{"id":4476,"date":"2024-07-25T14:52:04","date_gmt":"2024-07-25T06:52:04","guid":{"rendered":"https:\/\/www.naxauam.com\/?post_type=docs&#038;p=4476"},"modified":"2024-07-25T15:23:01","modified_gmt":"2024-07-25T07:23:01","password":"","slug":"01-\u5c04\u51fa\u6210\u5f62\u30b9\u30af\u30ea\u30e5\u30fc\u306e\u30af\u30ed\u30e0\u30e1\u30c3\u30ad\u3068pvd\u30c1\u30bf\u30f3\u30e1","status":"publish","type":"docs","link":"https:\/\/www.naxauam.com\/ja\/\u8af8\u6ce8\u610f\/01-\u5c04\u51fa\u6210\u5f62\u30b9\u30af\u30ea\u30e5\u30fc\u306e\u30af\u30ed\u30e0\u30e1\u30c3\u30ad\u3068pvd\u30c1\u30bf\u30f3\u30e1\/","title":{"rendered":"01 \u5c04\u51fa\u6210\u5f62\u30b9\u30af\u30ea\u30e5\u30fc\u306e\u30af\u30ed\u30e0\u30e1\u30c3\u30ad\u3068PVD\u30c1\u30bf\u30f3\u30e1\u30c3\u30ad\uff1f2\u3064\u306e\u30d7\u30ed\u30bb\u30b9\u306e\u9055\u3044\u306f\u4f55\u3067\u3059\u304b\uff1f"},"content":{"rendered":"<figure class=\"wp-block-image size-full\"><img loading=\"lazy\" decoding=\"async\" width=\"1297\" height=\"468\" src=\"https:\/\/www.naxauam.com\/wp-content\/uploads\/2024\/07\/image.png\" alt=\"\" class=\"wp-image-4481\" srcset=\"https:\/\/www.naxauam.com\/wp-content\/uploads\/2024\/07\/image.png 1297w, https:\/\/www.naxauam.com\/wp-content\/uploads\/2024\/07\/image-300x108.png 300w, https:\/\/www.naxauam.com\/wp-content\/uploads\/2024\/07\/image-810x292.png 810w, https:\/\/www.naxauam.com\/wp-content\/uploads\/2024\/07\/image-768x277.png 768w\" sizes=\"auto, (max-width: 1297px) 100vw, 1297px\" 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class=\"wp-block-heading\">\u5c04\u51fa\u6210\u5f62\u30b9\u30af\u30ea\u30e5\u30fc\u7528\u9014\u306b\u304a\u3051\u308bPVD\u30c1\u30bf\u30f3\u3081\u3063\u304d\u306e\u5229\u70b9\u3068\u6b20\u70b9\uff1a<\/h2>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u30ca\u30b7PVD\u771f\u7a7a\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u88c5\u7f6e\u3001\u9577\u30551700mm\u307e\u3067\u30022m\u3092\u8d85\u3048\u308b\u5927\u578b\u30cd\u30b8\u306b\u306f\u9069\u3055\u306a\u3044\uff1b<\/li>\n\n\n\n<li>PVD\u84b8\u7740\u6e29\u5ea6\u306f\u9ad8\u304f\u3001\u5c04\u51fa\u30b9\u30af\u30ea\u30e5\u30fc\u306f\u5909\u5f62\u306e\u5371\u967a\u6027\u304c\u3042\u308b\uff1bPVD\u306f\u901a\u5e38300\u2103\u306e\u9ad8\u6e29\u3067\u84b8\u7740\u3055\u308c\u308b\uff1b\u901a\u5e38\u3088\u308a\u9ad8\u3044\u5b89\u5b9a\u6027\u306f\u3088\u308a\u9ad8\u3044\u30a4\u30aa\u30f3\u30a8\u30cd\u30eb\u30ae\u30fc\u3001\u3088\u308a\u826f\u3044\u819c\u8cea\u3068\u7d50\u5408\u306b\u5bfe\u5fdc\u3059\u308b\u3002\u5408\u7406\u7684\u306a\u30ef\u30fc\u30af\u30cf\u30f3\u30ac\u30fc\u3068\u6b63\u78ba\u306a\u6e29\u5ea6\u5236\u5fa1\u306f\u3001\u6700\u5927\u306b\u771f\u76f4\u5ea6\u3092\u78ba\u4fdd\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u307e\u3059\uff1b<\/li>\n\n\n\n<li>PVD\u30c1\u30bf\u30f3\u3081\u3063\u304d\u306e\u4fa1\u683c\u306f\u30af\u30ed\u30e0\u3081\u3063\u304d\u306b\u6bd4\u3079\u30665-10\u500d\u9ad8\u3044\u3002\u7279\u306b\u8150\u98df\u6027\u306e\u9ad8\u3044\u74b0\u5883\u3067\u306f\u3001PVD\u5c64\u304c\u30b7\u30eb\u30af\u30ec\u30d9\u30eb\u306e\u539a\u3055\u306b\u9054\u3059\u308b\u3053\u3068\u304c\u8981\u6c42\u3055\u308c\u308b\u305f\u3081\u3001\u30b3\u30b9\u30c8\u304c\u5927\u5e45\u306b\u4e0a\u6607\u3057\u307e\u3059\u3002PVD\u7a92\u5316\u30af\u30ed\u30e0\u30d7\u30ed\u30bb\u30b9\u306b\u3088\u308b1700\u672c\u306e\u30a4\u30f3\u30b8\u30a7\u30af\u30b7\u30e7\u30f3\u30b9\u30af\u30ea\u30e5\u30fc\u306e\u4fa1\u683c\u306f1000\u30c9\u30eb\u4ee5\u4e0a\u3067\u3059\uff1b<\/li>\n\n\n\n<li>PVD\u306f\u524d\u51e6\u7406\u306b\u5bfe\u3059\u308b\u8981\u6c42\u304c\u975e\u5e38\u306b\u9ad8\u304f\u3001\u57fa\u6750\u306e\u8868\u9762\u4ed5\u4e0a\u3052\u306fRa\uff1c0.2\u3067\u3042\u308b\u5fc5\u8981\u304c\u3042\u308a\u3001\u30ef\u30fc\u30af\u30d4\u30fc\u30b9\u306f\u30d0\u30ea\u304c\u306a\u304f\u3001\u6cb9\u5206\u304c\u306a\u304f\u3001\u9178\u5316\u76ae\u819c\u304c\u306a\u3044\u306a\u3069\u3067\u306a\u3051\u308c\u3070\u306a\u3089\u306a\u3044\u3002\u4e0d\u9069\u5207\u306a\u524d\u51e6\u7406\u5de5\u7a0b\u306f\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u306e\u8131\u843d\u306b\u3064\u306a\u304c\u308b\u3002\u892a\u8272\u51e6\u7406\u306f\u53ef\u80fd\u3067\u3059\u304c\u3001\u30ef\u30fc\u30af\u306e\u8868\u9762\u4ed5\u4e0a\u3052\u3092\u7dad\u6301\u3059\u308b\u305f\u3081\u306b\u7814\u78e8\u3092\u5897\u3084\u3059\u5fc5\u8981\u304c\u3042\u308a\u307e\u3059\u3002<\/li>\n\n\n\n<li>PVD\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u306f\u8584\u304f\u3001\u96fb\u6c17\u3081\u3063\u304d\u306e\u3088\u3046\u306b\u57fa\u6750\u306e\u8868\u9762\u6b20\u9665\u3092\u4fee\u5fa9\u3059\u308b\u3053\u3068\u306f\u3067\u304d\u306a\u3044\uff1b<\/li>\n<\/ul>\n\n\n\n<p>\u4e00\u65b9\u3001\u30c1\u30bf\u30f3\u3081\u3063\u304d\u306f\u30012000HV\u4ee5\u4e0a\u306e\u9ad8\u786c\u5ea6\u8868\u9762\u3001\u3088\u308a\u7dfb\u5bc6\u306a\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u69cb\u9020\u3001\u3088\u308a\u591a\u304f\u306e\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u6750\u6599\u306e\u9078\u629e\u80a2\u3001\u3088\u308a\u9ad8\u3044\u8010\u71b1\u6027\u3001\u3088\u308a\u826f\u3044\u7d50\u5408\u3001\u3088\u308a\u74b0\u5883\u306b\u512a\u3057\u3044\u306a\u3069\u306e\u30d7\u30ed\u30bb\u30b9\u306e\u5229\u70b9\u306e\u305f\u3081\u306b\u3001\u4eca\u65e5\u3067\u306f\u5e83\u304f\u4f7f\u7528\u3055\u308c\u3066\u3044\u307e\u3059\u3002\u7279\u306b\u3001NANOX\u304c\u958b\u767a\u3057\u305f\u6700\u65b0\u306e\u30cf\u30a4\u30d1\u30ef\u30fcJVD\u6280\u8853\u306f\u3001\u9ad8\u901f\u304b\u3064\u8d85\u539a\u3044\u30c1\u30bf\u30f3\u3081\u3063\u304d\u3092\u9054\u6210\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u3001\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u306e\u30b3\u30b9\u30c8\u3092\u5927\u5e45\u306b\u524a\u6e1b\u3057\u3001\u540c\u6642\u306b\u5c04\u51fa\u6210\u5f62\u30b9\u30af\u30ea\u30e5\u30fc\u306e\u5bff\u547d\u3092\u5411\u4e0a\u3055\u305b\u307e\u3059\u3002<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">\u5c04\u51fa\u6210\u5f62\u7528\u306e\u4ee3\u8868\u7684\u306a\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u306e\u7a2e\u985e<\/h2>\n\n\n\n<figure class=\"wp-block-table\"><table class=\"has-fixed-layout\"><tbody><tr><td>\u4fdd\u8b77\u5c64<\/td><td>\u786c\u5ea6\uff1aHV<\/td><td>\u819c\u539a\uff1a\u03bcm<\/td><td>\u6297\u9178\u5316\u6e29\u5ea6<\/td><td>\u6469\u64e6\u4fc2\u6570<\/td><td>\u5916\u89b3 \u8272<\/td><td>\u52a0\u5de5\u6750\u6599\u306b\u9069\u3057\u3066\u3044\u308b<\/td><\/tr><tr><td>CrN<\/td><td>1800-2200<\/td><td>10-20<\/td><td>700<\/td><td>0.4<\/td><td>\u305d\u3046\u306f\u304f<\/td><td>\u900f\u660e\u306a\u5149\u5b66\u88fd\u54c1\u3001\u5404\u7a2e\u985e\u306e\u30ec\u30f3\u30ba\u3001\u5c0e\u5149\u677f\u306a\u3069\u306b\u9069\u7528\u3059\u308b\uff1b\u4e00\u822c\u7684\u306b\u4f7f\u7528\u3055\u308c\u308b\u5149\u5b66\u88fd\u54c1\u30d7\u30e9\u30b9\u30c1\u30c3\u30af\uff1aPMMA\u3001PC\u3001COC\u3001COP\u3001CR-39\u306a\u3069\u3002<\/td><\/tr><tr><td>CrAl+<\/td><td>3000-3500<\/td><td>5-7<\/td><td>1000<\/td><td>0.5<\/td><td>\u30c0\u30fc\u30af\u30b0\u30ec\u30fc<\/td><td>\u30ac\u30e9\u30b9\u7e4a\u7dad\u30bf\u30a4\u30d7\u300170%\u4ee5\u4e0b\u306e\u30a8\u30f3\u30b8\u30cb\u30a2\u30ea\u30f3\u30b0\u30d7\u30e9\u30b9\u30c1\u30c3\u30af\u3001\u70ad\u7d20\u7e4a\u7dad\u30bf\u30a4\u30d7\u300150%\u4ee5\u4e0b\uff1b<br>\u3053\u308c\u3089\u306e\u30d7\u30e9\u30b9\u30c1\u30c3\u30af\u306f\u3001PA\u3001PC\u3001PBT\u3001PPS\u3001PAR\u3001PEI\u3001PEEK\u306a\u3069\u3067\u3042\u308b\u3002<\/td><\/tr><tr><td>DLC<\/td><td>2000<\/td><td>1-3<\/td><td>350<\/td><td>0.1<\/td><td>\u9244<\/td><td>\u5c04\u51fa\u6210\u5f62; 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