234,356],"class_list":["post-5188","docs","type-docs","status-publish","hentry","doc_category-pvd-faq","doc_tag-ito","doc_tag-ta-c","doc_tag-356"],"year_month":"2026-04","word_count":190,"total_views":0,"reactions":{"happy":0,"normal":0,"sad":0},"author_info":{"name":"\u305b\u3044\u3057\u3093","author_nicename":"lincy","author_url":"https:\/\/www.naxauam.com\/ja\/author\/lincy\/"},"doc_category_info":[{"term_name":"PVD\u6d82\u5c42\u7c7b-FAQ","term_url":"https:\/\/www.naxauam.com\/ja\/\u30c9\u30ad\u30e5\u30e1\u30f3\u30c8\u30ab\u30c6\u30b4\u30ea\/pvd\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u6559\u5ba4-\u3088\u304f\u3042\u308b\u8cea\u554f\/"}],"doc_tag_info":[{"term_name":"ITO\u73bb\u7483","term_url":"https:\/\/www.naxauam.com\/ja\/\u30c9\u30ad\u30e5\u30e1\u30f3\u30c8\u30bf\u30b0\/\u4f0a\u6771\u30ac\u30e9\u30b9\/"},{"term_name":"ta-C","term_url":"https:\/\/www.naxauam.com\/ja\/\u30c9\u30ad\u30e5\u30e1\u30f3\u30c8\u30bf\u30b0\/tac\/"},{"term_name":"\u91d1\u521a\u77f3\u6d82\u5c42","term_url":"https:\/\/www.naxauam.com\/ja\/\u30c9\u30ad\u30e5\u30e1\u30f3\u30c8\u30bf\u30b0\/\u30c0\u30a4\u30e4\u30e2\u30f3\u30c9\u30fb\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\/"}],"_links":{"self":[{"href":"https:\/\/www.naxauam.com\/ja\/wp-json\/wp\/v2\/docs\/5188","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.naxauam.com\/ja\/wp-json\/wp\/v2\/docs"}],"about":[{"href":"https:\/\/www.naxauam.com\/ja\/wp-json\/wp\/v2\/types\/docs"}],"author":[{"embeddable":true,"href":"https:\/\/www.naxauam.com\/ja\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.naxauam.com\/ja\/wp-json\/wp\/v2\/comments?post=5188"}],"version-history":[{"count":3,"href":"https:\/\/www.naxauam.com\/ja\/wp-json\/wp\/v2\/docs\/5188\/revisions"}],"predecessor-version":[{"id":5247,"href":"https:\/\/www.naxauam.com\/ja\/wp-json\/wp\/v2\/docs\/5188\/revisions\/5247"}],"wp:attachment":[{"href":"https:\/\/www.naxauam.com\/ja\/wp-json\/wp\/v2\/media?parent=5188"}],"wp:term":[{"taxonomy":"doc_category","embeddable":true,"href":"https:\/\/www.naxauam.com\/ja\/wp-json\/wp\/v2\/doc_category?post=5188"},{"taxonomy":"doc_tag","embeddable":true,"href":"https:\/\/www.naxauam.com\/ja\/wp-json\/wp\/v2\/doc_tag?post=5188"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}